Precision nanometrology: sensors and measuring systems for nanomanufacturing
Saved in:
| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
London [u.a.]
Springer
2010
|
| Series: | Springer Series in Advanced Manufacturing
|
| Online Access: | BTU01 FHI01 FHN01 FHR01 Volltext |
| Physical Description: | 1 Online-Ressource (XIII, 354 S.) zahlr. Ill., graph. Darst. |
| ISBN: | 9781849962544 |
| DOI: | 10.1007/978-1-84996-254-4 |
Staff View
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Record in the Search Index
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| discipline | Maschinenbau / Maschinenwesen Elektrotechnik / Elektronik / Nachrichtentechnik |
| doi_str_mv | 10.1007/978-1-84996-254-4 |
| format | Electronic eBook |
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| id | DE-604.BV036862399 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T22:49:39Z |
| institution | BVB |
| isbn | 9781849962544 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-020778134 |
| oclc_num | 873714169 |
| open_access_boolean | |
| owner | DE-898 DE-BY-UBR DE-634 DE-573 DE-92 DE-83 |
| owner_facet | DE-898 DE-BY-UBR DE-634 DE-573 DE-92 DE-83 |
| physical | 1 Online-Ressource (XIII, 354 S.) zahlr. Ill., graph. Darst. |
| psigel | ZDB-2-ENG |
| publishDate | 2010 |
| publishDateSearch | 2010 |
| publishDateSort | 2010 |
| publisher | Springer |
| record_format | marc |
| series2 | Springer Series in Advanced Manufacturing |
| spelling | Gao, Wei 1973- Verfasser (DE-588)133785823 aut Precision nanometrology sensors and measuring systems for nanomanufacturing Wei Gao London [u.a.] Springer 2010 1 Online-Ressource (XIII, 354 S.) zahlr. Ill., graph. Darst. txt rdacontent c rdamedia cr rdacarrier Springer Series in Advanced Manufacturing Erscheint auch als Druck-Ausgabe, Hardcover 978-1-84996-253-7 https://doi.org/10.1007/978-1-84996-254-4 Verlag Volltext |
| spellingShingle | Gao, Wei 1973- Precision nanometrology sensors and measuring systems for nanomanufacturing |
| title | Precision nanometrology sensors and measuring systems for nanomanufacturing |
| title_auth | Precision nanometrology sensors and measuring systems for nanomanufacturing |
| title_exact_search | Precision nanometrology sensors and measuring systems for nanomanufacturing |
| title_full | Precision nanometrology sensors and measuring systems for nanomanufacturing Wei Gao |
| title_fullStr | Precision nanometrology sensors and measuring systems for nanomanufacturing Wei Gao |
| title_full_unstemmed | Precision nanometrology sensors and measuring systems for nanomanufacturing Wei Gao |
| title_short | Precision nanometrology |
| title_sort | precision nanometrology sensors and measuring systems for nanomanufacturing |
| title_sub | sensors and measuring systems for nanomanufacturing |
| url | https://doi.org/10.1007/978-1-84996-254-4 |
| work_keys_str_mv | AT gaowei precisionnanometrologysensorsandmeasuringsystemsfornanomanufacturing |