Papers from the 16th Workshop on Dielectrics in Microelectronics: [(WoDiM)] ; 28 - 30 June 2010, Bratislava, Slovakia
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
New York
American Inst. of Physics
2011
|
| Schriftenreihe: | Journal of vacuum science & technology : B, Microelectronics and nanometer structures, processing, measurement and phenomena
29,1 |
| Schlagworte: | |
| Beschreibung: | Einzelaufnahme eines Zeitschr.-Hefts |
| Beschreibung: | zahlr. Ill., graph. Darst. |
| ISBN: | 9780982301272 |
Internformat
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV037293821 | ||
| 003 | DE-604 | ||
| 005 | 20110328 | ||
| 007 | t | ||
| 008 | 110322s2011 ad|| |||| 10||| eng d | ||
| 020 | |a 9780982301272 |9 978-0-9823012-7-2 | ||
| 035 | |a (OCoLC)711871311 | ||
| 035 | |a (DE-599)BVBBV037293821 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-384 | ||
| 111 | 2 | |a Workshop on Dielectrics in Microelectronics |n 16 |d 2010 |c Bratislava |j Verfasser |0 (DE-588)16105250-2 |4 aut | |
| 245 | 1 | 0 | |a Papers from the 16th Workshop on Dielectrics in Microelectronics |b [(WoDiM)] ; 28 - 30 June 2010, Bratislava, Slovakia |c Conf. Chair: Karol Fröhlich |
| 264 | 1 | |a New York |b American Inst. of Physics |c 2011 | |
| 300 | |b zahlr. Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Journal of vacuum science & technology : B, Microelectronics and nanometer structures, processing, measurement and phenomena |v 29,1 | |
| 500 | |a Einzelaufnahme eines Zeitschr.-Hefts | ||
| 650 | 0 | 7 | |a Dielektrikum |0 (DE-588)4149716-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mikroelektronik |0 (DE-588)4039207-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Dünnschichttechnik |0 (DE-588)4136339-5 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 2010 |z Preßburg |2 gnd-content | |
| 689 | 0 | 0 | |a Dielektrikum |0 (DE-588)4149716-8 |D s |
| 689 | 0 | 1 | |a Dünnschichttechnik |0 (DE-588)4136339-5 |D s |
| 689 | 0 | 2 | |a Mikroelektronik |0 (DE-588)4039207-7 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Fröhlich, Karol |e Sonstige |4 oth | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-021206343 | ||
Datensatz im Suchindex
| _version_ | 1804143929054986240 |
|---|---|
| any_adam_object | |
| author_corporate | Workshop on Dielectrics in Microelectronics Bratislava |
| author_corporate_role | aut |
| author_facet | Workshop on Dielectrics in Microelectronics Bratislava |
| author_sort | Workshop on Dielectrics in Microelectronics Bratislava |
| building | Verbundindex |
| bvnumber | BV037293821 |
| ctrlnum | (OCoLC)711871311 (DE-599)BVBBV037293821 |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01607nam a2200385 cb4500</leader><controlfield tag="001">BV037293821</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20110328 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">110322s2011 ad|| |||| 10||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780982301272</subfield><subfield code="9">978-0-9823012-7-2</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)711871311</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV037293821</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-384</subfield></datafield><datafield tag="111" ind1="2" ind2=" "><subfield code="a">Workshop on Dielectrics in Microelectronics</subfield><subfield code="n">16</subfield><subfield code="d">2010</subfield><subfield code="c">Bratislava</subfield><subfield code="j">Verfasser</subfield><subfield code="0">(DE-588)16105250-2</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Papers from the 16th Workshop on Dielectrics in Microelectronics</subfield><subfield code="b">[(WoDiM)] ; 28 - 30 June 2010, Bratislava, Slovakia</subfield><subfield code="c">Conf. Chair: Karol Fröhlich</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">New York</subfield><subfield code="b">American Inst. of Physics</subfield><subfield code="c">2011</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="b">zahlr. Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Journal of vacuum science & technology : B, Microelectronics and nanometer structures, processing, measurement and phenomena</subfield><subfield code="v">29,1</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Einzelaufnahme eines Zeitschr.