Introduction to microsystem design:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Heidelberg [u.a.]
Springer
2011
|
| Schriftenreihe: | RWTHedition
|
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | XXI, 319 S. Ill., graph. Darst. |
| ISBN: | 9783642194887 9783642194894 |
Internformat
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| 245 | 1 | 0 | |a Introduction to microsystem design |c Werner Karl Schomburg |
| 264 | 1 | |a Heidelberg [u.a.] |b Springer |c 2011 | |
| 300 | |a XXI, 319 S. |b Ill., graph. Darst. | ||
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Datensatz im Suchindex
| _version_ | 1804148027353464832 |
|---|---|
| adam_text | IMAGE 1
CONTENTS
INTRODUCTION 1
SCALING LAWS 3
ELASTIC DEFORMATIONS 5
THIN FILMS 9
CONDUCTOR PATHS 21
MEMBRANES 29
STRAIN GAUGES ON MEMBRANES 53
BEAMS 65
VIBRATIONS 85
CAPILLARIES 107
CAPACITIVE FORCES 131
PIEZOELECTRIC EFFECT 137
THERMAL ACTUATORS 159
MICROOPTICS 177
DIFFUSION 191
BIBLIOGRAFISCHE INFORMATIONEN HTTP://D-NB.INFO/1009892967
DIGITALISIERT DURCH
IMAGE 2
XX CONTENTS
MICROVALVES 203
MICROPUMPS 229
MICRODOSING 251
ANALOGIES OF PHYSICAL DOMAINS 253
MECHANICAL DEVICES FOR ELECTRONICS 261
PRESSURE SENSORS 275
FLOW SENSORS 289
INERTIAL SENSORS 303
REFERENCES 311
INDEX 317
|
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| dewey-full | 621.0113 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.0113 |
| dewey-search | 621.0113 |
| dewey-sort | 3621.0113 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Maschinenbau / Maschinenwesen Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| illustrated | Illustrated |
| indexdate | 2024-07-10T00:00:36Z |
| institution | BVB |
| isbn | 9783642194887 9783642194894 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-024192742 |
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| physical | XXI, 319 S. Ill., graph. Darst. |
| publishDate | 2011 |
| publishDateSearch | 2011 |
| publishDateSort | 2011 |
| publisher | Springer |
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| series2 | RWTHedition |
| spelling | Schomburg, Werner K. Verfasser aut Introduction to microsystem design Werner Karl Schomburg Heidelberg [u.a.] Springer 2011 XXI, 319 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier RWTHedition Systementwurf (DE-588)4261480-6 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 s Systementwurf (DE-588)4261480-6 s DE-604 Erscheint auch als Online-Ausgabe Introduction to Microsystem Design DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=024192742&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Schomburg, Werner K. Introduction to microsystem design Systementwurf (DE-588)4261480-6 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
| subject_GND | (DE-588)4261480-6 (DE-588)4221617-5 |
| title | Introduction to microsystem design |
| title_auth | Introduction to microsystem design |
| title_exact_search | Introduction to microsystem design |
| title_full | Introduction to microsystem design Werner Karl Schomburg |
| title_fullStr | Introduction to microsystem design Werner Karl Schomburg |
| title_full_unstemmed | Introduction to microsystem design Werner Karl Schomburg |
| title_short | Introduction to microsystem design |
| title_sort | introduction to microsystem design |
| topic | Systementwurf (DE-588)4261480-6 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
| topic_facet | Systementwurf Mikrosystemtechnik |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=024192742&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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