Laser precision microfabrication:
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Berlin [u.a.]
Springer
2010
|
| Schriftenreihe: | Springer series in materials science
135 |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | XVI, 344 S. Ill., graph. Darst. |
| ISBN: | 9783642105227 |
Internformat
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| 245 | 1 | 0 | |a Laser precision microfabrication |c Koji Sugioka ... (eds.) |
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| 300 | |a XVI, 344 S. |b Ill., graph. Darst. | ||
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Datensatz im Suchindex
| _version_ | 1804143377231380480 |
|---|---|
| adam_text | CONTENTS 1 PROCESS CONTROL IN LASER MATERIAL PROCESSING FOR THE MICRO
AND NANOMETER SCALE DOMAINS 1 HENRY HELVAJIAN 1.1 INTRODUCTION 1 1.2
LASER PROCESSING 5 1.2.1 LASER WAVELENGTH 7 1.2.2 LASERPOWER 11 1.2.3
LASER DOSE 13 1.2.4 LASER BEAM 16 1.2.5 LASER PULSE TEMPORAL PROFILE 19
1.2.6 PATTERN GENERATION 23 1.3 POSSIBLE STEPS FORWARD 26 1.4
CONCLUSIONS 29 REFERENCES 30 2 THEORY AND SIMULATION OF LASER ABLATION -
FROM BASIC MECHANISMS TO APPLICATIONS 35 LAURENT J. LEWIS AND DANNY
PEREZ 2.1 INTRODUCTION 35 2.2 BASIC PHYSICS 37 2.2.1 LIGHT-MATTER
INTERACTION 37 2.2.2 MATERIAL REMOVAL FROM THE TARGET: THE BASICS OF
ABLATION 37 2.3 ABLATION IN THE THERMAL REGIME 38 2.3.1 THERMODYNAMICS
38 2.3.2 CONVENTIONAL WISDOM: EARLY THEORIES 39 2.3.3 A NEW
UNDERSTANDING 41 2.3.4 COMPUTER MODELS 41 2.3.5 THE FEMTOSECOND REGIME
44 2.3.6 PICOSECOND PULSES AND BEYOND 49 2.3.7 MOLECULAR SOLIDS 50 2.4
MATERIALS PROCESSING 53 2.4.1 NANOPARTICLE PRODUCTION IN SOLVENTS 53
2.4.2 DAMAGES AND HEAT AFFECTED ZONES 55 BIBLIOGRAFISCHE INFORMATIONEN
HTTP://D-NB.INFO/1002586631 DIGITALISIERT DURCH VIII CONTENTS 2.5
CONCLUSIONS AND PERSPECTIVES 58 REFERENCES 59 3 LASER DEVICES AND
OPTICAL SYSTEMS FOR LASER PRECISION MICROFABRICATION 63 KUNIHIKO WASHIO
3.1 INTRODUCTION 63 3.2 LASER DEVICES 64 3.2.1 VARIOUS LASER DEVICES
FROM DEEP UV AND MID-IR SPECTRAL REGION 64 3.2.2 DIODE-PUMPED
HIGH-BRIGHTNESS CONTINUOUS WAVE SOLID-STATE LASERS 67 3.2.3 Q-SWITCHING
AND CAVITY DUMPING 70 3.2.4 PICOSECOND AND FEMTOSECOND, ULTRAFAST PULSED
LASER OSCILLATORS AND AMPLIFIERS 72 3.3 OPTICAL SYSTEMS 77 3.3.1 OPTICAL
COMPONENTS FOR MODIFICATION AND CONTROL OF LASER BEAMS 77 3.3.2 OPTICAL
SYSTEMS FOR BEAM SHAPE TRANSFORMATION 78 3.3.3 GALVANOMETER-BASED
OPTICAL SCANNERS 81 3.3.4 SPATIAL LIGHT MODULATORS 82 3.3.5
NONLINEAR-OPTICAL SYSTEMS FOR HARMONIC GENERATION 83 3.3.6 OPTICAL
SYSTEMS FOR BEAM CHARACTERIZATION AND PROCESS MONITORING 84 3.4 SUMMARY
86 REFERENCES 86 4 FUNDAMENTALS OF LASER-MATERIAL INTERACTION AND
