Electret-based resonant micro energy harvesting in two dimensions:
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | English |
| Published: |
Tönning [u.a.]
<<Der>> Andere Verl.
2010
|
| Series: | MEMS technology and engineering
15 |
| Subjects: | |
| Online Access: | Inhaltsverzeichnis |
| Physical Description: | IV, 182 S. Ill., graph. Darst. 24 cm |
| ISBN: | 9783862470716 |
Staff View
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV039714919 | ||
| 003 | DE-604 | ||
| 005 | 20130311 | ||
| 007 | t | ||
| 008 | 111121s2010 gw ad|| m||| 00||| eng d | ||
| 015 | |a 10,N42 |2 dnb | ||
| 015 | |a 11,A42 |2 dnb | ||
| 016 | 7 | |a 1007620625 |2 DE-101 | |
| 020 | |a 9783862470716 |c kart. : EUR 41.90 (DE) |9 978-3-86247-071-6 | ||
| 024 | 3 | |a 9783862470716 | |
| 035 | |a (OCoLC)698552846 | ||
| 035 | |a (DE-599)DNB1007620625 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 044 | |a gw |c XA-DE-SH | ||
| 049 | |a DE-634 |a DE-703 | ||
| 082 | 0 | |a 621.313 |2 22/ger | |
| 084 | |a UP 4700 |0 (DE-625)146404: |2 rvk | ||
| 084 | |a 621.3 |2 sdnb | ||
| 100 | 1 | |a Bartsch, Ulrich |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Electret-based resonant micro energy harvesting in two dimensions |c Ulrich Bartsch |
| 264 | 1 | |a Tönning [u.a.] |b <<Der>> Andere Verl. |c 2010 | |
| 300 | |a IV, 182 S. |b Ill., graph. Darst. |c 24 cm | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a MEMS technology and engineering |v 15 | |
| 502 | |a Zugl.: Freiburg, Univ., Diss., 2010 | ||
| 546 | |a Zsfassnung in dt. und engl. | ||
| 650 | 0 | 7 | |a Elektret |0 (DE-588)4135024-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Resonator |0 (DE-588)4131574-1 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Energy Harvesting |0 (DE-588)7664612-9 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mikrogenerator |0 (DE-588)7540222-1 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a MEMS |0 (DE-588)4824724-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Ionenstrahlätzen |0 (DE-588)4162299-6 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Mikrogenerator |0 (DE-588)7540222-1 |D s |
| 689 | 0 | 1 | |a Elektret |0 (DE-588)4135024-8 |D s |
| 689 | 0 | 2 | |a MEMS |0 (DE-588)4824724-8 |D s |
| 689 | 0 | 3 | |a Resonator |0 (DE-588)4131574-1 |D s |
| 689 | 0 | 4 | |a Ionenstrahlätzen |0 (DE-588)4162299-6 |D s |
| 689 | 0 | 5 | |a Energy Harvesting |0 (DE-588)7664612-9 |D s |
| 689 | 0 | |5 DE-604 | |
| 830 | 0 | |a MEMS technology and engineering |v 15 |w (DE-604)BV035420886 |9 15 | |
| 856 | 4 | 2 | |m DNB Datenaustausch |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=024563143&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-024563143 | ||
Record in the Search Index
| _version_ | 1804148591187460096 |
|---|---|
| adam_text | IMAGE 1
CONTENTS
ABSTRACT 1
ZUSAMMENFASSUNG 3
1 INTRODUCTION 5
1.1 MICRO ENERGY HARVESTING 5
1.2 VIBRATION ENERGY HARVESTING 7
1.2.1 AMBIENT VIBRATION SOURCES 7
1.2.2 OPERATING PRINCIPLE 8
1.2.3 ELECTROSTATIC HARVESTING 9
1.2.4 STATE OF THE ART 11
1.3 SCOPE OF THE THESIS 14
2 ELECTRET-BASED ENERGY HARVESTING 17
2.1 INTRODUCTION TO ELECTRETS 17
2.2 APPLICATIONS OF ELECTRETS 18
2.3 HARVESTING PRINCIPLE 19
2.3.1 OPERATING PRINCIPLE 20
2.3.2 MODIFIED OPERATING PRINCIPLE 21
2.3.3 TIME-DEPENDENT ELECTRODE OVERLAP 22
2.4 PHYSICS OF RESONATORS 24
2.4.1 UNDAMPED MASS-SPRING SYSTEM 25
2.4.2 DAMPED MASS-SPRING SYSTEM 26
2.4.3 DAMPED MASS-SPRING SYSTEM WITH SUPPORT MOTION 28 2.5 OUTPUT POWER
31
2.5.1 CONSTANT COUNTER-ELECTRODE MOTION 34
2.5.2 SINUSOIDAL COUNTER-ELECTRODE MOTION 47
3 CYTOP AS AN ELECTRET 55
3.1 ELECTRET CHARGING 55
