APA (7th ed.) Citation

(2011). Advanced metallization for ULSI applications: [the Advanced Metallization Conference 2010, 20th Asian Session (ADMETA 2010) was held in Takeda Hall, The University of Tokyo, Tokyo, Japan, from October 19 to 22, 2010]. Japan Soc. of Applied Physics.

Chicago Style (17th ed.) Citation

Advanced Metallization for ULSI Applications: [the Advanced Metallization Conference 2010, 20th Asian Session (ADMETA 2010) Was Held in Takeda Hall, The University of Tokyo, Tokyo, Japan, from October 19 to 22, 2010]. Tokyo: Japan Soc. of Applied Physics, 2011.

MLA (9th ed.) Citation

Advanced Metallization for ULSI Applications: [the Advanced Metallization Conference 2010, 20th Asian Session (ADMETA 2010) Was Held in Takeda Hall, The University of Tokyo, Tokyo, Japan, from October 19 to 22, 2010]. Japan Soc. of Applied Physics, 2011.