APPLICATION TO MULTISCALE SURFACE MODIFICATION 91 MATTHEW S. BROWN AND
CRAIG B. ARNOLD 4.1 INTRODUCTION 91 4.2 FUNDAMENTALS OF LASER SURFACE
PROCESSING 92 4.2.1 LIGHT PROPAGATION IN MATERIALS 92 4.2.2 ENERGY
ABSORPTION MECHANISMS 94 4.2.3 THE HEAT EQUATION 96 4.2.4 MATERIAL
RESPONSE 98 4.3 LASER SURFACE PROCESSING APPLICATIONS 101 4. CONTENTS IX
5 TEMPORAL PULSE TAILORING IN ULTRAFAST LASER MANUFACTURING TECHNOLOGIES
121 RAZVAN STOIAN, MATTHIAS WOLLENHAUPT, THOMAS BAUMERT, ANDLNGOLF V.
HERTEL 5.1 INTRODUCTION 121 5.2 FUNDAMENTAL AND TECHNICAL ASPECTS OF
PULSE SHAPING 123 5.2.1 BASICS OF ULTRASHORT LASER PULSES 123 5.2.2
FREQUENCY DOMAIN MANIPULATION (MATHEMATICAL FORMALISM) 123 5.2.3
ANALYTICAL PHASE FUNCTIONS RELEVANT TO MATERIAL PROCESSING 127 5.2.4
PULSE SHAPING IN THE SPATIAL DOMAIN 130 5.2.5 EXPERIMENTAL
IMPLEMENTATIONS FOR TEMPORAL PULSE SHAPING 130 5.2.6 OPTIMIZATION
STRATEGIES 132 5.3 MATERIAL INTERACTION WITH TEMPORALLY SHAPED PULSES
133 5.3.1 CONTROL OF LASER-INDUCED PRIMARY EXCITATION EVENTS 133 5.3.2
ENGINEERED THERMODYNAMIC PHASE-SPACE TRAJECTORIES ... 135 5.3.3
REFRACTIVE INDEX ENGINEERING BY TEMPORALLY TAILORED PULSES 139 5.4
CONCLUSION AND PERSPECTIVES 141 REFERENCES 142 6 LASER NANOSURGERY,
MANIPULATION, AND TRANSPORTATION OF CELLS AND TISSUES 145 WATARU
WATANABE 6.1 INTRODUCTION 145 6.2 LASER DIRECT SURGERY 146 6.2.1
NANOSURGERY WITH A FOCUSED LASER BEAM IN THE ULTRAVIOLET AND VISIBLE
REGION 146 6.2.2 FEMTOSECOND LASER SURGERY 147 6.3 NANOPARTICLES AND
CHROMOPHORE-ASSISTED MANIPULATION AND PROCESSING 153 6.3.1
CHROMOPHORE-ASSISTED LASER INACTIVATION 153 6.3. CONTENTS 6.7
FABRICATION OF MICROFLUIDIC CHANNELS AND SCAFFOLDS 158 6.8 SUMMARY AND
CONCLUSIONS 159 REFERENCES 159 LASER SYNTHESIS OF NANOMATERIALS 163
SEBASTIEN BESNER AND MICHEL MEUNIER 7.1 INTRODUCTION 163 7.2 GENERAL
PRINCIPLES OF LASER BASED SYNTHESIS OF NANOMATERIALS.... 164 7.2.1
NANOSECOND PULSED LASER ABLATION 165 7.2.2 ULTRAFAST LASER ABLATION 166
7.3 SYNTHESIS OF NANOMATERIALS BASED ON LASER ABLATION OF A BULK TARGET
168 7.4 LASER ABLATION IN VACUUM/GAS ENVIRONMENT 171 7.5 LASER ABLATION
IN LIQUIDS: FORMATION OF COLLOIDAL NANOPARTICLES 173 7.5.1 ABLATION
MECHANISMS 173 7.5.2 EFFECT OF LASER PARAMETERS 176 7.5.3 EFFECT OF
STABILIZING AGENTS 177 7.5.4 PROCESS MODEL 179 7.6 SYNTHESIS OF
NANOMATERIALS BASED ON LASER INTERACTION WITH MICRO/NANOMATERIALS 180
7.7 CONCLUSIONS AND PERSPECTIVE 182 REFERENCES 183 ULTRAFAST LASER
MICRO- AND NANOSTRUCTURING 189 WOLFGANG KAUTEK AND MAGDALENA FORSTER 8.1
INTRODUCTION 190 8.2 THEORETICAL BACKGROUND 190 8.2.1 DIELECTRICS 191
8.2.2 METALS 194 8.2.3 THERMODYNAMIC APPROACH 195 8.3 RECENT RESULTS 198