3.1.1 CORONA CHARGING 56
3.1.2 SURFACE POTENTIAL MEASUREMENT 57
3.2 ELECTRIC FIELDS OF ELECTRETS 58
3.2.1 SURFACE CHARGE DENSITY OF ELECTRETS 60
BIBLIOGRAFISCHE INFORMATIONEN HTTP://D-NB.INFO/1007620625
DIGITALISIERT DURCH
IMAGE 2
3.3
3.4
3.5
4 CYTOP 4.1 4.2
4.3
3.2.2 SURFACE POTENTIAL MEASUREMENT 3.2.3 CHARGE INDUCTION ON A
COUNTER-ELECTRODE
EXPERIMENTAL 3.3.1 TEST CHIPS 3.3.2 CORONA POLING STATION CORODIS
3.3.3 SURFACE POTENTIAL MEASUREMENT RESULTS
3.4.1 GRID VOLTAGE 3.4.2 CORONA TIP VOLTAGE 3.4.3 DURATION OF CHARGING
3.4.4 ELECTRET THICKNESS
3.4.5 CHARGING TEMPERATURE 3.4.6 CHARGE STABILITY AT ELEVATED
TEMPERATURES 3.4.7 WIDTH OF ELECTRET LINES 3.4.8 CYTOP VS. OXIDE/NITRIDE
ELECTRET
3.4.9 OVERVIEW OF RESULTS IMPROVED ELECTRET STRUCTURES 3.5.1 FLOATING
ELECTRET STRUCTURES 3.5.2 FLOATING GUARD STRUCTURES
AS AN ADHESIVE MATERIAL ALTERNATIVE ADHESIVE MATERIALS ADHESIVE BONDING
USING CYTOP 4.2.1 TEST CHIPS
4.2.2 FULL WAFER BONDING 4.2.3 FLIP-CHIP BONDING BOND STRENGTH
EVALUATION 4.3.1 TEST PROCEDURE AND SETUP
4.3.2 BONDING TEMPERATURE 4.3.3 BONDING PRESSURE 4.3.4 ADHESIVE LAYER
THICKNESS 4.3.5 CONCLUSIONS
5 ELECTRET-BASED ENERGY HARVESTING DEMONSTRATOR 5.1 DEMONSTRATOR SETUP
5.1.1 OPERATING PRINCIPLE 5.1.2 ELECTRET AND COUNTER-ELECTRODE CHIPS
61 62 63 63
66 67 69 69
73 73 74 75
76 77 80 81
83 83 86
91 91 93 93
94 94 94 95
98 100 101 102
103 103 103 103
IMAGE 3
5.1.3 EXPERIMENTAL SETUP
5.2 EXPERIMENTAL RESULTS 5.2.1 PARASITIC CAPACITANCES 5.2.2 RESISTIVE
LOAD 5.2.3 EXCITATION FREQUENCY
5.3 ENERGY STORAGE USING CAPACITORS
6 2D RESONATORS FOR MICRO ENERGY HARVESTING 6.1 RESONATORS FOR MICRO
ENERGY HARVESTING 6.2 EFFECTIVENESS OF 2D RESONATORS 6.2.1 VISCOUS
DAMPING
6.2.2 DRY FRICTION 6.2.3 ANISOTROPIE 2D RESONATORS 6.3 DESIGN AND
FABRICATION 6.3.1 2D RESONATOR WITH CONCENTRIC SPRING SYSTEM
6.3.2 FABRICATION 6.4 SIMULATION AND MODELING 6.4.1 ISOTROPIE MATERIAL
6.4.2 ANISOTROPIE MATERIAL
6.4.3 DYNAMIC RESPONSE 6.5 EXPERIMENTAL 6.5.1 SETUP
6.5.2 RESULTS
7 2D ELECTRET-BASED MICRO ENERGY HARVESTER 7.1 MEMS DESIGN 7.1.1
ELECTRET CHIP 7.1.2 RESONATOR CHIP 7.2 FABRICATION PROCESS
7.2.1 ELECTRET WAFER 7.2.2 RESONATOR WAFER 7.2.3 ASSEMBLY TECHNOLOGY 7.3
EXPERIMENTAL SETUP 7.4 EXPERIMENTAL RESULTS 7.4.1 MECHANICAL
CHARACTERIZATION 7.4.2 ELECTRICAL CHARACTERIZATION
104 106 107 108
110 111
115 115 116 116 118
119 120 121 123 124
127 129 130 134 134 135
141 141 142 143 144
144 146 148 150
150 151 151
111
IMAGE 4
7.4.3 ELECTROMECHANICAL CHARACTERIZATION 155
8 CONCLUSION AND OUTLOOK 159
8.1 CONCLUSION 159
8.2 OUTLOOK 161
9 REFERENCES 163
DANKSAGUNG 177
CURRICULUM VITAE 179
PUBLICATIONS 181
IV
|
| any_adam_object | 1 |
| author | Bartsch, Ulrich |
| author_facet | Bartsch, Ulrich |
| author_role | aut |
| author_sort | Bartsch, Ulrich |
| author_variant | u b ub |
| building | Verbundindex |
| bvnumber | BV039714919 |
| classification_rvk | UP 4700 |
| ctrlnum | (OCoLC)698552846 (DE-599)DNB1007620625 |
| dewey-full | 621.313 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.313 |
| dewey-search | 621.313 |
| dewey-sort | 3621.313 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Thesis Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02293nam a2200577 cb4500</leader><controlfield tag="001">BV039714919</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20130311 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">111121s2010 gw ad|| m||| 00||| eng d</controlfield><datafield tag="015" ind1=" " ind2=" "><subfield code="a">10,N42</subfield><subfield code="2">dnb</subfield></datafield><datafield tag="015" ind1=" " ind2=" "><subfield code="a">11,A42</subfield><subfield