(2011). Advanced metallization for ULSI applications: [the Advanced Metallization Conference 2010, 20th Asian Session (ADMETA 2010) was held in Takeda Hall, The University of Tokyo, Tokyo, Japan, from October 19 to 22, 2010]. Japan Soc. of Applied Physics.
Chicago-Zitierstil (17. Ausg.)Advanced Metallization for ULSI Applications: [the Advanced Metallization Conference 2010, 20th Asian Session (ADMETA 2010) Was Held in Takeda Hall, The University of Tokyo, Tokyo, Japan, from October 19 to 22, 2010]. Tokyo: Japan Soc. of Applied Physics, 2011.
MLA-Zitierstil (9. Ausg.)Advanced Metallization for ULSI Applications: [the Advanced Metallization Conference 2010, 20th Asian Session (ADMETA 2010) Was Held in Takeda Hall, The University of Tokyo, Tokyo, Japan, from October 19 to 22, 2010]. Japan Soc. of Applied Physics, 2011.