Plasma processing: [... original papers based on the presentations at the 7th International Conference on Reactive Plasmas, 28th Symposium on Plasma Processing (ICRP-7, SPP-28) held in Paris, France, on October 4-8, 2010 ...]
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Tokyo
Japan Soc. of Applied Physics
2011
|
| Schriftenreihe: | Japanese journal of applied physics
50,8,2 : special issue |
| Schlagworte: | |
| Beschreibung: | Einzelaufnahme eines Zeitschr.-Heftes |
| Beschreibung: | Getr. Zählung Ill., graph. Darst. |
Internformat
MARC
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Datensatz im Suchindex
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| spelling | Plasma processing [... original papers based on the presentations at the 7th International Conference on Reactive Plasmas, 28th Symposium on Plasma Processing (ICRP-7, SPP-28) held in Paris, France, on October 4-8, 2010 ...] ed. by Hirotaka Toyoda ... Special issue: plasma processing Tokyo Japan Soc. of Applied Physics 2011 Getr. Zählung Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Japanese journal of applied physics 50,8,2 : special issue Einzelaufnahme eines Zeitschr.-Heftes Plasmastrahlbearbeitung (DE-588)4136199-4 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2010 Paris gnd-content Plasmastrahlbearbeitung (DE-588)4136199-4 s DE-604 Toyoda, Hirotaka Sonstige oth |
| spellingShingle | Plasma processing [... original papers based on the presentations at the 7th International Conference on Reactive Plasmas, 28th Symposium on Plasma Processing (ICRP-7, SPP-28) held in Paris, France, on October 4-8, 2010 ...] Plasmastrahlbearbeitung (DE-588)4136199-4 gnd |
| subject_GND | (DE-588)4136199-4 (DE-588)1071861417 |
| title | Plasma processing [... original papers based on the presentations at the 7th International Conference on Reactive Plasmas, 28th Symposium on Plasma Processing (ICRP-7, SPP-28) held in Paris, France, on October 4-8, 2010 ...] |
| title_alt | Special issue: plasma processing |
| title_auth | Plasma processing [... original papers based on the presentations at the 7th International Conference on Reactive Plasmas, 28th Symposium on Plasma Processing (ICRP-7, SPP-28) held in Paris, France, on October 4-8, 2010 ...] |
| title_exact_search | Plasma processing [... original papers based on the presentations at the 7th International Conference on Reactive Plasmas, 28th Symposium on Plasma Processing (ICRP-7, SPP-28) held in Paris, France, on October 4-8, 2010 ...] |
| title_full | Plasma processing [... original papers based on the presentations at the 7th International Conference on Reactive Plasmas, 28th Symposium on Plasma Processing (ICRP-7, SPP-28) held in Paris, France, on October 4-8, 2010 ...] ed. by Hirotaka Toyoda ... |
| title_fullStr | Plasma processing [... original papers based on the presentations at the 7th International Conference on Reactive Plasmas, 28th Symposium on Plasma Processing (ICRP-7, SPP-28) held in Paris, France, on October 4-8, 2010 ...] ed. by Hirotaka Toyoda ... |
| title_full_unstemmed | Plasma processing [... original papers based on the presentations at the 7th International Conference on Reactive Plasmas, 28th Symposium on Plasma Processing (ICRP-7, SPP-28) held in Paris, France, on October 4-8, 2010 ...] ed. by Hirotaka Toyoda ... |
| title_short | Plasma processing |
| title_sort | plasma processing original papers based on the presentations at the 7th international conference on reactive plasmas 28th symposium on plasma processing icrp 7 spp 28 held in paris france on october 4 8 2010 |
| title_sub | [... original papers based on the presentations at the 7th International Conference on Reactive Plasmas, 28th Symposium on Plasma Processing (ICRP-7, SPP-28) held in Paris, France, on October 4-8, 2010 ...] |
| topic | Plasmastrahlbearbeitung (DE-588)4136199-4 gnd |
| topic_facet | Plasmastrahlbearbeitung Konferenzschrift 2010 Paris |
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