code="2">dnb</subfield></datafield><datafield tag="016" ind1="7" ind2=" "><subfield code="a">1007620625</subfield><subfield code="2">DE-101</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783862470716</subfield><subfield code="c">kart. : EUR 41.90 (DE)</subfield><subfield code="9">978-3-86247-071-6</subfield></datafield><datafield tag="024" ind1="3" ind2=" "><subfield code="a">9783862470716</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)698552846</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)DNB1007620625</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="a">gw</subfield><subfield code="c">XA-DE-SH</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-634</subfield><subfield code="a">DE-703</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.313</subfield><subfield code="2">22/ger</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UP 4700</subfield><subfield code="0">(DE-625)146404:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">621.3</subfield><subfield code="2">sdnb</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Bartsch, Ulrich</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Electret-based resonant micro energy harvesting in two dimensions</subfield><subfield code="c">Ulrich Bartsch</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Tönning [u.a.]</subfield><subfield code="b"><<Der>> Andere Verl.</subfield><subfield code="c">2010</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">IV, 182 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield><subfield code="c">24 cm</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">MEMS technology and engineering</subfield><subfield code="v">15</subfield></datafield><datafield tag="502" ind1=" " ind2=" "><subfield code="a">Zugl.: Freiburg, Univ., Diss., 2010</subfield></datafield><datafield tag="546" ind1=" " ind2=" "><subfield code="a">Zsfassnung in dt. und engl.</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Elektret</subfield><subfield code="0">(DE-588)4135024-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Resonator</subfield><subfield code="0">(DE-588)4131574-1</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Energy Harvesting</subfield><subfield code="0">(DE-588)7664612-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikrogenerator</subfield><subfield code="0">(DE-588)7540222-1</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">MEMS</subfield><subfield code="0">(DE-588)4824724-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Ionenstrahlätzen</subfield><subfield code="0">(DE-588)4162299-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4113937-9</subfield><subfield code="a">Hochschulschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Mikrogenerator</subfield><subfield code="0">(DE-588)7540222-1</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Elektret</subfield><subfield code="0">(DE-588)4135024-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">MEMS</subfield><subfield code="0">(DE-588)4824724-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="3"><subfield code="a">Resonator</subfield><subfield code="0">(DE-588)4131574-1</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="4"><subfield code="a">Ionenstrahlätzen</subfield><subfield code="0">(DE-588)4162299-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="5"><subfield code="a">Energy Harvesting</subfield><subfield code="0">(DE-588)7664612-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">MEMS technology and engineering</subfield><subfield code="v">15</subfield><subfield code="w">(DE-604)BV035420886</subfield><subfield code="9">15</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">DNB Datenaustausch</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=024563143&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-024563143</subfield></datafield></record></collection> |
| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV039714919 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T00:09:34Z |
| institution | BVB |
| isbn | 9783862470716 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-024563143 |
| oclc_num | 698552846 |
| open_access_boolean | |
| owner | DE-634 DE-703 |
| owner_facet | DE-634 DE-703 |
| physical | IV, 182 S. Ill., graph. Darst. 24 cm |
| publishDate | 2010 |
| publishDateSearch | 2010 |
| publishDateSort | 2010 |
| publisher | <<Der>> Andere Verl. |
| record_format | marc |
| series | MEMS technology and engineering |
| series2 | MEMS technology and engineering |
| spelling | Bartsch, Ulrich Verfasser aut Electret-based resonant micro energy harvesting in two dimensions Ulrich Bartsch Tönning [u.a.] <<Der>> Andere Verl. 2010 IV, 182 S. Ill., graph. Darst. 24 cm txt rdacontent n rdamedia nc rdacarrier MEMS technology and engineering 15 Zugl.: Freiburg, Univ., Diss., 2010 Zsfassnung in dt. und engl. Elektret (DE-588)4135024-8 gnd rswk-swf Resonator (DE-588)4131574-1 gnd rswk-swf Energy Harvesting (DE-588)7664612-9 gnd rswk-swf Mikrogenerator (DE-588)7540222-1 gnd rswk-swf MEMS (DE-588)4824724-8 gnd rswk-swf Ionenstrahlätzen (DE-588)4162299-6 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Mikrogenerator (DE-588)7540222-1 s Elektret (DE-588)4135024-8 s MEMS (DE-588)4824724-8 s Resonator (DE-588)4131574-1 s Ionenstrahlätzen (DE-588)4162299-6 s Energy Harvesting (DE-588)7664612-9 s DE-604 MEMS technology and engineering 15 (DE-604)BV035420886 15 DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=024563143&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Bartsch, Ulrich Electret-based resonant micro energy harvesting in two dimensions MEMS technology and engineering Elektret (DE-588)4135024-8 gnd Resonator (DE-588)4131574-1 gnd Energy Harvesting (DE-588)7664612-9 gnd Mikrogenerator (DE-588)7540222-1 gnd MEMS (DE-588)4824724-8 gnd Ionenstrahlätzen (DE-588)4162299-6 gnd |
| subject_GND | (DE-588)4135024-8 (DE-588)4131574-1 (DE-588)7664612-9 (DE-588)7540222-1 (DE-588)4824724-8 (DE-588)4162299-6 (DE-588)4113937-9 |
| title | Electret-based resonant micro energy harvesting in two dimensions |
| title_auth | Electret-based resonant micro energy harvesting in two dimensions |
| title_exact_search | Electret-based resonant micro energy harvesting in two dimensions |
| title_full | Electret-based resonant micro energy harvesting in two dimensions Ulrich Bartsch |
| title_fullStr | Electret-based resonant micro energy harvesting in two dimensions Ulrich Bartsch |
| title_full_unstemmed | Electret-based resonant micro energy harvesting in two dimensions Ulrich Bartsch |
| title_short | Electret-based resonant micro energy harvesting in two dimensions |
| title_sort | electret based resonant micro energy harvesting in two dimensions |
| topic | Elektret (DE-588)4135024-8 gnd Resonator (DE-588)4131574-1 gnd Energy Harvesting (DE-588)7664612-9 gnd Mikrogenerator (DE-588)7540222-1 gnd MEMS (DE-588)4824724-8 gnd Ionenstrahlätzen (DE-588)4162299-6 gnd |
| topic_facet | Elektret Resonator Energy Harvesting Mikrogenerator MEMS Ionenstrahlätzen Hochschulschrift |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=024563143&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| volume_link | (DE-604)BV035420886 |
| work_keys_str_mv | AT bartschulrich electretbasedresonantmicroenergyharvestingintwodimensions |