Advanced metallization for ULSI applications: [the Advanced Metallization Conference 2010, 20th Asian Session (ADMETA 2010) was held in Takeda Hall, The University of Tokyo, Tokyo, Japan, from October 19 to 22, 2010]
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Tokyo
Japan Soc. of Applied Physics
2011
|
| Schriftenreihe: | Japanese journal of applied physics
50,5,2 : Special issue |
| Schlagworte: | |
| Beschreibung: | Einzelaufnahme eines Zeitschr.-Heftes. - Kongress aus dem Vorwort ermittelt |
| Beschreibung: | Getr. Zählung Ill., graph. Darst. |
Internformat
MARC
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| 490 | 0 | |a Japanese journal of applied physics |v 50,5,2 : Special issue | |
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| 650 | 0 | 7 | |a ULSI |0 (DE-588)4226286-0 |2 gnd |9 rswk-swf |
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| 689 | 0 | 0 | |a ULSI |0 (DE-588)4226286-0 |D s |
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| 700 | 1 | |a Koike, Junichi |e Sonstige |4 oth | |
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Datensatz im Suchindex
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| indexdate | 2024-07-10T00:00:33Z |
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| language | English |
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| physical | Getr. Zählung Ill., graph. Darst. |
| publishDate | 2011 |
| publishDateSearch | 2011 |
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| publisher | Japan Soc. of Applied Physics |
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| spelling | Advanced metallization for ULSI applications [the Advanced Metallization Conference 2010, 20th Asian Session (ADMETA 2010) was held in Takeda Hall, The University of Tokyo, Tokyo, Japan, from October 19 to 22, 2010] ed. by Junichi Koike ... Tokyo Japan Soc. of Applied Physics 2011 Getr. Zählung Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Japanese journal of applied physics 50,5,2 : Special issue Einzelaufnahme eines Zeitschr.-Heftes. - Kongress aus dem Vorwort ermittelt ULSI (DE-588)4226286-0 gnd rswk-swf Metallisieren (DE-588)4169599-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2010 Tokio gnd-content ULSI (DE-588)4226286-0 s Metallisieren (DE-588)4169599-9 s DE-604 Koike, Junichi Sonstige oth |
| spellingShingle | Advanced metallization for ULSI applications [the Advanced Metallization Conference 2010, 20th Asian Session (ADMETA 2010) was held in Takeda Hall, The University of Tokyo, Tokyo, Japan, from October 19 to 22, 2010] ULSI (DE-588)4226286-0 gnd Metallisieren (DE-588)4169599-9 gnd |
| subject_GND | (DE-588)4226286-0 (DE-588)4169599-9 (DE-588)1071861417 |
| title | Advanced metallization for ULSI applications [the Advanced Metallization Conference 2010, 20th Asian Session (ADMETA 2010) was held in Takeda Hall, The University of Tokyo, Tokyo, Japan, from October 19 to 22, 2010] |
| title_auth | Advanced metallization for ULSI applications [the Advanced Metallization Conference 2010, 20th Asian Session (ADMETA 2010) was held in Takeda Hall, The University of Tokyo, Tokyo, Japan, from October 19 to 22, 2010] |
| title_exact_search | Advanced metallization for ULSI applications [the Advanced Metallization Conference 2010, 20th Asian Session (ADMETA 2010) was held in Takeda Hall, The University of Tokyo, Tokyo, Japan, from October 19 to 22, 2010] |
| title_full | Advanced metallization for ULSI applications [the Advanced Metallization Conference 2010, 20th Asian Session (ADMETA 2010) was held in Takeda Hall, The University of Tokyo, Tokyo, Japan, from October 19 to 22, 2010] ed. by Junichi Koike ... |
| title_fullStr | Advanced metallization for ULSI applications [the Advanced Metallization Conference 2010, 20th Asian Session (ADMETA 2010) was held in Takeda Hall, The University of Tokyo, Tokyo, Japan, from October 19 to 22, 2010] ed. by Junichi Koike ... |
| title_full_unstemmed | Advanced metallization for ULSI applications [the Advanced Metallization Conference 2010, 20th Asian Session (ADMETA 2010) was held in Takeda Hall, The University of Tokyo, Tokyo, Japan, from October 19 to 22, 2010] ed. by Junichi Koike ... |
| title_short | Advanced metallization for ULSI applications |
| title_sort | advanced metallization for ulsi applications the advanced metallization conference 2010 20th asian session admeta 2010 was held in takeda hall the university of tokyo tokyo japan from october 19 to 22 2010 |
| title_sub | [the Advanced Metallization Conference 2010, 20th Asian Session (ADMETA 2010) was held in Takeda Hall, The University of Tokyo, Tokyo, Japan, from October 19 to 22, 2010] |
| topic | ULSI (DE-588)4226286-0 gnd Metallisieren (DE-588)4169599-9 gnd |
| topic_facet | ULSI Metallisieren Konferenzschrift 2010 Tokio |
| work_keys_str_mv | AT koikejunichi advancedmetallizationforulsiapplicationstheadvancedmetallizationconference201020thasiansessionadmeta2010washeldintakedahalltheuniversityoftokyotokyojapanfromoctober19to222010 |