Surface and thin film analysis: a compendium of principles, instrumentation, and applications
Gespeichert in:
| Weitere Verfasser: | |
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| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Weinheim
Wiley-VCH
2011
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| Ausgabe: | 2., compl. rev. and enl. ed. |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | Hrsg. der 1. Aufl.: Henning Bubert |
| Beschreibung: | XXIV, 533 S. Ill., graph. Darst. |
| ISBN: | 9783527320479 3527320474 |
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| 020 | |a 3527320474 |c (hbk.) £115.00 |9 3-527-32047-4 | ||
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| 245 | 1 | 0 | |a Surface and thin film analysis |b a compendium of principles, instrumentation, and applications |c ed. by Gernot Friedbacher ... |
| 250 | |a 2., compl. rev. and enl. ed. | ||
| 264 | 1 | |a Weinheim |b Wiley-VCH |c 2011 | |
| 300 | |a XXIV, 533 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 500 | |a Hrsg. der 1. Aufl.: Henning Bubert | ||
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Datensatz im Suchindex
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| adam_text | IMAGE 1
CONTENTS
PREFACE TO THE FIRST EDITION XVII PREFACE TO THE SECOND EDITION X IX
LIST OF CONTRIBUTORS X XI
1 INTRODUCTION 1
JOHN C. RIVIERE AND HENNING BUBERT
PART ONE ELECTRON DETECTION 7
2 X-RAY PHOTOELECTRON SPECTROSCOPY (XPS) 9 HENNING BUBERT, JOHN C.
RIVIERE, AND WOLFGANG S.M. WERNER 2.1 PRINCIPLES 9
2.2 INSTRUMENTATION 12
2.2.1 VACUUM REQUIREMENTS 12 2.2.2 X-RAY SOURCES 13 2.2.3 SYNCHROTRON
RADIATION 16 2.2 A ELECTRON ENERGY ANALYZERS 16 2.2.5 SPATIAL RESOLUTION
18 2.3 SPECTRAL INFORMATION AND CHEMICAL SHIFTS 19
2.4 QUANTIFICATION, DEPTH PROFILING, AND IMAGING 21 2 A.I QUANTIFICATION
21
2.4.2 DEPTH PROFILING 23 2.4.3 IMAGING 26
2.5 THE AUGER PARAMETER 27
2.6 APPLICATIONS 28
2.6.1 CATALYSIS 28
2.6.2 POLYMERS 30
2.6.3 CORROSION AND PASSIVATION 31 2.6.4 ADHESION 32
2.6.5 SUPERCONDUCTORS 34 2.6.6 SEMICONDUCTORS 35
BIBLIOGRAFISCHE INFORMATIONEN HTTP://D-NB.INFO/1007936827
DIGITALISIERT DURCH
IMAGE 2
VI CONTENTS
2.7 ULTRAVIOLET PHOTOELECTRON SPECTROSCOPY (UPS) 38
REFERENCES 39
3 AUGER ELECTRON SPECTROSCOPY (AES) 43 HENNING BUBERT, JOHN C. RIVIERE,
AND WOLFGANG S. M. WERNER
3.1 PRINCIPLES 43
3.2 INSTRUMENTATION 44 3.2.1 VACUUM REQUIREMENTS 44 3.2.2 ELECTRON
SOURCES 44 3.2.3 ELECTRON-ENERGY ANALYZERS 45 3.3 SPECTRAL INFORMATION
47
3.4 QUANTIFICATION AND DEPTH PROFILING 51 3.4.1 QUANTIFICATION 51 3.4.2
DEPTH PROFILING 53 3.5 APPLICATIONS 54 3.5.1 GRAIN BOUNDARY SEGREGATION
54 3.5.2 SEMICONDUCTOR TECHNOLOGY 56 3.5.3 THIN FILMS AND INTERFACES 58
