Nanolithography: a borderland between STM, EB, IB, and x-ray lithographies ; [proceedings of the NATO Advanced Research Workshop on Nanolithography, Frascati, Roma, Italy, April 6-8, 1993]
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Dordrecht [u.a.]
Springer
2010
|
| Schriftenreihe: | Nato ASI series E
264 |
| Schlagworte: | |
| Beschreibung: | XII, 215 S. Ill., graph. Darst. |
| ISBN: | 9789048143887 |
Internformat
MARC
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| 041 | 0 | |a eng | |
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| 245 | 1 | 0 | |a Nanolithography |b a borderland between STM, EB, IB, and x-ray lithographies ; [proceedings of the NATO Advanced Research Workshop on Nanolithography, Frascati, Roma, Italy, April 6-8, 1993] |c ed. by M. Gentili ... |
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Datensatz im Suchindex
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| discipline | Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| genre | (DE-588)1071861417 Konferenzschrift 1993 Rom gnd-content |
| genre_facet | Konferenzschrift 1993 Rom |
| id | DE-604.BV037280936 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T22:55:10Z |
| institution | BVB |
| isbn | 9789048143887 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-021193741 |
| oclc_num | 917841307 |
| open_access_boolean | |
| owner | DE-11 |
| owner_facet | DE-11 |
| physical | XII, 215 S. Ill., graph. Darst. |
| publishDate | 2010 |
| publishDateSearch | 2010 |
| publishDateSort | 2010 |
| publisher | Springer |
| record_format | marc |
| series | Nato ASI series E |
| series2 | Nato ASI series : Series E, Applied sciences |
| spelling | Nanolithography a borderland between STM, EB, IB, and x-ray lithographies ; [proceedings of the NATO Advanced Research Workshop on Nanolithography, Frascati, Roma, Italy, April 6-8, 1993] ed. by M. Gentili ... Dordrecht [u.a.] Springer 2010 XII, 215 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Nato ASI series : Series E, Applied sciences 264 Nanotechnologie (DE-588)4327470-5 gnd rswk-swf Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1993 Rom gnd-content Lithografie Halbleitertechnologie (DE-588)4191584-7 s Nanotechnologie (DE-588)4327470-5 s DE-604 Gentili, Massimo Sonstige oth Nato ASI series E 264 (DE-604)BV000007015 264 |
| spellingShingle | Nanolithography a borderland between STM, EB, IB, and x-ray lithographies ; [proceedings of the NATO Advanced Research Workshop on Nanolithography, Frascati, Roma, Italy, April 6-8, 1993] Nato ASI series E Nanotechnologie (DE-588)4327470-5 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| subject_GND | (DE-588)4327470-5 (DE-588)4191584-7 (DE-588)1071861417 |
| title | Nanolithography a borderland between STM, EB, IB, and x-ray lithographies ; [proceedings of the NATO Advanced Research Workshop on Nanolithography, Frascati, Roma, Italy, April 6-8, 1993] |
| title_auth | Nanolithography a borderland between STM, EB, IB, and x-ray lithographies ; [proceedings of the NATO Advanced Research Workshop on Nanolithography, Frascati, Roma, Italy, April 6-8, 1993] |
| title_exact_search | Nanolithography a borderland between STM, EB, IB, and x-ray lithographies ; [proceedings of the NATO Advanced Research Workshop on Nanolithography, Frascati, Roma, Italy, April 6-8, 1993] |
| title_full | Nanolithography a borderland between STM, EB, IB, and x-ray lithographies ; [proceedings of the NATO Advanced Research Workshop on Nanolithography, Frascati, Roma, Italy, April 6-8, 1993] ed. by M. Gentili ... |
| title_fullStr | Nanolithography a borderland between STM, EB, IB, and x-ray lithographies ; [proceedings of the NATO Advanced Research Workshop on Nanolithography, Frascati, Roma, Italy, April 6-8, 1993] ed. by M. Gentili ... |
| title_full_unstemmed | Nanolithography a borderland between STM, EB, IB, and x-ray lithographies ; [proceedings of the NATO Advanced Research Workshop on Nanolithography, Frascati, Roma, Italy, April 6-8, 1993] ed. by M. Gentili ... |
| title_short | Nanolithography |
| title_sort | nanolithography a borderland between stm eb ib and x ray lithographies proceedings of the nato advanced research workshop on nanolithography frascati roma italy april 6 8 1993 |
| title_sub | a borderland between STM, EB, IB, and x-ray lithographies ; [proceedings of the NATO Advanced Research Workshop on Nanolithography, Frascati, Roma, Italy, April 6-8, 1993] |
| topic | Nanotechnologie (DE-588)4327470-5 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| topic_facet | Nanotechnologie Lithografie Halbleitertechnologie Konferenzschrift 1993 Rom |
| volume_link | (DE-604)BV000007015 |
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