In-situ atomic layer deposition growth of Hf-oxide:
Saved in:
| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2010
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| Subjects: | |
| Online Access: | http://opus.kobv.de/btu/volltexte/2011/2261/ |
| Physical Description: | VIII, 57 Bl. graph. Darst. |
Staff View
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Record in the Search Index
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| indexdate | 2024-07-10T00:06:52Z |
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| spelling | Karavaev, Konstantin 1982- Verfasser (DE-588)1016441169 aut In-situ atomic layer deposition growth of Hf-oxide Konstantin Karavaev 2010 VIII, 57 Bl. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Cottbus, Techn. Univ., Diss., 2010 Hafniumdioxid (DE-588)4321052-1 gnd rswk-swf Atomlagenabscheidung (DE-588)7712127-2 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Atomlagenabscheidung (DE-588)7712127-2 s Hafniumdioxid (DE-588)4321052-1 s DE-604 Erscheint auch als Online-Ausgabe urn:nbn:de:kobv:co1-opus-22617 http://opus.kobv.de/btu/volltexte/2011/2261/ |
| spellingShingle | Karavaev, Konstantin 1982- In-situ atomic layer deposition growth of Hf-oxide Hafniumdioxid (DE-588)4321052-1 gnd Atomlagenabscheidung (DE-588)7712127-2 gnd |
| subject_GND | (DE-588)4321052-1 (DE-588)7712127-2 (DE-588)4113937-9 |
| title | In-situ atomic layer deposition growth of Hf-oxide |
| title_auth | In-situ atomic layer deposition growth of Hf-oxide |
| title_exact_search | In-situ atomic layer deposition growth of Hf-oxide |
| title_full | In-situ atomic layer deposition growth of Hf-oxide Konstantin Karavaev |
| title_fullStr | In-situ atomic layer deposition growth of Hf-oxide Konstantin Karavaev |
| title_full_unstemmed | In-situ atomic layer deposition growth of Hf-oxide Konstantin Karavaev |
| title_short | In-situ atomic layer deposition growth of Hf-oxide |
| title_sort | in situ atomic layer deposition growth of hf oxide |
| topic | Hafniumdioxid (DE-588)4321052-1 gnd Atomlagenabscheidung (DE-588)7712127-2 gnd |
| topic_facet | Hafniumdioxid Atomlagenabscheidung Hochschulschrift |
| url | http://opus.kobv.de/btu/volltexte/2011/2261/ |
| work_keys_str_mv | AT karavaevkonstantin insituatomiclayerdepositiongrowthofhfoxide |