3.5.4 SURFACE SEGREGATION 58 3.6 SCANNING AUGER MICROSCOPY (SAM) 61
REFERENCES 64
4 ELECTRON ENERGY-LOSS SPECTROSCOPY (EELS) AND ENERGY-FILTERING
TRANSMISSION ELECTRON MICROSCOPY (EFTEM) 67 REINHARD SCHNEIDER 4.1
PRINCIPLES 68
4.2 INSTRUMENTATION 70 4.3 QUALITATIVE SPECTRAL INFORMATION 72 4.3.1
LOW-LOSS EXCITATIONS 74 4.3.2 IONIZATION LOSSES 77 4.3.3 FINE STRUCTURES
79 4.4 QUANTIFICATION 83 4.5 IMAGING OF ELEMENT DISTRIBUTION 85 4.6
SUMMARY 88
REFERENCES 89
5 LOW-ENERGY ELECTRON DIFFRACTION (LEED) 93 GEORG HELD 5.1 PRINCIPLES
AND HISTORY 93 5.2 INSTRUMENTATION 94 5.3 QUALITATIVE INFORMATION 96
5.3.1 LEED PATTERN 96 5.3.2 SPOT PROFILE ANALYSIS 100 5.3.3 APPLICATIONS
AND RESTRICTIONS 100 5.4 QUANTITATIVE STRUCTURAL INFORMATION 101
IMAGE 3
CONTENTS VII
5.4.1 PRINCIPLES 101
5.4.2 EXPERIMENTAL TECHNIQUES 102 5.4.3 COMPUTER PROGRAMS 104 5.4.4
APPLICATIONS AND RESTRICTIONS 105 5.5 LOW-ENERGY ELECTRON MICROSCOPY 306
5.5.1 PRINCIPLES OF OPERATION 106 5.5.2 APPLICATIONS AND RESTRICTIONS
108
REFERENCES 108
6 OTHER ELECTRON-DETECTING TECHNIQUES 111 JOHN C. RIVIERE 6.1 ION
(EXCITED) AUGER ELECTRON SPECTROSCOPY (IAES) 111 6.2 ION NEUTRALIZATION
SPECTROSCOPY (INS) 111 6.3 INELASTIC ELECTRON TUNNELING SPECTROSCOPY
(IETS) 112
REFERENCE 113
PART TWO ION DETECTION 215
7 STATIC SECONDARY ION MASS SPECTROMETRY (SSIMS) 117 HEINRICH F.
ARLINGHAUS 7.1 PRINCIPLES 117
7.2 INSTRUMENTATION 119
7.2.1 ION SOURCES 119
7.2.2 MASS ANALYZERS 120 7.2.2.1 QUADRUPOLE MASS SPECTROMETERS 120
7.2.2.2 TIME-OF-FLIGHT MASS SPECTROMETRY (TOF-MS) 121 7.3 QUANTIFICATION
123
7.4 SPECTRAL INFORMATION 125 7.5 APPLICATIONS 127
7.5.1 OXIDE FILMS 128 7.5.2 INTERFACES 128
7.5.3 POLYMERS 131
7.5.4 BIOSENSORS 133 7.5.5 SURFACE REACTIONS 134 7.5.6 IMAGING 135
7.5.7 ULTRA-SHALLOW DEPTH PROFILING 137 REFERENCES 138
8 DYNAMIC SECONDARY ION MASS SPECTROMETRY (SIMS) 141 HERBERT HUTTER 8.1
PRINCIPLES 141
8.1.1 COMPENSATION OF PREFERENTIAL SPUTTERING 141 8.1.2 ATOMIC MIXING
142 8.1.3 IMPLANTATION OF PRIMARY IONS 142
IMAGE 4
VIII I CONTENTS
8.1.4 CRATER BOTTOM ROUGHENING 142
8.1.5 SPUTTER-INDUCED ROUGHNESS 142 8.1.6 CHARGING EFFECTS 142 8.2
INSTRUMENTATION 143 8.2.1 ION SOURCES 143
8.2.1.1 DUOPLASMATRON 144 8.2.2 MASS ANALYZER 144 8.2.2.1 MAGNETIC
SECTOR FIELD 144 8.2.2.2 DETECTOR 145 8.3 SPECTRAL INFORMATION 146 8.4
QUANTIFICATION 147
8.4.1 RELATIVE SENSITIVITY FACTORS 147 8.4.2 IMPLANTATION STANDARDS 147
8.4.3 METAL CESIDE (MCS + ) IONS 148 8.4.4 THEORETICAL MODELS 148
8.4.4.1 ELECTRON TUNNELING MODEL 148 8.4.4.2 BROKEN BOND MODEL 148
8.4.4.3 LOCAL THERMODYNAMIC EQUILIBRIUM LTE 148
8.5 MASS SPECTRA 149 8.6 DEPTH PROFILES 149 8.6.1 DUAL-BEAM TECHNIQUE
FOR TOF-SIMS INSTRUMENTS 152 8.6.2 MOLECULAR DEPTH PROFILES 152
