Principles of microelectromechanical systems:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Hoboken, NJ
Wiley
2011
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| Schriftenreihe: | IEEE Press
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| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | XII, 667 S. Ill., graph. Darst. |
| ISBN: | 9780470466346 |
Internformat
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Datensatz im Suchindex
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| adam_text | Titel: Principles of microelectromechanical systems
Autor: Lee, Ki Bang
Jahr: 2011
CONTENTS
PREFACE xi
1 INTRODUCTION 1
1.1 Microelectromechanical Systems / 1
1.2 Coupled Systems I 2
1.3 Knowledge Required I 5
1.4 Dimensional Analysis / 7
Problems / 30
2 MICROFABRICATJON 32
2.1 Bulk and Surface Micromachining / 32
2.2 Lithography é 36
2.3 Layer Deposition / 41
2.4 Layer Etching 55
2.5 Fabrication Process Design 6O
Problems 63
3 STATICS 64
3.1 Static Equilibrium I 64
3.2 Stress-Strain Relationship / 70
3.3 Thermal Stress I 85
3.4 Beam Behavior Subjected to a Torsional Moment / 92
vii
viii CONTENTS
3.5 Moment-Curvature Relationship I 95
3.6 Beam Equation I 103
3.7 Galerkin s Method / 116
3.8 Energy Method I 111
3.9 Energy Method for Beam Problems / 139
Problems / 142
4 STATIC BEHAVIOR OF MICROSTRUCTURES 144
4.1 Elements of Microstructures I 144
4.2 Stiffness of Commonly Used Beams I 148
4.3 Trusses I 171
4.4 Stiffness Transformation I 177
4.5 Static Behavior of Planar Structures / 189
4.6 Residual Stress / 197
4.7 Cubic Force of Structures / 210
4.8 Potential Energy / 218
4.9 Analogy Between Potential Energies I 225
Problems I 232
5 DYNAMICS 235
5.1 Cubic Equation / 235
5.2 Description of Motion I 242
5.3 Governing Equations of Dynamics / 246
5.4 Energy Conversion Between Potential and
Kinetic Energy / 251
5.5 Free Vibration of Undamped Systems I 255
5.6 Vibration of Damped Systems / 259
5.7 Multidegree-of-freedom systems I 271
5.8 Continuous Systems I 279
5.9 Effective Mass, Damping, and Stiffness / 287
5.10 Systems with Repeated Structures I 302
5.11 Duffing s Equation I 310
Problems / 322
6 FLUID DYNAMICS 325
6.1 Viscous Flow / 325
6.2 Continuity Equation I 326
6.3 Navier-Stokes Equation / 328
CONTENTS
6.4 Reynolds Equation / 331
6.5 Couette Flow / 335
6.6 Oscillating Plate in a Fluid / 336
6.7 Creeping Flow / 345
6.8 Squeeze Film / 352
Problems / 361
7 ELECTROMAGNETICS 363
7.1 Basic Elements of Electric Circuits / 363
7.2 Kirchhoff s Circuit Laws / 368
7.3 Electrostatics I 376
7.4 Force and Moment Due to an Electric Field / 385
7.5 Electrostatic Forces and Moments Acting
on Various Objects I 395
7.6 Electromagnetic Force I 410
7.7 Force Acting on a Moving Charge in Electric and
Magnetic Fields I 418
7.8 Piezoresistance I 422
7.9 Piezoelectricity I 431
Problems / 433
8 PIEZOELECTRIC AND THERMAL ACTUATORS 436
8.1 Composite Beams / 436
8.2 Piezoelectric Actuators / 456
8.3 Thermal Actuators I 465
Problems I 498
9 ELECTROSTATIC AND ELECTROMAGNETIC
ACTUATORS 500
9.1 Electrostatic Actuators I 500
9.2 Comb Drive Actuator I 502
9.3 Parallel-Plate Actuator I 513
9.4 Torsional Actuator / 537
9.5 Fixed-Fixed Beam Actuator / 554
9.6 Cantilever Beam Actuator / 566
9.7 Dynamic Response of Gap-Closing Actuators / 575
9.8 Approximation of Gap-Closing Actuators I 582
9.9 Electromagnetic Actuators I 591
Problems / 598
X CONTENTS
10 SENSORS 600
10.1 Force and Pressure Sensors / 600
10.2 Accelerometers / 617
10.3 Electrostatic Accelerometers / 628
10.4 Vibratory Gyroscopes I 640
10.5 Other Issues I 649
Problems / 650
APPENDIX 652
REFERENCES 657
INDEX 661
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| id | DE-604.BV036965844 |
| illustrated | Illustrated |
| indexdate | 2024-08-01T11:17:08Z |
| institution | BVB |
| isbn | 9780470466346 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-020880649 |
| oclc_num | 839011866 |
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| physical | XII, 667 S. Ill., graph. Darst. |
| publishDate | 2011 |
| publishDateSearch | 2011 |
| publishDateSort | 2011 |
| publisher | Wiley |
| record_format | marc |
| series2 | IEEE Press |
| spellingShingle | Lee, Ki Bang Principles of microelectromechanical systems MEMS (DE-588)4824724-8 gnd |
| subject_GND | (DE-588)4824724-8 |
| title | Principles of microelectromechanical systems |
| title_auth | Principles of microelectromechanical systems |
| title_exact_search | Principles of microelectromechanical systems |
| title_full | Principles of microelectromechanical systems Ki Bang Lee |
| title_fullStr | Principles of microelectromechanical systems Ki Bang Lee |
| title_full_unstemmed | Principles of microelectromechanical systems Ki Bang Lee |
| title_short | Principles of microelectromechanical systems |
| title_sort | principles of microelectromechanical systems |
| topic | MEMS (DE-588)4824724-8 gnd |
| topic_facet | MEMS |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=020880649&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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Inhaltsverzeichnis
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