Micro, nanosystems, and systems on chips: modeling, control, and estimation
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
London, UK
ISTE
2010
Hoboken, NJ, USA Wiley |
| Schlagworte: | |
| Online-Zugang: | Publisher description Inhaltsverzeichnis |
| Beschreibung: | Literaturangaben Includes bibliographical references and index |
| Beschreibung: | 308 S. Ill., graph. Darst. |
| ISBN: | 9781848211902 |
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| 245 | 1 | 0 | |a Micro, nanosystems, and systems on chips |b modeling, control, and estimation |c ed. by Alina Voda |
| 264 | 1 | |a London, UK |b ISTE |c 2010 | |
| 264 | 1 | |a Hoboken, NJ, USA |b Wiley | |
| 300 | |a 308 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
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| 500 | |a Literaturangaben | ||
| 500 | |a Includes bibliographical references and index | ||
| 650 | 4 | |a Microelectromechanical systems | |
| 650 | 4 | |a Systems on a Chip | |
| 650 | 0 | 7 | |a Nanotechnologie |0 (DE-588)4327470-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a System-on-Chip |0 (DE-588)4740357-3 |2 gnd |9 rswk-swf |
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| 700 | 1 | |a Voda, Alina |e Sonstige |4 oth | |
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Datensatz im Suchindex
| _version_ | 1804143350877519872 |
|---|---|
| adam_text | Titel: Micro, nanosystems and systems on chips
Autor: Voda, Alina
Jahr: 2010
Contents
Introduction ..................................... xi
Part I. Mini and Microsystems....................... 1
Chapter 1. Modeling and Control of Stick-slip Micropositioning Devices . 3
Micky Rakotondrabe, Yassine Haddab, Philippe Lutz
1.1. Introduction.................................. 3
1.2. General description of stick-slip micropositioning devices........ 4
1.2.1. Principle................................. 4
1.2.2. Experimental device.......................... 5
1.3. Model of the sub-step mode......................... 6
1.3.1. Assumptions.............................. 6
1.3.2. Microactuator equation........................ 8
1.3.3. The elastoplastic friction model.................... 8
1.3.4. The state equation........................... 10
1.3.5. The output equation.......................... 11
1.3.6. Experimental and simulation curves................. 12
1.4. PI control of the sub-step mode....................... 13
1.5. Modeling the coarse mode.......................... 15
1.5.1. The model................................ 16
1.5.2. Experimental results.......................... 17
1.5.3. Remarks................................. 17
1.6. Voltage/frequency (U/f) proportional control of the coarse mode ... 18
1.6.1. Principle scheme of the proposed controller............. 20
1.6.2. Analysis................................. 20
1.6.3. Stability analysis............................ 24
1.6.4. Experiments............................... 25
1.7. Conclusion.................................. 26
1.8. Bibliography................................. 28
vi Micro and Nanosystems
Chapter 2. Microbeam Dynamic Shaping by Closed-loop Electrostatic
Actuation using Modal Control.......................... 31
Chady Kharrat, Eric Colinet, Alina Voda
2.1. Introduction.................................. 31
2.2. System description.............................. 34
2.3. Modal analysis................................ 36
2.4. Mode-based control ............................. 40
2.4.1. PID control............................... 42
2.4.2. FSF-LTR control............................ 43
2.5. Conclusion .................................. 50
2.6. Bibliography................................. 53
Part II. Nanosystems and Nanoworld ................. 57
Chapter 3. Observer-based Estimation of Weak Forces in a Nanosystem
Measurement Device ................................ 59
Gildas BESANQON, Alina Voda, Guillaume JOURDAN
3.1. Introduction.................................. 59
3.2. Observer approach in an AFM measurement set-up ........... 61
3.2.1. Considered AFM model and force measurement problem..... 61
3.2.2. Proposed observer approach...................... 63
3.2.3. Experimental application and validation............... 65
3.3. Extension to back action evasion...................... 71
3.3.1. Back action problem and illustration................. 71
3.3.2. Observer-based approach....................... 73
3.3.3. Simulation results and comments................... 76
3.4. Conclusion.................................. 79
3.5. Acknowledgements.............................. 81
3.6. Bibliography................................. 81
Chapter 4. Tunnel Current for a Robust, High-bandwidth and Ultra-
precise Nanopositioning .............................. 85
Sylvain BLANVILLAIN, Alina VODA, Gildas BESANgON
4.1. Introduction.................................. 85
4.2. System description.............................. 87
4.2.1. Forces between the tip and the beam................. 88
4.3. System modeling............................... 89
4.3.1. Cantilever model............................ 89
4.3.2. System actuators............................ 90
4.3.3. Tunnel current............................. 92
4.3.4. System model.............................. 93
4.3.5. System analysis............................. 94
Contents vii
4.4. Problem statement.............................. 97
4.4.1. Robustness and non-linearities.................... 97
4.4.2. Experimental noise........................... 98
4.5. Tools to deal with noise........................... 100
4.5.1. Kalman filter.............................. 100
4.5.2. Minimum variance controller..................... 100
