Resistive switching in TiO2 thin films:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Abschlussarbeit Buch |
| Sprache: | English |
| Veröffentlicht: |
Jülich
Forschungszentrum Jülich, Zentralbibliothek
2011
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| Schriftenreihe: | Schriften des Forschungszentrums Jülich
Reihe Information ; 17 |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | VII, 117 S. Ill., graph. Darst. 240 mm x 170 mm |
| ISBN: | 9783893367078 |
Internformat
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Datensatz im Suchindex
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IMAGE 1
CONTENTS
LIST OF FIGURES I
CHAPTER 1 INTRODUCTION 1
CHAPTER 2 FUNDAMENTALS AND OVERVIEW OF RESISTIVE SWITCHING MECHANISMS
. 7
2.1 FUNDAMENTALS OF TIC 2, DEFECTS AND ELECTRICAL CONDUCTION 7
2.1.1 TIO 2 7
2.1.2 DEFECTS AND NON-STOICHIOMETRIC TIO 2 8
2.1.3 BASIC ELECTRICAL CONDUCTION IN MIM STRUCTURES 10
2.2 RESISTIVE SWITCHING MEMORIES: MECHANISMS AND INTEGRATION STRUCTURES
11 2.2.1 MECHANISMS OF RESISTIVE SWITCHING 12
2.2.2 STUDY OF THE RESISTIVE SWITCHING IN TIO 2 THIN FILMS 19
2.2.3 INTEGRATION OF THE RESISTIVE SWITCHING MEMORY 20
CHAPTER 3 EXPERIMENTAL 23
3.1 FABRICATION METHODS 23
3.1.1 DC MAGNETRON REACTIVE SPUTTERING 23
3.1.2 ATOMIC LAYER DEPOSITION 24
3.1.3 EVAPORATION 26
3.1.4 MICROSTRUCTURING 27
3.2 CHARACTERISATION METHODS 29
3.2.1 CONDUCTIVE ATOMIC FORCE MICROSCOPY (CAFM) 29
CHAPTER 4 MATERIAL CHARACTERIZATIONS 31
4.1 CHARACTERISATION OF THE SPUTTERED TIO 2 THIN FILMS 31
4.2 CHARACTERISATION OF THE ALD TIO 2 THIN FILMS 33
CHAPTER 5 RESISTIVE SWITCHING IN PT/TIO 2/PT STRUCTURES 37
5.1 ELECTRO-FORMING OF PT/TIO 2/PT MIM STRUCTURES 37
5.1.1 ELECTRO-FORMING THEORY 37
5.1.2 CURRENT-CONTROLLED ELECTRO-FORMING OF PTFFIO 2/PT 39
5.2 SWITCHING BEHAVIOUR AND STRUCTURE CHANGE 40
5.2.1 UNIPOLAR AND BIPOLAR RESISTIVE SWITCHING 40
5.2.2 STRUCTURAL CHANGE 44
5.3 CAFM STUDY ON PT/TIO 2 47
5.3.1 FORMING PROCEDURE STUDIED WITH CAFM 48
5.3.2 RESISTIVE SWITCHING WITH CAFM 50
CHAPTER 6 RESISTIVE SWITCHING IN TIO 2 WITH CU OR AG ELECTRODES 55
BIBLIOGRAFISCHE INFORMATIONEN HTTP://D-NB.INFO/1013184106
DIGITALISIERT DURCH
IMAGE 2
6.1 ELECTRO-FORMING 55
6.2 RESISTIVE SWITCHING OF CU/TIO 2/PT STRUCTURES 61
6.2.1 TYPICAL BIPOLAR RESISTIVE SWITCHING 61
6.2.2 COMPLIANCE CURRENT-DEPENDENT RESISTIVE SWITCHING 62
6.2.3 NEGATIVE VOLTAGE DEPENDENCE OF RESISTIVE SWITCHING 66
6.2.4 DELAY TIME DEPENDENCE 68
6.2.5 SCALABILITY 69
6.2.6 ENDURANCE AND RETENTION OF HRS AND LRS 70
6.3 TEMPERATURE-DEPENDENCE OF RESISTANCE STATES 71
6.3.1 INITIAL STATE 76
6.3.2 OFF STATE 80
6.3.3 THREE ON STATES 84
6.3.4 DISCUSSION 93
6.4 RESISTIVE SWITCHING IN AG/TIO 2/PT STRUCTURES 95
6.5 CONDUCTIVE AFM STUDY OF RESISTIVE SWITCHING IN A CU/TIO 2/PT CELL 98
6.5.1 CAFM ON PRISTINE ALD TIO 2 98
6.5.2 CAFM ON TIO 2 AFTER REMOVING CU ELECTRODE 100
6.5.3 CHARACTERIZATION OF A SINGLE CONDUCTIVE SPOT 102
CHAPTER 7 SUMMARY AND OUTLOOK 107
BIBLIOGRAPHY 111 |
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| indexdate | 2025-02-21T13:00:44Z |
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| isbn | 9783893367078 |
| language | English |
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| physical | VII, 117 S. Ill., graph. Darst. 240 mm x 170 mm |
| publishDate | 2011 |
| publishDateSearch | 2011 |
| publishDateSort | 2011 |
| publisher | Forschungszentrum Jülich, Zentralbibliothek |
| record_format | marc |
| series | Schriften des Forschungszentrums Jülich |
| series2 | Schriften des Forschungszentrums Jülich : Reihe Information |
| spelling | Yang, Lin 1976- Verfasser (DE-588)1013645073 aut Resistive switching in TiO2 thin films Yang Lin Jülich Forschungszentrum Jülich, Zentralbibliothek 2011 VII, 117 S. Ill., graph. Darst. 240 mm x 170 mm txt rdacontent n rdamedia nc rdacarrier Schriften des Forschungszentrums Jülich : Reihe Information 17 Zugl.: Aachen, Techn. Hochsch., Diss., 2010 Speicherzelle (DE-588)4182147-6 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Speicherzelle (DE-588)4182147-6 s DE-604 Schriften des Forschungszentrums Jülich Reihe Information ; 17 (DE-604)BV035800087 17 DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=024163794&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Yang, Lin 1976- Resistive switching in TiO2 thin films Schriften des Forschungszentrums Jülich Speicherzelle (DE-588)4182147-6 gnd |
| subject_GND | (DE-588)4182147-6 (DE-588)4113937-9 |
| title | Resistive switching in TiO2 thin films |
| title_auth | Resistive switching in TiO2 thin films |
| title_exact_search | Resistive switching in TiO2 thin films |
| title_full | Resistive switching in TiO2 thin films Yang Lin |
| title_fullStr | Resistive switching in TiO2 thin films Yang Lin |
| title_full_unstemmed | Resistive switching in TiO2 thin films Yang Lin |
| title_short | Resistive switching in TiO2 thin films |
| title_sort | resistive switching in tio2 thin films |
| topic | Speicherzelle (DE-588)4182147-6 gnd |
| topic_facet | Speicherzelle Hochschulschrift |
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