Electrostatically actuated all-polymer microbeam resonators: characterization and application
Gespeichert in:
| 1. Verfasser: | |
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| Format: | Abschlussarbeit Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Zürich
2009
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| Schlagworte: | |
| Online-Zugang: | Volltext Inhaltsverzeichnis |
| Beschreibung: | 1 Online-Ressource |
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Datensatz im Suchindex
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| adam_text | CONTENTS 1 INTRODUCTION 1 1.1 OBJECTIVE AND OUTLINE OF THIS WORK 3 2
DIELECTRIC FORCE ACTUATION SCHEME 5 2.1 ELECTROSTATIC FORCES ON
MACROSCOPIC MEDIA 5 2.2 THE KELVIN POLARIZATION FORCE DENSITY 6 2.3
ACTUATOR DESIGNS 8 2.3.1 KPF ACTING PARALLEL TO ELECTRODES (KPFP) 9
2.3.2 KPF ACTING NORMAL TO ELECTRODES (KPFN) 11 2.4 CONCLUSION 15 3
DEVICE FABRICATION 19 3.1 FABRICATION OF THIN MICROBEAMS 21 3.2
FABRICATION OF THICK MICROBEAMS 23 I CHARACTERIZATION 29 4 MECHANICAL
MODELS 31 4.1 DAMPED AND FORCED VIBRATION 31 4.1.1 RESONANT FREQUENCY 32
4.1.2 QUALITY FACTOR 33 4.2 EIGENFREQUENCY OF A BENDING BEAM 33 4.2.1
EFFECTIVE MASS AND SPRING CONSTANT 34 4.3 EIGENFREQUENCY OF A LATERAL
OSCILLATING STRING 35 4.4 LINEAR VISCOELASTICITY 36 5 EXPERIMENTAL 39
5.1 EVALUATION OF RESONANCE PARAMETERS 39 5.2 TEMPERATURE CONTROL 39 5.3
PACKAGING 42 5.4 RELATIVE HUMIDITY CONTROL 43 XV BIBLIOGRAFISCHE
INFORMATIONEN HTTP://D-NB.INFO/997031328 DIGITALISIERT DURCH CONTENTS 6
DAMPING 45 6.1 MEASURING THE INTRINSIC DAMPING 47 6.2 INTRINSIC DAMPING
MECHANISMS OF SINGLE-CLAMPED BEAMS 48 6.2.1 CLAMPING LOSS 48 6.2.2
THERMOELASTIC DAMPING 52 6.2.3 SURFACE LOSS 53 6.2.4 MATERIAL DAMPING 55
6.3 INTRINSIC DAMPING MECHANISMS OF DOUBLE-CLAMPED BEAMS 57 6.3.1 STRING
OR BEAM 58 6.3.2 INTERNAL DAMPING OF STRETCHED STRINGS 61 6.3.3 CLAMPING
LOSS 64 6.4 DAMPING AT ATMOSPHERIC PRESSURE 68 6.5 CONCLUSION 69 7
TENSILE STRESS AND YOUNG S MODULUS 73 7.1 YOUNG S MODULUS OF
SINGLE-CLAMPED MICROBEAMS 73 7.1.1 FREQUENCY DEPENDENCE OF THE YOUNG S
MODULUS 74 7.1.2 TEMPERATURE DEPENDENCE OF THE YOUNG S MODULUS 76 7.1.3
AGING OF THE YOUNG S MODULUS 79 7.2 TENSILE STRESS OF DOUBLE-CLAMPED
MICROBEAMS 79 7.2.1 TEMPERATURE DEPENDENCE OF TENSILE STRESS 81 7.2.2
RELAXATION OF TENSILE STRESS 84 7.3 CONCLUSION 87 8 INFLUENCE OF AIR
HUMIDITY 89 8.1 WATER VAPOR ABSORPTION IN POLYMERS 90 8.1.1 MASSLOAD 90
8.1.2 VOLUME EXPANSION 92 8.1.3 MODULUS CHANGE 92 8.2 RESPONSE TIME 93
8.3 EXTENDED MECHANICAL MODELS 95 8.3.1 EIGENFREQUENCY OF A BEAM AS A
FUNCTION OF RH 95 8.3.2 EIGENFREQUENCY OF A STRING AS A FUNCTION OF RH
95 8.4 RESULTS & DISCUSSION 95 8.4.1 BEAMLIKE S-C MICROBEAMS 96 8.4.2
STRINGLIKE D-C MICROBEAMS 98 8. CONTENTS II APPLICATION 103 9 POSITIVE
FEEDBACK 105 9.1 Q-ENHANCEMENT 106 9.1.1 EXPERIMENTS ILL 9.2
SELF-EXCITATION 112 9.2.1 EXPERIMENTS 114 9.3 COMPARISON 115 9.4
OPTIMIZED FEEDBACK CIRCUIT FOR SELF-EXCITATION 117 9.4.1 RESULTS AND
DISCUSSION 119 9.5 CONCLUSION 123 10 DETECTION OF BIOMOLECULES 125 10.1
MODELS 126 10.1.1 MASS LOADING NEAR CRITICAL DAMPING 126 10.1.2
EIGENFREQUENCY OF MULTILAYERED BEAMS 127 10.1.3 FREQUENCY RESPONSE OF
MICROBEAMS IMMERSED IN WATER NEAR A SOLID WALL 129 10.2 EXPERIMENTAL 130
10.2.1 SURF ACE FUNCTIONALIZATION 131 10.3 RESULTS 132 10.4 DISCUSSION
137 10.5 CONCLUSION 140 11 ELECTRONIC READOUT 143 11.1 ELECTROMECHANICAL
MODEL 144 11.2 EXPERIMENTAL 148 11.3 RESULTS 149 11.4 DISCUSSION 152
11.5 CONCLUSION 153 12 CONCLUSION AND OUTLOOK 157 12.1 OUTLOOK 160 III
APPENDIX 161 A VALIDATION OF ELECTROSTATIC ACTUATION 163 XVII XVLLL
CONTENTS B RUN SHEETS 165 C HIQLAB SOURCE CODE 169 D ITERATIVE FEM
ANALYSIS 173 E EIGENFREQUENCY OF BEAMS WITH SUSPENDED ANCHORS 179 E.I
INTRODUCTION 179 E.2 BERNOULLI-EULER BEAM: IDEALLY CLAMPED RESONATORS