4.6. Closed-loop requirements.......................... 102
4.6.1. Sensitivity functions.......................... 102
4.6.2. Robustness margins.......................... 102
4.6.3. Templates of the sensibility functions................ 103
4.7. Control strategy................................ 105
4.7.1. Actuator linearization......................... 106
4.7.2. Sensor approximation......................... 106
4.7.3. Kalman filtering............................ 108
4.7.4. RSTX synthesis............................. 108
4.7.5.2 reconstruction ............................ 110
4.7.6. RST2 synthesis............................. 110
4.8. Results..................................... Ill
4.8.1. Position control............................. Ill
4.8.2. Distance d control........................... 113
4.8.3. Robustness............................... 114
4.9. Conclusion .................................. 115
4.10. Bibliography................................. 116
Chapter 5. Controller Design and Analysis for High-performance STM . . 121
Man Ahmad, Alina Voda, Gildas Besanqon
5.1. Introduction.................................. 121
5.2. General description of STM......................... 123
5.2.1. STM operation modes......................... 123
5.2.2. Principle................................. 124
5.3. Control design model ............................ 127
5.3.1. Linear approximation approach.................... 127
5.3.2. Open-loop analysis........................... 129
5.3.3. Control problem formulation and desired performance for STM . 131
5.4. Hex controller design ............................ 131
5.4.1. General control problem formulation ................ 131
5.4.2. General Hx algorithm......................... 133
5.4.3. Mixed-sensitivity Hx control .................... 134
5.4.4. Controller synthesis for the scanning tunneling microscope .... 135
5.4.5. Control loop performance analysis.................. 137
5.5. Analysis with system parametric uncertainties .............. 139
5.5.1. Uncertainty modeling......................... 140
5.5.2. Robust stability and performance analysis.............. 141
viii Micro and Nanosystems
5.6. Simulation results .............................. 142
5.7. Conclusions.................................. 143
5.8. Bibliography................................. 146
Chapter 6. Modeling, Identification and Control of a Micro-cantilever
Array ......................................... 149
Scott COGAN, Hui HUI, Michel LENCZNER, Emmanuel PlLLET, Nicolas
Rattier, Youssef Yakoubi
6.1. Introduction.................................. 150
6.2. Modeling and identification of a cantilever array............. 151
6.2.1. Geometry of the problem....................... 151
6.2.2. Two-scale approximation....................... 151
6.2.3. Model description........................... 153
6.2.4. Structure of eigenmodes........................ 154
6.2.5. Model validation............................ 155
6.2.6. Model identification.......................... 159
6.3. Semi-decentralized approximation of optimal control applied to a
cantilever array................................ 164
6.3.1. General notation............................ 164
6.3.2. Reformulation of the two-scale model of cantilever arrays .... 164
6.3.3. Model reformulation.......................... 166
6.3.4. Classical formulation of the LQR problem............. 167
6.3.5. Semi-decentralized approximation.................. 168
6.3.6. Numerical validation.......................... 173
6.4. Simulation of large-scale periodic circuits by a homogenization method 175
6.4.1. Linear static periodic circuits..................... 176
6.4.2. Circuit equations............................ 178
6.4.3. Direct two-scale transform Te.................... 179
6.4.4. Inverse two-scale transform Tg1................... 180
6.4.5. Two-scale transform Tyv........................ 182
6.4.6. Behavior of spread analog circuits................. 182
6.4.7. Cell equations (micro problem).................... 184
6.4.8. Reformulation of the micro problem................. 187
6.4.9. Homogenized circuit equations (macro problem).......... 188
6.4.10. Computation of actual voltages and currents............ 189
6.5. Bibliography................................. 191
6.6. Appendix................................... 193
Chapter 7. Fractional Order Modeling and Identification for
Electrochemical Nano-biochip........................... 197
Abdelbaki Djouambi, Alina Voda, Pierre Grangeat, Pascal Mailley
7.1. Introduction.................................. 197
7.2. Mathematical background.......................... 199
Contents ix
7.2.1. Brief review of fractional differentiation............... 199
7.2.2. Fractional order systems........................ 201
7.3. Prediction error algorithm for fractional order system identification . . 202
7.4. Fractional order modeling of electrochemical processes......... 206
7.5. Identification of a real electrochemical biochip.............. 209
7.5.1. Experimental set-up.......................... 209
7.5.2. Fractional order model identification of the considered biochip . . 213
7.6. Conclusion .................................. 215
7.7. Bibliography ................................. 217
Part III. From Nanoworld to Macro and Human Interfaces . 221
Chapter 8. Human-in-the-loop Telemicromanipulation System Assisted by
Multisensory Feedback............................... 223
Mehdi Ammi, Antoine Ferreira
8.1. Introduction.................................. 224
8.2. Haptic-based multimodal telemicromanipulation system......... 225
8.2.1. Global approach............................ 225