8.7 IMAGING 152
8.7.1 SCANNING SIMS 152 8.7.2 DIRECT IMAGING MODE 153 8.8
THREE-DIMENSIONAL (3-D)-SIMS 154 8.9 APPLICATIONS 156 8.9.1 IMPLANTATION
PROFILES 156 8.9.2 LAYER ANALYSIS 157 8.9.3 3-D TRACE ELEMENT
DISTRIBUTION 158
REFERENCES 159
9 ELECTRON-IMPACT (EL) SECONDARY NEUTRAL MASS SPECTROMETRY (SNMS) 161
MICHAEL KOPNARSKI AND HOLGERJENETT 9.1 INTRODUCTION 161 9.2 GENERAL
PRINCIPLES OF SNMS 362 9.2.1 POSTIONIZATION VIA ELECTRON IMPACT 163
9.2.2 SUPPRESSION OF RESIDUAL GAS AND SECONDARY IONS 164 9.3
INSTRUMENTATION AND METHODS 166 9.3.1 ELECTRON BEAM SNMS 166 9.3.2
PLASMA SNMS 367 9.4 SPECTRAL INFORMATION AND QUANTIFICATION 170 9.5
ELEMENT DEPTH PROFILING 172
IMAGE 5
CONTENTS IX
9.6 APPLICATIONS 174
REFERENCES 175
10 LASER SECONDARY NEUTRAL MASS SPECTROMETRY (LASER-SNMS) 179 HEINRICH
F. ARLINGHAUS 10.1 PRINCIPLES 179
10.1.1 NONRESONANT LASER-SNMS 379 10.1.2 RESONANT LASER-SNMS 179 10.1.3
EXPERIMENTAL SET-UP 180 10.1.4 IONIZATION SCHEMES 181 10.2
INSTRUMENTATION 182 10.3 SPECTRAL INFORMATION 183 10.4 QUANTIFICATION
183 10.5 APPLICATIONS 384 10.5.1 NONRESONANT LASER-SNMS 384 10.5.2
RESONANT LASER-SNMS 186
REFERENCES 189
11 RUTHERFORD BACKSCATTERING SPECTROSCOPY (RBS) 393 LEOPOLD PALMETSHOFER
11.1 INTRODUCTION 191
11.2 PRINCIPLES 393
11.3 INSTRUMENTATION 194 11.4 SPECTRAL INFORMATION 194 11.5
QUANTIFICATION 196 11.6 FIGURES OF MERIT 197
11.6.1 MASS RESOLUTION 197 11.6.2 SENSITIVITY 198 11.6.3 DEPTH
RESOLUTION 198 11.6.4 ACCURACY 298 11.7 APPLICATIONS 198 11.8 RELATED
TECHNIQUES 201
REFERENCES 201
12 LOW-ENERGY ION SCATTERING (LEIS) 203 PETER BAUER 12.1 PRINCIPLES 203
12.2 INSTRUMENTATION 206 12.3 LEIS INFORMATION 208 12.3.1 ENERGY
INFORMATION 208 12.3.2 YIELD INFORMATION 208 12 A QUANTIFICATION 211
12.5 APPLICATIONS OF LEIS 211
REFERENCES 214
IMAGE 6
X| CONTENTS
13 ELASTIC RECOIL DETECTION ANALYSIS (ERDA) 217
OSWALD BENKA
13.1 INTRODUCTION 217 13.2 FUNDAMENTALS 218 13.3 PARTICLE IDENTIFICATION
METHODS 220 13.4 EQUIPMENT 222 13.5 DATA ANALYSIS 223 13.6 SENSITIVITY
AND DEPTH RESOLUTION 223 13.7 APPLICATIONS 224
REFERENCES 226
14 NUCLEAR REACTION ANALYSIS (NRA) 229 OSWALD BENKA 14.1 INTRODUCTION
229 14.2 PRINCIPLES 231 14.3 EQUIPMENT AND DEPTH RESOLUTION 232 14.4
APPLICATIONS 234
REFERENCES 236
15 FIELD ION MICROSCOPY (FIM) AND ATOM PROBE (AP) 237 YURI SUCHORSKI AND
WOLFGANG DRACHSEL 15.1 INTRODUCTION 237 15.2 PRINCIPLES AND
INSTRUMENTATION 239
15.2.1 FIELD ION MICROSCOPY 239 15.2.2 TIME-OF-FLIGHT ATOM PROBE
TECHNIQUES 242 15.2.3 FIELD ION APPEARANCE ENERGY SPECTROSCOPY 246 15.3
APPLICATIONS 248 15.3.1 FIM APPLICATIONS 248 15.3.1.1 FIM IN CATALYSIS
248 15.3.1.2 FLUCTUATION-INDUCED EFFECTS 249 15.3.2 APPLICATIONS OF AP
