Design and manufacturing of active microsystems:
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Berlin [u.a.]
Springer
2011
|
| Schriftenreihe: | Microtechnology and MEMS
|
| Schlagworte: | |
| Online-Zugang: | Inhaltstext Inhaltsverzeichnis |
| Beschreibung: | XII, 444 S. Ill., graph. Darst. |
| ISBN: | 9783642129025 9783642129032 |
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Datensatz im Suchindex
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IMAGE 1
CONTENTS
1 INTRODUCTION 1
1.1 INITIAL SITUATION 1
1.2 PROTOTYPE CONCEPTS FOR ACTIVE MICROSYSTEMS 4
1.3 SCIENTIFIC DEVELOPMENT 6
1.4 OUTLINE 7
PART I DESIGN AND CONSTRUCTION
2 ELECTROMAGNETIC DESIGN OF MICROACTUATORS 11
2.1 FORMS OF ELECTROMAGNETIC MICROACTUATORS 11
2.2 DESIGN AND CONSTRUCTION 12
2.3 MATERIAL PROPERTIES 13
2.4 COIL FORMS 14
2.5 FUNCTIONAL PRINCIPLES 14
2.6 DESIGN OF MICROMOTORS 19
REFERENCES 28
3 DRIVE SYSTEMS BASED ON ELECTROMAGNETIC MICROACTUATORS . 29 3.1
CONFIGURATION OF DRIVE SYSTEMS BASED ON ELECTROMAGNETIC MICROACTUATORS
29
3.2 POWER SUPPLY 30
3.3 CURRENT COMMAND GENERATION 38
3.4 POSITION CONTROL 40
REFERENCES 47
4 MODULAR COMPUTER AIDED DESIGN ENVIRONMENT FOR ACTIVE MICROSYSTEMS 49
4.1 INTRODUCTION 49
4.2 PHASE OF PRELIMINARY DESIGN 52
4.3 3D-MODEL SYNTHESIS AND OPTIMIZATION 56
BIBLIOGRAFISCHE INFORMATIONEN HTTP://D-NB.INFO/1001426274
DIGITALISIERT DURCH
IMAGE 2
VIII CONTENTS
4.4 SYNTHESIS AND OPTIMIZATION OF PROCESSES AND PROCESS SEQUENCES 58
REFERENCES 66
PART II GUIDING AND MEASURING IN ACTIVE MICROSYSTEMS
5 WEAR BEHAVIOR IN MICROACTUATOR INTERFACES 69
5.1 INTRODUCTION 69
5.2 TEST SYSTEMS 70
5.3 FABRICATION PROCESS OF TRIBOLOGICAL SURFACES 77
5.4 EXPERIMENTAL INVESTIGATIONS 79
5.5 CONCLUSION 86
REFERENCES 86
6 FRICTION BEHAVIOR IN MICROSYSTEMS 89
6.1 INTRODUCTION 89
6.2 PREPARATION OF MICROGUIDES AND BEARINGS 90
6.3 CHARACTERIZATION 93
6.4 RESULTS 97
6.5 CONCLUSION 106
REFERENCES 107
7 ACTIVE LINEAR GUIDING CONCEPTS FOR MICROSYSTEMS 109 7.1 INTRODUCTION
109
7.2 ACTIVE AEROSTATIC GUIDES FOR MICROSYSTEMS 110
7.3 ACTIVE MAGNETIC GUIDES FOR MICROSYSTEMS 117
7.4 CAPACITIVE DISPLACEMENT SENSORS FOR ACTIVE GUIDES 121 7.5 CONCLUSION
125
REFERENCES 126
8 DESIGN OF SENSORS FOR POSITION CONTROL OF MICROACTUATORS . 127 8.1
INTRODUCTION, REQUIREMENTS AND MEASUREMENT PRINCIPLE 127 8.2 SIMULATION
OF INTEGRATED LASER BEAM 3X3 COUPLERS 129 8.3 PRODUCTION OF INTEGRATED
3X3 COUPLERS IN GLASS 132
8.4 BEAM GUIDING BY REFRACTIVE AND DIFFRACTIVE ELEMENTS: GRATING, PRISM,
LENSES 134
8.5 SIGNAL DETECTION 137
8.6 REALTIME SIGNAL PROCESSING 138
8.7 ALIGNMENT AND FIXING OF OPTICAL COMPONENTS 141
8.8 SUMMARY 143
REFERENCES 144
IMAGE 3
CONTENTS IX
9 TACTILE DIMENSIONAL MICROMETROLOGY 145
9.1 INTRODUCTION 145
9.2 3D MICROPROBES 146
9.3 CALIBRATION OF PROBING FORCES 157
9.4 DIMENSIONAL STANDARDS FOR MICRO METROLOGY 160
REFERENCES 163
PART III MANUFACTURING AND FABRICATION
10 FABRICATION OF MAGNETIC LAYERS FOR ELECTROMAGNETIC MICROACTUATORS 167
10.1 INTRODUCTION 167
10.2 FABRICATION TECHNOLOGIES 169
10.3 TEST SYSTEMS 171
10.4 EXPERIMENTAL INVESTIGATIONS ON SOFT MAGNETIC MATERIALS 173 10.5