8.2.2. Telemicromanipulation platform and manipulation protocol.... 226
8.3. 3D visual perception using virtual reality................. 228
8.3.1. Limitations of microscopy visual perception............ 228
8.3.2. Coarse localization of microspheres................. 229
8.3.3. Fine localization using image correlation techniques........ 229
8.3.4. Subpixel localization.......................... 230
8.3.5. Localization of dust and impurities.................. 233
8.3.6. Calibration of the microscope..................... 234
8.3.7. 3D reconstruction of the microworld................. 234
8.4. Haptic rendering for intuitive and efficient interaction with the micro-
environment .................................. 237
8.4.1. Haptic-based bilateral teleoperation control............. 237
8.4.2. Active operator guidance using potential fields........... 239
8.4.3. Model-based local motion planning................. 243
8.4.4. Force feedback stabilization by virtual coupling.......... 243
8.5. Evaluating manipulation tasks through multimodal feedback and
assistance metaphors............................. 246
8.5.1. Approach phase ............................ 246
8.6. Conclusion .................................. 253
8.7. Bibliography ................................. 254
Chapter 9. Six-dof Teleoperation Platform: Application to Flexible
Molecular Docking ................................. 257
Bruno Daunay, Stephane Regnier
9.1. Introduction.................................. 258
x Micro and Nanosystems
9.2. Proposed approach.............................. 261
9.2.1. Molecular modeling and simulation................. 261
9.2.2. Flexible ligand and flexible protein.................. 262
9.2.3. Force feedback............................. 263
9.2.4. Summary................................ 265
9.3. Force-position control scheme ....................... 266
9.3.1. Ideal control scheme without delays................. 266
9.3.2. Environment.............................. 268
9.3.3. Transparency.............................. 269
9.3.4. Description of a docking task..................... 270
9.3.5. Influence of the effort scaling factor................. 272
9.3.6. Influence of the displacement scaling ................ 274
9.3.7. Summary................................ 276
9.4. Control scheme for high dynamical and delayed systems ........ 277
9.4.1. Wave transformation.......................... 277
9.4.2. Virtual damper using wave variables................. 278
9.4.3. Wave variables without damping................... 282
9.4.4. Summary................................ 286
9.5. From energy description of a force field to force feeling......... 287
9.5.1. Introduction............................... 287
9.5.2. Energy modeling of the interaction.................. 287
9.5.3. The interaction wrench calculation.................. 291
9.5.4. Summary................................ 293
9.6. Conclusion.................................. 295
9.7. Bibliography................................. 297
List of Authors.................................... 301
Index.......................................... 305
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| indexdate | 2024-07-09T22:46:16Z |
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| language | English |
| lccn | 2009041386 |
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| spelling | Micro, nanosystems, and systems on chips modeling, control, and estimation ed. by Alina Voda London, UK ISTE 2010 Hoboken, NJ, USA Wiley 308 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben Includes bibliographical references and index Microelectromechanical systems Systems on a Chip Nanotechnologie (DE-588)4327470-5 gnd rswk-swf System-on-Chip (DE-588)4740357-3 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 s Nanotechnologie (DE-588)4327470-5 s System-on-Chip (DE-588)4740357-3 s DE-604 Voda, Alina Sonstige oth http://www.loc.gov/catdir/enhancements/fy1004/2009041386-d.html Publisher description HBZ Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=020626121&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Micro, nanosystems, and systems on chips modeling, control, and estimation Microelectromechanical systems Systems on a Chip Nanotechnologie (DE-588)4327470-5 gnd System-on-Chip (DE-588)4740357-3 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
| subject_GND | (DE-588)4327470-5 (DE-588)4740357-3 (DE-588)4221617-5 |
| title | Micro, nanosystems, and systems on chips modeling, control, and estimation |
| title_auth | Micro, nanosystems, and systems on chips modeling, control, and estimation |
| title_exact_search | Micro, nanosystems, and systems on chips modeling, control, and estimation |
| title_full | Micro, nanosystems, and systems on chips modeling, control, and estimation ed. by Alina Voda |
| title_fullStr | Micro, nanosystems, and systems on chips modeling, control, and estimation ed. by Alina Voda |
| title_full_unstemmed | Micro, nanosystems, and systems on chips modeling, control, and estimation ed. by Alina Voda |
| title_short | Micro, nanosystems, and systems on chips |
| title_sort | micro nanosystems and systems on chips modeling control and estimation |
| title_sub | modeling, control, and estimation |
| topic | Microelectromechanical systems Systems on a Chip Nanotechnologie (DE-588)4327470-5 gnd System-on-Chip (DE-588)4740357-3 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
| topic_facet | Microelectromechanical systems Systems on a Chip Nanotechnologie System-on-Chip Mikrosystemtechnik |
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