Introduction to microsystem design:
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Heidelberg [u.a.]
Springer
2011
|
| Series: | RWTHedition
|
| Subjects: | |
| Online Access: | Inhaltsverzeichnis |
| Physical Description: | XXI, 319 S. Ill., graph. Darst. |
| ISBN: | 9783642194887 9783642194894 |
Staff View
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV039362453 | ||
| 003 | DE-604 | ||
| 005 | 20111102 | ||
| 007 | t | ||
| 008 | 110803s2011 ad|| |||| 00||| eng d | ||
| 015 | |a 11,N06 |2 dnb | ||
| 015 | |a 11,A27 |2 dnb | ||
| 016 | 7 | |a 1009892967 |2 DE-101 | |
| 020 | |a 9783642194887 |c Pp. : EUR 106.95 (DE) (freier Pr.), ca. sfr 143.50 (freier Pr.) |9 978-3-642-19488-7 | ||
| 020 | |a 9783642194894 |c Online |9 978-3-642-19489-4 | ||
| 035 | |a (OCoLC)750710877 | ||
| 035 | |a (DE-599)DNB1009892967 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-1043 |a DE-92 |a DE-83 |a DE-703 |a DE-634 | ||
| 082 | 0 | |a 621.0113 |2 22/ger | |
| 084 | |a ZN 3750 |0 (DE-625)157334: |2 rvk | ||
| 084 | |a 620 |2 sdnb | ||
| 100 | 1 | |a Schomburg, Werner K. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Introduction to microsystem design |c Werner Karl Schomburg |
| 264 | 1 | |a Heidelberg [u.a.] |b Springer |c 2011 | |
| 300 | |a XXI, 319 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a RWTHedition | |
| 650 | 0 | 7 | |a Systementwurf |0 (DE-588)4261480-6 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |D s |
| 689 | 0 | 1 | |a Systementwurf |0 (DE-588)4261480-6 |D s |
| 689 | 0 | |5 DE-604 | |
| 776 | 0 | 8 | |i Erscheint auch als |n Online-Ausgabe |t Introduction to Microsystem Design |
| 856 | 4 | 2 | |m DNB Datenaustausch |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=024192742&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-024192742 | ||
Record in the Search Index
| _version_ | 1804148027353464832 |
|---|---|
| adam_text | IMAGE 1
CONTENTS
INTRODUCTION 1
SCALING LAWS 3
ELASTIC DEFORMATIONS 5
THIN FILMS 9
CONDUCTOR PATHS 21
MEMBRANES 29
STRAIN GAUGES ON MEMBRANES 53
BEAMS 65
VIBRATIONS 85
CAPILLARIES 107
CAPACITIVE FORCES 131
PIEZOELECTRIC EFFECT 137
THERMAL ACTUATORS 159
MICROOPTICS 177
DIFFUSION 191
BIBLIOGRAFISCHE INFORMATIONEN HTTP://D-NB.INFO/1009892967
DIGITALISIERT DURCH
IMAGE 2
XX CONTENTS
MICROVALVES 203
MICROPUMPS 229
MICRODOSING 251
ANALOGIES OF PHYSICAL DOMAINS 253
MECHANICAL DEVICES FOR ELECTRONICS 261
PRESSURE SENSORS 275
FLOW SENSORS 289
INERTIAL SENSORS 303
REFERENCES 311
INDEX 317
|
| any_adam_object | 1 |
| author | Schomburg, Werner K. |
| author_facet | Schomburg, Werner K. |
| author_role | aut |
| author_sort | Schomburg, Werner K. |
| author_variant | w k s wk wks |
| building | Verbundindex |
| bvnumber | BV039362453 |
| classification_rvk | ZN 3750 |
| ctrlnum | (OCoLC)750710877 (DE-599)DNB1009892967 |
| dewey-full | 621.0113 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.0113 |
| dewey-search | 621.0113 |
| dewey-sort | 3621.0113 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Maschinenbau / Maschinenwesen Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01708nam a2200433 c 4500</leader><controlfield tag="001">BV039362453</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20111102 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">110803s2011 ad|| |||| 00||| eng d</controlfield><datafield tag="015" ind1=" " ind2=" "><subfield code="a">11,N06</subfield><subfield code="2">dnb</subfield></datafield><datafield tag="015" ind1=" " ind2=" "><subfield code="a">11,A27</subfield><subfield code="2">dnb</subfield></datafield><datafield tag="016" ind1="7" ind2=" "><subfield code="a">1009892967</subfield><subfield code="2">DE-101</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783642194887</subfield><subfield code="c">Pp. : EUR 106.95 (DE) (freier Pr.), ca. sfr 143.50 (freier Pr.)