EXPERIMENTAL INVESTIGATION ON HARD MAGNETIC MATERIALS 179 10.6 SYSTEM
INTEGRATION ASPECTS 184
10.7 CONCLUSION 186
REFERENCES 186
11 FABRICATION OF EXCITATION COILS FOR ELECTROMAGNETIC MICROACTUATORS
189
11.1 INTRODUCTION 189
11.2 PHOTORESIST PATTERN CREATION 191
11.3 ELECTROPLATING OF CU MICROCOILS 196
11.4 INSULATION 197
11.5 INTEGRATION OF COILS INTO MICROACTUATORS 198
11.6 CONCLUSION 205
REFERENCES 205
12 DEVELOPMENT AND FABRICATION OF ELECTROMAGNETIC MICROACTUATORS 207
12.1 INTRODUCTION 207
12.2 LINEAR VR STEPPER MOTOR 209
12.3 ROTATING VR STEPPER MOTOR 215
12.4 ROTATING SYNCHRONOUS MICRO MOTORS 219
12.5 CONCLUSION AND OUTLOOK 223
REFERENCES 224
13 DEVELOPMENT AND FABRICATION OF LINEAR AND MULTI-AXIS MICROACTUATORS
225
13.1 INTRODUCTION 225
13.2 LINEAR VR MICROSTEP MOTOR 226
13.3 LINEAR HYBRID MICROSTEP MOTOR 227
13.4 LINEAR SYNCHRONOUS MICROMOTOR 230
13.5 XY-ACTUATOR INVESTIGATIONS 234
IMAGE 4
X CONTENTS
13.6 VR MICRO- AND NANOPOSITIONIER FOR XY-ACTUATORS 235 13.7
EXPERIMENTAL 241
13.8 CONCLUSION 242
REFERENCES 243
14 MICROMACHINING OF PARTS FOR MICROSYSTEMS 245
14.1 INTRODUCTION 245
14.2 MICROGRINDING 246
14.3 MICROGRINDING OF BOREHOLES 260
14.4 CONCLUSIONS 262
REFERENCES 264
PART IV MICROASSEMBLY
15 SIZE-ADAPTED MANIPULATION ROBOTS FOR MICROASSEMBLY . 269 15.1
INTRODUCTION 269
15.2 SIZE-ADAPTED ROBOT FOR MICROASSEMBLY 272
15.3 MINIATURIZED ROBOT FOR DESKTOP FACTORIES 277
15.4 CONCLUSION 285
REFERENCES 286
16 TOOLS FOR HANDLING AND ASSEMBLING OF MICROPARTS 287
16.1 INTRODUCTION 287
16.2 ELECTROSTATIC FORCES IN MICROHANDLING PROCESSES 289
16.3 MECHANICAL MICROGRIPPERS WITH INTEGRATED ACTUATORS 297 16.4
PNEUMATICALLY DRIVEN AUXILIARY MICROTOOLS 305
REFERENCES 307
17 STEREOPHOTOGRAMMETRY IN MICROASSEMBLY 309
17.1 INTRODUCTION 309
17.2 PHOTOGRAMMETRY 310
17.3 CONCLUSIONS 325
REFERENCES 326
18 USE OF HOT MELT ADHESIVES FOR THE ASSEMBLY OF MICROSYSTEMS 327
18.1 ADHESIVE BONDING AS MICRO JOINING TECHNOLOGY 327
18.2 PROPERTIES OF HOT MELT ADHESIVES 328
18.3 ADHESIVE SYSTEM SELECTION CRITERIA 329
18.4 DIFFERENT PARTICLE SHAPES OF MICRO-SCALE HOT MELT ADHESIVES . 331
18.5 APPLICATION METHODS FOR MICRO-SCALE HOT MELT ADHESIVES . . . 333
18.6 PROPERTIES OF HOT MELT ADHESIVE BONDS 339
18.7 CONCLUSION 342
REFERENCES 343
IMAGE 5
CONTENTS XI
19 DESIGN OF A MICROASSEMBLY PROCESS BASED ON HOT MELT ADHESIVES 345
19.1 INTRODUCTION 345
19.2 PROCESS DESIGN FOR THE JOINING WITH HOT MELT ADHESIVES 348 19.3
IMPLEMENTATION OF A PASSIVE HEAT MANAGMENT 352
19.4 IMPLEMENTATION OF ACTIVE HEAT MANAGMENT 358
19.5 CONCLUSION 362
REFERENCES 363
20 DESIGN OF AN AUTOMATED ASSEMBLY FOR MICRO AND NANO ACTUATORS 365
20.1 INTRODUCTION 365
20.2 ASSEMBLY CONCEPT FOR A LINEAR MICROACTUATOR WITH LEVITATION SYSTEM
367
20.3 ASSEMBLY CONCEPT FOR A XY-MICRO- AND NANOPOSITIONER 369 20.4
CONCLUSION 371
PART V INDUSTRIAL APPLICATIONS
21 BISTABLE MICROVALVE FOR BIOMEDICAL USAGE 375
21.1 INTRODUCTION 375
21.2 CONCEPT 377
21.3 TRANSFER OF SFB KNOWLEDGE 379
21.4 REALIZATION 379
21.5 COMBINATION OF THE VALVE LAYERS 387