TECHNIQUES 252 15.3.2.1 APPLICATIONS OF TOF-AP TECHNIQUES 252 15.3.2.2
PFDMS APPLICATIONS 254 15.3.2.3 FIAES APPLICATIONS 255
REFERENCES 257
16 OTHER ION-DETECTING TECHNIQUES 261 JOHN C. RIVIERE 16.1 DESORPTION
METHODS 261 16.1.1 ELECTRON-STIMULATED DESORPTION (ESD) AND ESD ION
ANGULAR
DISTRIBUTION (ESDIAD) 263 16.1.2 THERMAL DESORPTION SPECTROSCOPY (TDS)
262 16.2 GLOW-DISCHARGE MASS SPECTROSCOPY (GD-MS) 263 16.3 FAST-ATOM
BOMBARDMENT MASS SPECTROSCOPY (FABMS) 263
REFERENCES 264
IMAGE 7
CONTENTS XI
PART THREE PHOTON DETECTION 265
17 TOTAL-REFLECTION X-RAY FLUORESCENCE (TXRF) ANALYSIS 267 LASZLO FABRY,
SIEGFRIED PAHLKE, AND BURKHARD BECKHOFF 17.1 PRINCIPLES 267
17.2 INSTRUMENTATION 269 17.3 SPECTRAL INFORMATION 275 17.4
QUANTIFICATION 276 17.5 APPLICATIONS 277 17.5.1 PARTICULATE AND
FILM-TYPE SURFACE CONTAMINATION 277 17.5.2 SEMICONDUCTORS 278 17.5.2.1
SYNCHROTRON RADIATION-BASED TECHNIQUES 280 17.5.2.2 DEPTH PROFILING BY
TXRF AND BY GRAZING INCIDENCE XRF (GIXRF)
FOR THE CHARACTERIZATION OF NANOLAYERS AND ULTRA-SHALLOW JUNCTIONS 283
17.5.2.3 VAPOR-PHASE DECOMPOSITION (VPD) AND DROPLET COLLECTION 285
17.5.2.4 VAPOR-PHASE TREATMENT (VPT) AND TOTAL REFLECTION X-RAY
FLUORESCENCE ANALYSIS 287 REFERENCES 288
18 ENERGY-DISPERSIVE X-RAY SPECTROSCOPY (EDXS) 293 REINHARD SCHNEIDER
18.1 PRINCIPLES 293
18.2 PRACTICAL ASPECTS OF X-RAY MICROANALYSIS AND INSTRUMENTATION 295
18.3 QUALITATIVE SPECTRAL INFORMATION 303 18.4 QUANTIFICATION 304 18.5
IMAGING OF ELEMENT DISTRIBUTION 306 18.6 SUMMARY 308
REFERENCES 309
19 CRAZING INCIDENCE X-RAY METHODS FOR NEAR-SURFACE STRUCTURAL STUDIES
333 P. NEIL GIBSON
19.1 PRINCIPLES 333
19.1.1 THE GRAZING INCIDENCE X-RAY GEOMETRY 312 19.1.2 GRAZING INCIDENCE
X-RAY REFLECTIVITY (GXRR) 314 19.1.3 GLANCING ANGLE X-RAY DIFFRACTION
314 19.1.4 REFLEXAFS 336 19.2 EXPERIMENTAL TECHNIQUES AND DATA ANALYSIS
317 19.2.1 GRAZING INCIDENCE X-RAY REFLECTIVITY (GXRR) 318 19.2.2
GRAZING INCIDENCE ASYMMETRIC BRAGG (GIAB) DIFFRACTION 329 19.3
APPLICATIONS 321 19.3.1 GRAZING INCIDENCE X-RAY REFLECTIVITY (GXRR) 321
19.3.2 GRAZING INCIDENCE ASYMMETRIC BRAGG (GIAB) DIFFRACTION 323
19.3.3 GRAZING INCIDENCE X-RAY SCATTERING (GIXS) 324
IMAGE 8
XII CONTENTS
19.3.4 REFLEXAFS 325
REFERENCES 326
20 CLOW DISCHARGE OPTICAL EMISSION SPECTROSCOPY (CD-OES) 329 VOLKER
HOFFMANN AND ALFRED QUENTMEIER 20.1 PRINCIPLES 329 20.2 INSTRUMENTATION
330 20.2.1 GLOW DISCHARGE SOURCES 330 20.2.2 SPECTROMETER 334 20.2.3
SIGNAL ACQUISITION 334 20.3 SPECTRAL INFORMATION 335 20.4 QUANTIFICATION
336 20.5 DEPTH PROFILING 337 20.6 APPLICATIONS 339 20.6.1 DE GD SOURCES
340 20.6.2 RFGD SOURCES 340
REFERENCES 342
21 SURFACE ANALYSIS BY LASER ABLATION 345 ROLAND HERGENROEDER AND MICHAIL