</subfield><subfield code="9">978-3-642-19488-7</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783642194894</subfield><subfield code="c">Online</subfield><subfield code="9">978-3-642-19489-4</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)750710877</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)DNB1009892967</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-1043</subfield><subfield code="a">DE-92</subfield><subfield code="a">DE-83</subfield><subfield code="a">DE-703</subfield><subfield code="a">DE-634</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.0113</subfield><subfield code="2">22/ger</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 3750</subfield><subfield code="0">(DE-625)157334:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">620</subfield><subfield code="2">sdnb</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Schomburg, Werner K.</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Introduction to microsystem design</subfield><subfield code="c">Werner Karl Schomburg</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Heidelberg [u.a.]</subfield><subfield code="b">Springer</subfield><subfield code="c">2011</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XXI, 319 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">RWTHedition</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Systementwurf</subfield><subfield code="0">(DE-588)4261480-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikrosystemtechnik</subfield><subfield code="0">(DE-588)4221617-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Mikrosystemtechnik</subfield><subfield code="0">(DE-588)4221617-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Systementwurf</subfield><subfield code="0">(DE-588)4261480-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Online-Ausgabe</subfield><subfield code="t">Introduction to Microsystem Design</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">DNB Datenaustausch</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=024192742&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-024192742</subfield></datafield></record></collection> |
| id | DE-604.BV039362453 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T00:00:36Z |
| institution | BVB |
| isbn | 9783642194887 9783642194894 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-024192742 |
| oclc_num | 750710877 |
| open_access_boolean | |
| owner | DE-1043 DE-92 DE-83 DE-703 DE-634 |
| owner_facet | DE-1043 DE-92 DE-83 DE-703 DE-634 |
| physical | XXI, 319 S. Ill., graph. Darst. |
| publishDate | 2011 |
| publishDateSearch | 2011 |
| publishDateSort | 2011 |
| publisher | Springer |
| record_format | marc |
| series2 | RWTHedition |
| spelling | Schomburg, Werner K. Verfasser aut Introduction to microsystem design Werner Karl Schomburg Heidelberg [u.a.] Springer 2011 XXI, 319 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier RWTHedition Systementwurf (DE-588)4261480-6 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 s Systementwurf (DE-588)4261480-6 s DE-604 Erscheint auch als Online-Ausgabe Introduction to Microsystem Design DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=024192742&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Schomburg, Werner K. Introduction to microsystem design Systementwurf (DE-588)4261480-6 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
| subject_GND | (DE-588)4261480-6 (DE-588)4221617-5 |
| title | Introduction to microsystem design |
| title_auth | Introduction to microsystem design |
| title_exact_search | Introduction to microsystem design |
| title_full | Introduction to microsystem design Werner Karl Schomburg |
| title_fullStr | Introduction to microsystem design Werner Karl Schomburg |
| title_full_unstemmed | Introduction to microsystem design Werner Karl Schomburg |
| title_short | Introduction to microsystem design |
| title_sort | introduction to microsystem design |
| topic | Systementwurf (DE-588)4261480-6 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
| topic_facet | Systementwurf Mikrosystemtechnik |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=024192742&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT schomburgwernerk introductiontomicrosystemdesign |