8.3.1 TOP-DOWN APPROACHES TO NANOSTRUCTURES 198 8.3.2 THIN FILM ABLATION
199 8.3.3 INCUBATION PHENOMENA 201 8.3.4 BOTTOM-UP APPROACHES TO
NANOSTRUCTURES 203 8.3.5 BIOGENETIC MATERIALS 204 8. CONTENTS XI 9 3D
FABRICATION OF EMBEDDED MICROCOMPONENTS 215 KOJI SUGIOKA AND STEFAN
NOLTE 9.1 INTRODUCTION 215 9.2 PRINCIPLES OF INTERNAL PROCESSING 216 9.3
REFRACTIVE INDEX MODIFICATION 217 9.3.1 ADVANTAGES OF FEMTOSECOND LASER
IN PHOTONIC DEVICE FABRICATION 217 9.3.2 OPTICAL WAVEGUIDE WRITING 218
9.3.3 FABRICATION OF PHOTONIC DEVICES 220 9.3.4 FABRICATION OF FIBER
BRAGG GRATINGS (FBGS) 223 9.4 FORMATION OF 3D HOLLOW MICROSTRUCTURES 225
9.4.1 DIRECT ABLATION IN WATER 225 9.4.2 INTERNAL MODIFICATION FOLLOWED
BY WET ETCHING 226 9.5 3D INTEGRATION OF MICROCOMPONENTS 228 9.6 BEAM
SHAPING FOR FABRICATION OF 3D MICROCOMPONENTS 231 9.7 SUMMARY 233
REFERENCES 234 10 MICROMACHINING AND PATTERNING 239 JUERGEN IHLEMANN 10.1
INTRODUCTION 239 10.2 DIRECT WRITING 240 10.3 MICRO FLUIDICS 241 10.4
GRATINGS 243 10.5 DIFFRACTIVE OPTICAL ELEMENTS 245 10.6 MICRO
LENSES/LENS ARRAYS 246 10.7 PATTERNING OF LAYERS 249 10.8 DIELECTRIC
MASKS 252 10.9 TWO STEP PROCESSING OF LAYERS: ABLATION + OXIDATION 253
10.10 SUMMARY AND OUTLOOK 255 REFERENCES 256 11 LASER TRANSFER
TECHNIQUES FOR DIGITAL MICROFABRICATION 259 ALBERTO PIQUE 11.1
INTRODUCTION 259 11.2 LASERS IN DIGITAL MICROFABRICATION 261 11.3
ORIGINS OF LASER FORWARD TRANSFER 262 11.3. XII CONTENTS 11.4.3 LIFT
WITH ULTRA-SHORT LASER PULSES 269 11.4.4 LASER TRANSFER OF COMPOSITE OR
MATRIX-BASED MATERIALS 270 11.4.5 LASER TRANSFER OF RHEOLOGICAL SYSTEMS
271 11.4.6 JETTING EFFECTS 273 11.4.7 LASER TRANSFER OF ENTIRE DEVICES
274 11.4.8 RECENT VARIATIONS OF THE BASIC LIFT PROCESS 276 11.5
APPLICATIONS 277 11.5.1 MICROELECTRONICS 277 11.5.2 SENSOR AND
MICROPOWER GENERATION DEVICES 278 11.5.3 BIOMATERIALS 281 11.5.4
EMBEDDED ELECTRONIC CIRCUITS 283 11.6 THE FUTURE OF LASER-BASED DIGITAL
MICROFABRICATION 284 11.6.1 LASER FORWARD TRANSFER VS. OTHER DIGITAL
MICROFABRICATION PROCESSES 285 11.7 SUMMARY 286 REFERENCES 287 12 HYBRID
LASER PROCESSING OF TRANSPARENT MATERIALS 293 HIROYUKI NIINO 12.1
INTRODUCTION 293 12.2 MULTIWAVELENGTH EXCITATION PROCESS 294 12.2.1
PRINCIPLE OF MULTIWAVELENGTH EXCITATION PROCESS 294 12.2.2
MICROFABRICATION OF TRANSPARENT MATERIALS BY MULTIWAVELENGTH EXCITATION
PROCESS 295 12.3 MEDIA ASSISTED PROCESS 297 12.3.1 CLASSIFICATION OF
MEDIA ASSISTED PROCESSES 297 12.3.2 LIPAA PROCESS 299 12.3.3 LIBWE
PROCESS 302 12.4 CONCLUSIONS 306 REFERENCES 307 13 DRILLING, CUTTING,
WELDING, MARKING AND MICROFORMING 311 OLIVER SUTTMANN, ANAS MOALEM,
RAINER KLING, AND ANDREAS OSTENDORF 13.1 PARAMETER REGIMES 311 13.1.