BOKHOV 21.1 INTRODUCTION 345 21.2 INSTRUMENTATION 346 21.2.1 TYPES OF
LASER 346 21.2.2 DIFFERENT SCHEMES OF LASER ABLATION 347 21.3 DEPTH
PROFILING 348 21.4 NEAR-FIELD ABLATION 354 21.5 CONCLUSION 354
REFERENCES 355
22 ION BEAM SPECTROCHEMICAL ANALYSIS (IBSCA) 357 VOLKER RUPERTUS 22.1
PRINCIPLES 357 22.2 INSTRUMENTATION 358
22.3 SPECTRAL AND ANALYTICAL INFORMATION 360 22.4 QUANTITATIVE ANALYSIS
BY IBSCA 361 22.5 APPLICATIONS 363 REFERENCES 366
23 REFLECTION ABSORPTION IR SPECTROSCOPY (RAIRS) 367 KARSTEN HINRICHS
23.1 INSTRUMENTATION 367 23.2 PRINCIPLES 368 23.3 APPLICATIONS 369
23.3.1 RAIRS 369 23.3.2 ATR AND SEIRA 372
IMAGE 9
CONTENTS XIII
23.4 RELATED TECHNIQUES 374
REFERENCES 374
24 SURFACE RAMAN SPECTROSCOPY 377 WIELAND HILL AND BERNHARD LENDL 24.1
PRINCIPLES 377
24.2 SURFACE-ENHANCED RAMAN SCATTERING (SERS) 378 24.3 INSTRUMENTATION
380 24.4 SPECTRAL INFORMATION 382 24.5 QUANTIFICATION 383 24.6
APPLICATIONS 383 24.6.1 UNENHANCED RAMAN SPECTROSCOPY AT SMOOTH SURFACES
383 24.6.2 POROUS MATERIALS 385
24.6.3 SURFACE-ENHANCED RAMAN SPECTROSCOPY (SERS) 386 24.6.4 NEAR-FIELD
RAMAN SPECTROSCOPY 387 24.7 NONLINEAR OPTICAL SPECTROSCOPY 387 24.7.1
SUM FREQUENCY GENERATION (SFG) SPECTROSCOPY 387
24.7.2 COHERENT ANTI-STOKES RAMAN SCATTERING (CARS) 389 24.7.3
STIMULATED FEMTOSECOND RAMAN SCATTERING (SFRS) 389 24.7A SPATIALLY
OFFSET RAMAN SPECTROSCOPY (SORS) 390 REFERENCES 390
25 UV-VIS-IR ELLIPSOMETRY (ELL) 393 BERND GRUSKA AND KARSTEN HINRICHS
25.1 PRINCIPLES 393
25.2 INSTRUMENTATION 395 25.3 APPLICATIONS 398 25.3.1 UV-VIS-NIR
SPECTRAL REGION 398 25.3.2 INFRARED ELLIPSOMETRY 400
REFERENCES 405
26 SUM FREQUENCY GENERATION (SFC) SPECTROSCOPY 407 GUENTHER RUPPRECHTER
AND ATHULA BANDARA 26.1 INTRODUCTION TO SFG SPECTROSCOPY 407 26.2 SFG
THEORY 410
26.2.1 SFG SIGNAL INTENSITY AND LINESHAPE 412 26.2.2 DETERMINING THE
NUMBER DENSITY OF MOLECULES FROM SFG SIGNAL INTENSITY 413 26.3 SFG
INSTRUMENTATION AND OPERATION MODES 414 26 A APPLICATIONS OF SFG
SPECTROSCOPY AND SELECTED CASE STUDIES 417 26.4.1 SFG SPECTROSCOPY ON
SOLID SURFACES AND SOLID-GAS INTERFACES 417 26.4.1.1 SFG SPECTROSCOPY
UNDER UHV CONDITIONS 417 26.4.1.2 POLARIZATION-DEPENDENT SFG
SPECTROSCOPY 419
26.4.1.3 SFG SPECTROSCOPY UNDER NEAR-ATMOSPHERIC GAS PRESSURE 420
26.4.1.4 SFG SPECTROSCOPY ON SUPPORTED METAL NANOPARTIDES 421
IMAGE 10
XIV CONTENTS
26.4.1.5 TIME-RESOLVED (PUMP-PROBE) AND BROADBAND SFG SPECTROSCOPY 423
26.4.1.6 SFG SPECTROSCOPY ON COLLOIDAL NANOPARTICLES AND POWDER
MATERIALS 427 26.4.2 SFG SPECTROSCOPY ON SOLID-LIQUID INTERFACES 428
26.4.3 SFG SPECTROSCOPY ON POLYMER AND BIOMATERIAL INTERFACES 428 26.4.4
SFG SPECTROSCOPY AT LIQUID-GAS AND LIQUID-LIQUID INTERFACES 429 26.5
CONCLUSION 430
REFERENCES 430