-Hefts</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Dielektrikum</subfield><subfield code="0">(DE-588)4149716-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikroelektronik</subfield><subfield code="0">(DE-588)4039207-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Dünnschichttechnik</subfield><subfield code="0">(DE-588)4136339-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">2010</subfield><subfield code="z">Preßburg</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Dielektrikum</subfield><subfield code="0">(DE-588)4149716-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Dünnschichttechnik</subfield><subfield code="0">(DE-588)4136339-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Mikroelektronik</subfield><subfield code="0">(DE-588)4039207-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Fröhlich, Karol</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-021206343</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift 2010 Preßburg gnd-content |
| genre_facet | Konferenzschrift 2010 Preßburg |
| id | DE-604.BV037293821 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T22:55:28Z |
| institution | BVB |
| institution_GND | (DE-588)16105250-2 |
| isbn | 9780982301272 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-021206343 |
| oclc_num | 711871311 |
| open_access_boolean | |
| owner | DE-384 |
| owner_facet | DE-384 |
| physical | zahlr. Ill., graph. Darst. |
| publishDate | 2011 |
| publishDateSearch | 2011 |
| publishDateSort | 2011 |
| publisher | American Inst. of Physics |
| record_format | marc |
| series2 | Journal of vacuum science & technology : B, Microelectronics and nanometer structures, processing, measurement and phenomena |
| spelling | Workshop on Dielectrics in Microelectronics 16 2010 Bratislava Verfasser (DE-588)16105250-2 aut Papers from the 16th Workshop on Dielectrics in Microelectronics [(WoDiM)] ; 28 - 30 June 2010, Bratislava, Slovakia Conf. Chair: Karol Fröhlich New York American Inst. of Physics 2011 zahlr. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science & technology : B, Microelectronics and nanometer structures, processing, measurement and phenomena 29,1 Einzelaufnahme eines Zeitschr.-Hefts Dielektrikum (DE-588)4149716-8 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Dünnschichttechnik (DE-588)4136339-5 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2010 Preßburg gnd-content Dielektrikum (DE-588)4149716-8 s Dünnschichttechnik (DE-588)4136339-5 s Mikroelektronik (DE-588)4039207-7 s DE-604 Fröhlich, Karol Sonstige oth |
| spellingShingle | Papers from the 16th Workshop on Dielectrics in Microelectronics [(WoDiM)] ; 28 - 30 June 2010, Bratislava, Slovakia Dielektrikum (DE-588)4149716-8 gnd Mikroelektronik (DE-588)4039207-7 gnd Dünnschichttechnik (DE-588)4136339-5 gnd |
| subject_GND | (DE-588)4149716-8 (DE-588)4039207-7 (DE-588)4136339-5 (DE-588)1071861417 |
| title | Papers from the 16th Workshop on Dielectrics in Microelectronics [(WoDiM)] ; 28 - 30 June 2010, Bratislava, Slovakia |
| title_auth | Papers from the 16th Workshop on Dielectrics in Microelectronics [(WoDiM)] ; 28 - 30 June 2010, Bratislava, Slovakia |
| title_exact_search | Papers from the 16th Workshop on Dielectrics in Microelectronics [(WoDiM)] ; 28 - 30 June 2010, Bratislava, Slovakia |
| title_full | Papers from the 16th Workshop on Dielectrics in Microelectronics [(WoDiM)] ; 28 - 30 June 2010, Bratislava, Slovakia Conf. Chair: Karol Fröhlich |
| title_fullStr | Papers from the 16th Workshop on Dielectrics in Microelectronics [(WoDiM)] ; 28 - 30 June 2010, Bratislava, Slovakia Conf. Chair: Karol Fröhlich |
| title_full_unstemmed | Papers from the 16th Workshop on Dielectrics in Microelectronics [(WoDiM)] ; 28 - 30 June 2010, Bratislava, Slovakia Conf. Chair: Karol Fröhlich |
| title_short | Papers from the 16th Workshop on Dielectrics in Microelectronics |
| title_sort | papers from the 16th workshop on dielectrics in microelectronics wodim 28 30 june 2010 bratislava slovakia |
| title_sub | [(WoDiM)] ; 28 - 30 June 2010, Bratislava, Slovakia |
| topic | Dielektrikum (DE-588)4149716-8 gnd Mikroelektronik (DE-588)4039207-7 gnd Dünnschichttechnik (DE-588)4136339-5 gnd |
| topic_facet | Dielektrikum Mikroelektronik Dünnschichttechnik Konferenzschrift 2010 Preßburg |
| work_keys_str_mv | AT workshopondielectricsinmicroelectronicsbratislava papersfromthe16thworkshopondielectricsinmicroelectronicswodim2830june2010bratislavaslovakia AT frohlichkarol papersfromthe16thworkshopondielectricsinmicroelectronicswodim2830june2010bratislavaslovakia |