CONTENTS XIII 13.2.3 TREPANNING HEAD 320 13.2.4 FURTHER TRENDS AND
OUTLOOK 320 13.3 CUTTING 321 13.3.1 MELT CUTTING 321 13.3.2 LASER
ABLATION CUTTING 323 13.3.3 LASER SCRIBING 326 13.3.4 LASER INDUCED
STRESS CUTTING 326 13.4 MICROJOINING 327 13.4.1 WELDING 327 13.4.2
SOLDERING 330 13.5 MARKING 331 13.5.1 LASER MARKING BY MATERIAL REMOVAL
OR ADDITION 331 13.5.2 LASER MARKING BY MATERIAL MODIFICATION 332 13.6
MICROFORMING 333 13.7 SUMMARY 333 REFERENCES 334 INDEX 337
|
| any_adam_object | 1 |
| author2 | Sugioka, Koji |
| author2_role | edt |
| author2_variant | k s ks |
| author_facet | Sugioka, Koji |
| building | Verbundindex |
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| dewey-search | 670.4 |
| dewey-sort | 3670.4 |
| dewey-tens | 670 - Manufacturing |
| discipline | Physik Werkstoffwissenschaften / Fertigungstechnik |
| format | Book |
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| id | DE-604.BV036726331 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T22:46:41Z |
| institution | BVB |
| isbn | 9783642105227 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-020644088 |
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| physical | XVI, 344 S. Ill., graph. Darst. |
| publishDate | 2010 |
| publishDateSearch | 2010 |
| publishDateSort | 2010 |
| publisher | Springer |
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| series | Springer series in materials science |
| series2 | Springer series in materials science |
| spelling | Laser precision microfabrication Koji Sugioka ... (eds.) Berlin [u.a.] Springer 2010 XVI, 344 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Springer series in materials science 135 Mikrofertigung (DE-588)7523640-0 gnd rswk-swf Laserbearbeitung (DE-588)4139080-5 gnd rswk-swf Mikrofertigung (DE-588)7523640-0 s Laserbearbeitung (DE-588)4139080-5 s DE-604 Sugioka, Koji edt Erscheint auch als Online-Ausgabe 978-3-642-10523-4 Springer series in materials science 135 (DE-604)BV000683335 135 DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=020644088&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Laser precision microfabrication Springer series in materials science Mikrofertigung (DE-588)7523640-0 gnd Laserbearbeitung (DE-588)4139080-5 gnd |
| subject_GND | (DE-588)7523640-0 (DE-588)4139080-5 |
| title | Laser precision microfabrication |
| title_auth | Laser precision microfabrication |
| title_exact_search | Laser precision microfabrication |
| title_full | Laser precision microfabrication Koji Sugioka ... (eds.) |
| title_fullStr | Laser precision microfabrication Koji Sugioka ... (eds.) |
| title_full_unstemmed | Laser precision microfabrication Koji Sugioka ... (eds.) |
| title_short | Laser precision microfabrication |
| title_sort | laser precision microfabrication |
| topic | Mikrofertigung (DE-588)7523640-0 gnd Laserbearbeitung (DE-588)4139080-5 gnd |
| topic_facet | Mikrofertigung Laserbearbeitung |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=020644088&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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