In-situ atomic layer deposition growth of Hf-oxide:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Abschlussarbeit Buch |
| Sprache: | English |
| Veröffentlicht: |
2010
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| Schlagworte: | |
| Online-Zugang: | http://opus.kobv.de/btu/volltexte/2011/2261/ |
| Beschreibung: | VIII, 57 Bl. graph. Darst. |
Internformat
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV039587424 | ||
| 003 | DE-604 | ||
| 005 | 20110920 | ||
| 007 | t | ||
| 008 | 110919s2010 d||| m||| 00||| eng d | ||
| 035 | |a (OCoLC)918543789 | ||
| 035 | |a (DE-599)BVBBV039587424 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-634 | ||
| 100 | 1 | |a Karavaev, Konstantin |d 1982- |e Verfasser |0 (DE-588)1016441169 |4 aut | |
| 245 | 1 | 0 | |a In-situ atomic layer deposition growth of Hf-oxide |c Konstantin Karavaev |
| 264 | 1 | |c 2010 | |
| 300 | |a VIII, 57 Bl. |b graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 502 | |a Cottbus, Techn. Univ., Diss., 2010 | ||
| 650 | 0 | 7 | |a Hafniumdioxid |0 (DE-588)4321052-1 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Atomlagenabscheidung |0 (DE-588)7712127-2 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Atomlagenabscheidung |0 (DE-588)7712127-2 |D s |
| 689 | 0 | 1 | |a Hafniumdioxid |0 (DE-588)4321052-1 |D s |
| 689 | 0 | |5 DE-604 | |
| 776 | 0 | 8 | |i Erscheint auch als |n Online-Ausgabe |o urn:nbn:de:kobv:co1-opus-22617 |
| 856 | 4 | |u http://opus.kobv.de/btu/volltexte/2011/2261/ | |
| 912 | |a ebook | ||
| 999 | |a oai:aleph.bib-bvb.de:BVB01-024438588 | ||
Datensatz im Suchindex
| _version_ | 1804148421294030848 |
|---|---|
| any_adam_object | |
| author | Karavaev, Konstantin 1982- |
| author_GND | (DE-588)1016441169 |
| author_facet | Karavaev, Konstantin 1982- |
| author_role | aut |
| author_sort | Karavaev, Konstantin 1982- |
| author_variant | k k kk |
| building | Verbundindex |
| bvnumber | BV039587424 |
| collection | ebook |
| ctrlnum | (OCoLC)918543789 (DE-599)BVBBV039587424 |
| format | Thesis Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01243nam a2200361 c 4500</leader><controlfield tag="001">BV039587424</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20110920 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">110919s2010 d||| m||| 00||| eng d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)918543789</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV039587424</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-634</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Karavaev, Konstantin</subfield><subfield code="d">1982-</subfield><subfield code="e">Verfasser</subfield><subfield code="0">(DE-588)1016441169</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">In-situ atomic layer deposition growth of Hf-oxide</subfield><subfield code="c">Konstantin Karavaev</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2010</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">VIII, 57 Bl.</subfield><subfield code="b">graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="502" ind1=" " ind2=" "><subfield code="a">Cottbus, Techn. Univ., Diss., 2010</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Hafniumdioxid</subfield><subfield code="0">(DE-588)4321052-1</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Atomlagenabscheidung</subfield><subfield code="0">(DE-588)7712127-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4113937-9</subfield><subfield code="a">Hochschulschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Atomlagenabscheidung</subfield><subfield code="0">(DE-588)7712127-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Hafniumdioxid</subfield><subfield code="0">(DE-588)4321052-1</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Online-Ausgabe</subfield><subfield code="o">urn:nbn:de:kobv:co1-opus-22617</subfield></datafield><datafield tag="856" ind1="4" ind2=" "><subfield code="u">http://opus.kobv.de/btu/volltexte/2011/2261/</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ebook</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-024438588</subfield></datafield></record></collection> |
| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV039587424 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T00:06:52Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-024438588 |
| oclc_num | 918543789 |
| open_access_boolean | |
| owner | DE-634 |
| owner_facet | DE-634 |
| physical | VIII, 57 Bl. graph. Darst. |
| psigel | ebook |
| publishDate | 2010 |
| publishDateSearch | 2010 |
| publishDateSort | 2010 |
| record_format | marc |
| spelling | Karavaev, Konstantin 1982- Verfasser (DE-588)1016441169 aut In-situ atomic layer deposition growth of Hf-oxide Konstantin Karavaev 2010 VIII, 57 Bl. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Cottbus, Techn. Univ., Diss., 2010 Hafniumdioxid (DE-588)4321052-1 gnd rswk-swf Atomlagenabscheidung (DE-588)7712127-2 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Atomlagenabscheidung (DE-588)7712127-2 s Hafniumdioxid (DE-588)4321052-1 s DE-604 Erscheint auch als Online-Ausgabe urn:nbn:de:kobv:co1-opus-22617 http://opus.kobv.de/btu/volltexte/2011/2261/ |
| spellingShingle | Karavaev, Konstantin 1982- In-situ atomic layer deposition growth of Hf-oxide Hafniumdioxid (DE-588)4321052-1 gnd Atomlagenabscheidung (DE-588)7712127-2 gnd |
| subject_GND | (DE-588)4321052-1 (DE-588)7712127-2 (DE-588)4113937-9 |
| title | In-situ atomic layer deposition growth of Hf-oxide |
| title_auth | In-situ atomic layer deposition growth of Hf-oxide |
| title_exact_search | In-situ atomic layer deposition growth of Hf-oxide |
| title_full | In-situ atomic layer deposition growth of Hf-oxide Konstantin Karavaev |
| title_fullStr | In-situ atomic layer deposition growth of Hf-oxide Konstantin Karavaev |
| title_full_unstemmed | In-situ atomic layer deposition growth of Hf-oxide Konstantin Karavaev |
| title_short | In-situ atomic layer deposition growth of Hf-oxide |
| title_sort | in situ atomic layer deposition growth of hf oxide |
| topic | Hafniumdioxid (DE-588)4321052-1 gnd Atomlagenabscheidung (DE-588)7712127-2 gnd |
| topic_facet | Hafniumdioxid Atomlagenabscheidung Hochschulschrift |
| url | http://opus.kobv.de/btu/volltexte/2011/2261/ |
| work_keys_str_mv | AT karavaevkonstantin insituatomiclayerdepositiongrowthofhfoxide |