27 OTHER PHOTON-DETECTING TECHNIQUES 437 JOHN C. RIVIERE 27.1 APPEARANCE
POTENTIAL METHODS 437 27A.I SOFT X-RAY APPEARANCE POTENTIAL SPECTROSCOPY
(SXAPS) 437 27.2 INVERSE PHOTOEMISSION SPECTROSCOPY (IPES) AND
BREMSSTRAHLUNG
ISOCHROMAT SPECTROSCOPY (BIS) 437
PART FOUR SCANNING PROBE MICROSCOPY 439
28 INTRODUCTION 441
GERNOT FRIEDBACHER REFERENCES 442
29 ATOMIC FORCE MICROSCOPY (AFM) 443 GERNOT FRIEDBACHER 29.1 PRINCIPLES
443 29.2 FURTHER MODES OF AFM OPERATION 446 29.2.1 FRICTION FORCE
MICROSCOPY (FFM) 446 29.2.2 YOUNG S MODULUS MICROSCOPY (YMM) OR FORCE
MODULATION MICROSCOPY
(FMM) 447
29.2.3 PHASE IMAGING 447 29.2.4 FORCE-DISTANCE CURVE MEASUREMENTS 447
29.2.5 PULSED FORCE MODE AFM 448 29.2.6 HARMONIC IMAGING AND TORSIONAL
RESONANCE MODE 449
29.3 INSTRUMENTATION 452 29.4 APPLICATIONS 455 REFERENCES 462
30 SCANNING TUNNELING MICROSCOPY (STM) 465 GERNOT FRIEDBACHER 30.1
PRINCIPLES 465 30.2 INSTRUMENTATION 467 30.3 LATERAL AND SPECTROSCOPIC
INFORMATION 468 30.4 APPLICATIONS 470
REFERENCES 479
IMAGE 11
CONTENTS XV
31 SCANNING NEAR-FIELD OPTICAL MICROSCOPY (SNOM) 481
MARC RICHTER AND VOLKER DECKEN 31.1 INTRODUCTION 481
31.2 INSTRUMENTATION AND OPERATION 482 31.2.1 BASIC SET-UP 482 31.2.2
VARIATIONS OF SNOM 483 31.2.3 SCANNING AND FEEDBACK TECHNIQUES 484
31.2.4 TIP FABRICATION 485 31.2.4.1 TAPER FORMATION 486 31.2.4.2 COATING
DEPOSITION AND APERTURE FORMATION 486 31.2.4.3 ADVANCED TIP FABRICATION
487 31.3 SNOM APPLICATIONS 488 31.3.1 FLUORESCENCE 488 31.3.2 NEAR-FIELD
RAMAN SPECTROSCOPY 490 31.3.3 SNOM-IR-SPECTROSCOPY 492 31.4 OUTLOOK 493
REFERENCES 493
APPENDICES 499
APPENDIX A SUMMARY AND COMPARISON OF TECHNIQUES 501 APPENDIX B SURFACE
AND THIN-FILM ANALYTICAL EQUIPMENT SUPPLIERS 507
INDEX 519
|
| any_adam_object | 1 |
| author2 | Friedbacher, Gernot |
| author2_role | edt |
| author2_variant | g f gf |
| author_GND | (DE-588)135984866 |
| author_facet | Friedbacher, Gernot |
| building | Verbundindex |
| bvnumber | BV037403206 |
| classification_rvk | UP 7500 VE 7000 ZM 7600 ZM 7605 |
| ctrlnum | (OCoLC)724412100 (DE-599)BVBBV037403206 |
| dewey-full | 530.4275 |
| dewey-hundreds | 500 - Natural sciences and mathematics |
| dewey-ones | 530 - Physics |
| dewey-raw | 530.4275 |
| dewey-search | 530.4275 |
| dewey-sort | 3530.4275 |
| dewey-tens | 530 - Physics |
| discipline | Chemie / Pharmazie Physik Werkstoffwissenschaften / Fertigungstechnik |
| edition | 2., compl. rev. and enl. ed. |
| format | Book |
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| genre | (DE-588)4143413-4 Aufsatzsammlung gnd-content |
| genre_facet | Aufsatzsammlung |
| id | DE-604.BV037403206 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T23:23:34Z |
| institution | BVB |