21.6 PRE-EVALUATION OF THE INTERMEDIATES 388
21.7 SUMMARY AND PROTOTYPE 390
21.8 OUTLOOK 391
REFERENCES 392
22 MICROASSEMBLY FOLLOWING THE DESKTOP FACTORY CONCEPT . . 393 22.1
INTRODUCTION : 393
22.2 MINIATURIZED COMPONENTS 397
22.3 NEW PROTOTYPE OF THE PARVUS ROBOT 399
22.4 EXPERIMENTAL VERIFICATION 402
22.5 CONCLUSION 407
REFERENCES 408
23 AUTOMATED OPTICAL BGA-INSPECTION - AUTOBIN 411
23.1 INTRODUCTION 411
23.2 SPECIFICATION OF THE TARGET SYSTEM 416
REFERENCES 422
IMAGE 6
XII CONTENTS
24 SLIDER WITH INTEGRATED MICROACTUATOR (SLIM) FOR SECOND STAGE
ACTUATION IN HARD DISK DRIVES 423
24.1 INTRODUCTION: 423
24.2 CONCEPT 424
24.3 MICROMAGNETICS DESIGN AND FABRICATION 426
24.4 MICROMECHANICS DESIGN AND FABRICATION 430
24.5 SLIM SYSTEM INTEGRATION 432
24.6 EXPERIMENTAL INVESTIGATIONS 436
24.7 CONCLUSION AND OUTLOOK 438
REFERENCES 439
INDEX 441 |
| any_adam_object | 1 |
| author2 | Büttgenbach, Stephanus |
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| dewey-full | 621 681 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics 681 - Precision instruments and other devices |
| dewey-raw | 621 681 |
| dewey-search | 621 681 |
| dewey-sort | 3621 |
| dewey-tens | 620 - Engineering and allied operations 680 - Manufacture of products for specific uses |
| discipline | Maschinenbau / Maschinenwesen Handwerk und Gewerbe / Verschiedene Technologien Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| spelling | Design and manufacturing of active microsystems Stephanus Büttgenbach ... eds. Berlin [u.a.] Springer 2011 XII, 444 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Microtechnology and MEMS Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Systementwicklung (DE-588)4126945-7 gnd rswk-swf Mikrofertigung (DE-588)7523640-0 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 s Systementwicklung (DE-588)4126945-7 s Mikrofertigung (DE-588)7523640-0 s DE-604 Büttgenbach, Stephanus edt Erscheint auch als Online-Ausgabe Design and Manufacturing of Active Microsystems text/html http://deposit.dnb.de/cgi-bin/dokserv?id=3452501&prov=M&dok%5Fvar=1&dok%5Fext=htm Inhaltstext DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=022643848&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
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| title | Design and manufacturing of active microsystems |
| title_auth | Design and manufacturing of active microsystems |
| title_exact_search | Design and manufacturing of active microsystems |
| title_full | Design and manufacturing of active microsystems Stephanus Büttgenbach ... eds. |
| title_fullStr | Design and manufacturing of active microsystems Stephanus Büttgenbach ... eds. |
| title_full_unstemmed | Design and manufacturing of active microsystems Stephanus Büttgenbach ... eds. |
| title_short | Design and manufacturing of active microsystems |
| title_sort | design and manufacturing of active microsystems |
| topic | Mikrosystemtechnik (DE-588)4221617-5 gnd Systementwicklung (DE-588)4126945-7 gnd Mikrofertigung (DE-588)7523640-0 gnd |
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