179 E.3 EXTENDED RESONATOR MODEL 180 E.4 DETERMINATION OF THE ANCHOR
SPRING CONSTANTS 183 E.4.1 VERTICAL FORCE LOADING AT FREE EDGE 184 E.4.2
BOUNDARY CONDITIONS FOR MOMENT LOADING AT FREE EDGE . . . . 185 E.5
CALCULATION OF THE EIGENFREQUENCY 186 E.6 VALIDATION WITH FEM 186 F
HYDROPHILIC/HYDROPHOBIC: CONTACT ANGLE MEASUREMENTS ON SU-8 189 G CASE
STUDY: STRINGLIKE HUMIDITY SENSOR 191 H MATLAB/SIMULINK MODEL 193 I
ELECTRONIC FEEDBACK CIRCUIT 197 J ETHANOL DISSOLVED IN WATER 199
BIBLIOGRAPHY 203 ACKNOWLEDGEMENTS 221 PUBLICATIONS 223 CV 227
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| any_adam_object | 1 |
| author | Schmid, Silvan 1977- |
| author_GND | (DE-588)14059731X |
| author_facet | Schmid, Silvan 1977- |
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| dewey-full | 621.3815 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815 |
| dewey-search | 621.3815 |
| dewey-sort | 3621.3815 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Thesis Electronic eBook |
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| spelling | Schmid, Silvan 1977- Verfasser (DE-588)14059731X aut Electrostatically actuated all-polymer microbeam resonators characterization and application Silvan Schmid Zürich 2009 1 Online-Ressource txt rdacontent c rdamedia cr rdacarrier Zürich, Techn. Hochsch., Diss., 2009 MEMS (DE-588)4824724-8 gnd rswk-swf Kantilever (DE-588)4727755-5 gnd rswk-swf Resonator (DE-588)4131574-1 gnd rswk-swf Negativresist (DE-588)4784248-9 gnd rswk-swf Biosensor (DE-588)4193016-2 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content MEMS (DE-588)4824724-8 s Resonator (DE-588)4131574-1 s Kantilever (DE-588)4727755-5 s Negativresist (DE-588)4784248-9 s Biosensor (DE-588)4193016-2 s DE-604 http://e-collection.library.ethz.ch/eserv/eth:340/eth-340-02.pdf Volltext DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=022519249&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Schmid, Silvan 1977- Electrostatically actuated all-polymer microbeam resonators characterization and application MEMS (DE-588)4824724-8 gnd Kantilever (DE-588)4727755-5 gnd Resonator (DE-588)4131574-1 gnd Negativresist (DE-588)4784248-9 gnd Biosensor (DE-588)4193016-2 gnd |
| subject_GND | (DE-588)4824724-8 (DE-588)4727755-5 (DE-588)4131574-1 (DE-588)4784248-9 (DE-588)4193016-2 (DE-588)4113937-9 |
| title | Electrostatically actuated all-polymer microbeam resonators characterization and application |
| title_auth | Electrostatically actuated all-polymer microbeam resonators characterization and application |
| title_exact_search | Electrostatically actuated all-polymer microbeam resonators characterization and application |
| title_full | Electrostatically actuated all-polymer microbeam resonators characterization and application Silvan Schmid |
| title_fullStr | Electrostatically actuated all-polymer microbeam resonators characterization and application Silvan Schmid |
| title_full_unstemmed | Electrostatically actuated all-polymer microbeam resonators characterization and application Silvan Schmid |
| title_short | Electrostatically actuated all-polymer microbeam resonators |
| title_sort | electrostatically actuated all polymer microbeam resonators characterization and application |
| title_sub | characterization and application |
| topic | MEMS (DE-588)4824724-8 gnd Kantilever (DE-588)4727755-5 gnd Resonator (DE-588)4131574-1 gnd Negativresist (DE-588)4784248-9 gnd Biosensor (DE-588)4193016-2 gnd |
| topic_facet | MEMS Kantilever Resonator Negativresist Biosensor Hochschulschrift |
| url | http://e-collection.library.ethz.ch/eserv/eth:340/eth-340-02.pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=022519249&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT schmidsilvan electrostaticallyactuatedallpolymermicrobeamresonatorscharacterizationandapplication |