| isbn | 9783527320479 3527320474 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-022555828 |
| oclc_num | 724412100 |
| open_access_boolean | |
| owner | DE-11 DE-703 DE-29T DE-634 DE-83 DE-20 DE-92 DE-19 DE-BY-UBM DE-1050 |
| owner_facet | DE-11 DE-703 DE-29T DE-634 DE-83 DE-20 DE-92 DE-19 DE-BY-UBM DE-1050 |
| physical | XXIV, 533 S. Ill., graph. Darst. |
| publishDate | 2011 |
| publishDateSearch | 2011 |
| publishDateSort | 2011 |
| publisher | Wiley-VCH |
| record_format | marc |
| spelling | Surface and thin film analysis a compendium of principles, instrumentation, and applications ed. by Gernot Friedbacher ... 2., compl. rev. and enl. ed. Weinheim Wiley-VCH 2011 XXIV, 533 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Hrsg. der 1. Aufl.: Henning Bubert Oberflächenanalyse (DE-588)4172243-7 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Dünne Schicht (DE-588)4136925-7 s Oberflächenanalyse (DE-588)4172243-7 s DE-604 Friedbacher, Gernot (DE-588)135984866 edt DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=022555828&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Surface and thin film analysis a compendium of principles, instrumentation, and applications Oberflächenanalyse (DE-588)4172243-7 gnd Dünne Schicht (DE-588)4136925-7 gnd |
| subject_GND | (DE-588)4172243-7 (DE-588)4136925-7 (DE-588)4143413-4 |
| title | Surface and thin film analysis a compendium of principles, instrumentation, and applications |
| title_auth | Surface and thin film analysis a compendium of principles, instrumentation, and applications |
| title_exact_search | Surface and thin film analysis a compendium of principles, instrumentation, and applications |
| title_full | Surface and thin film analysis a compendium of principles, instrumentation, and applications ed. by Gernot Friedbacher ... |
| title_fullStr | Surface and thin film analysis a compendium of principles, instrumentation, and applications ed. by Gernot Friedbacher ... |
| title_full_unstemmed | Surface and thin film analysis a compendium of principles, instrumentation, and applications ed. by Gernot Friedbacher ... |
| title_short | Surface and thin film analysis |
| title_sort | surface and thin film analysis a compendium of principles instrumentation and applications |
| title_sub | a compendium of principles, instrumentation, and applications |
| topic | Oberflächenanalyse (DE-588)4172243-7 gnd Dünne Schicht (DE-588)4136925-7 gnd |
| topic_facet | Oberflächenanalyse Dünne Schicht Aufsatzsammlung |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=022555828&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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