Verfügbarkeit: Gettering Defects in Semiconductors

Gettering Defects in Semiconductors:

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	Perevoščikov, Viktor A. (VerfasserIn), Skupov, Vladimir D. (VerfasserIn)
Format:	Elektronisch E-Book
Sprache:	English
Veröffentlicht:	Berlin [u.a.] Springer 2005
Schriftenreihe:	Springer Series in Advanced Microelectronics 19
Schlagworte:	Chemical engineering Optical materials Halbleiter Getterung Störstelle
Online-Zugang:	BFB01 BHS01 BSB01 BTU01 BTW01 DMM01 FAN01 FAW01 FAW02 FCO01 FFW01 FHA01 FHD01 FHI01 FHM01 FHN01 FHR01 FKE01 FLA01 FWS01 FWS02 HTW01 HWR01 LCO01 SAB01 SAM01 SBG01 SBR01 SND01 TUM01 UBA01 UBG01 UBM01 UBR01 UBT01 UBW01 UBY01 UER01 UPA01 Volltext
Beschreibung:	1 Online-Ressource
ISBN:	9783540294993
DOI:	10.1007/3-540-29499-6

Internformat

MARC


LEADER	00000nmm a2200000 cb4500
001	BV036650648
003	DE-604
005	20220317
007	cr\|uuu---uuuuu
008	100902s2005 \|\|\|\| o\|\|u\| \|\|\|\|\|\|eng d
020			\|a 9783540294993 \|c Online \|9 978-3-540-29499-3
024	7		\|a 10.1007/3-540-29499-6 \|2 doi
035			\|a (OCoLC)315812232
035			\|a (DE-599)GBV524966486
040			\|a DE-604 \|b ger \|e aacr
041	0		\|a eng
049			\|a DE-526 \|a DE-522 \|a DE-634 \|a DE-2070s \|a DE-210 \|a DE-155 \|a DE-150 \|a DE-70 \|a DE-22 \|a DE-54 \|a DE-128 \|a DE-863 \|a DE-862 \|a DE-898 \|a DE-92 \|a DE-M347 \|a DE-859 \|a DE-573 \|a DE-1028 \|a DE-1050 \|a DE-858 \|a DE-1102 \|a DE-1046 \|a DE-1047 \|a DE-Aug4 \|a DE-706 \|a DE-20 \|a DE-739 \|a DE-355 \|a DE-91 \|a DE-19 \|a DE-29 \|a DE-703 \|a DE-473 \|a DE-384 \|a DE-12 \|a DE-860 \|a DE-B768 \|a DE-523
082	0		\|a 621.3815/2
084			\|a UQ 2400 \|0 (DE-625)146493: \|2 rvk
084			\|a ZN 4800 \|0 (DE-625)157408: \|2 rvk
100	1		\|a Perevoščikov, Viktor A. \|e Verfasser \|4 aut
245	1	0	\|a Gettering Defects in Semiconductors \|c V. A. Perevostchikov ; V. D. Skoupov. [Transl.: Victor Gloumov]
264		1	\|a Berlin [u.a.] \|b Springer \|c 2005
300			\|a 1 Online-Ressource
336			\|b txt \|2 rdacontent
337			\|b c \|2 rdamedia
338			\|b cr \|2 rdacarrier
490	1		\|a Springer Series in Advanced Microelectronics \|v 19
533			\|a Online-Ausgabe \|f Springer ebook collection / Chemistry and Materials Science 2005-2008 \|n Sonstige Standardnummer des Gesamttitels: 041171-1
534			\|c 2005
650		4	\|a Chemical engineering
650		4	\|a Optical materials
650	0	7	\|a Halbleiter \|0 (DE-588)4022993-2 \|2 gnd \|9 rswk-swf
650	0	7	\|a Getterung \|0 (DE-588)4157223-3 \|2 gnd \|9 rswk-swf
650	0	7	\|a Störstelle \|0 (DE-588)4193400-3 \|2 gnd \|9 rswk-swf
689	0	0	\|a Halbleiter \|0 (DE-588)4022993-2 \|D s
689	0	1	\|a Störstelle \|0 (DE-588)4193400-3 \|D s
689	0	2	\|a Getterung \|0 (DE-588)4157223-3 \|D s
689	0		\|5 DE-604
700	1		\|a Skupov, Vladimir D. \|e Verfasser \|4 aut
776	0	8	\|i Reproduktion von \|a Perevoščikov, Viktor A. \|t Gettering Defects in Semiconductors \|d 2005
776	0	8	\|i Erscheint auch als \|n Druckausgabe \|z 978-3-540-26244-2
830		0	\|a Springer Series in Advanced Microelectronics \|v 19 \|w (DE-604)BV041461435 \|9 19
856	4	0	\|u https://doi.org/10.1007/3-540-29499-6 \|x Verlag \|3 Volltext
912			\|a ZDB-1-SCM
999			\|a oai:aleph.bib-bvb.de:BVB01-020570162
966	e		\|u https://doi.org/10.1007/3-540-29499-6 \|l BFB01 \|p ZDB-1-SCM \|x Verlag \|3 Volltext
966	e		\|u https://doi.org/10.1007/3-540-29499-6 \|l BHS01 \|p ZDB-1-SCM \|x Verlag \|3 Volltext
966	e		\|u https://doi.org/10.1007/3-540-29499-6 \|l BSB01 \|p ZDB-1-SCM \|x Verlag \|3 Volltext
966	e		\|u https://doi.org/10.1007/3-540-29499-6 \|l BTU01 \|p ZDB-1-SCM \|x Verlag \|3 Volltext
966	e		\|u https://doi.org/10.1007/3-540-29499-6 \|l BTW01 \|p ZDB-1-SCM \|x Verlag \|3 Volltext
966	e		\|u https://doi.org/10.1007/3-540-29499-6 \|l DMM01 \|p ZDB-1-SCM \|x Verlag \|3 Volltext
966	e		\|u https://doi.org/10.1007/3-540-29499-6 \|l FAN01 \|p ZDB-1-SCM \|x Verlag \|3 Volltext
966	e		\|u https://doi.org/10.1007/3-540-29499-6 \|l FAW01 \|p ZDB-1-SCM \|x Verlag \|3 Volltext
966	e		\|u https://doi.org/10.1007/3-540-29499-6 \|l FAW02 \|p ZDB-1-SCM \|x Verlag \|3 Volltext
966	e		\|u https://doi.org/10.1007/3-540-29499-6 \|l FCO01 \|p ZDB-1-SCM \|x Verlag \|3 Volltext
966	e		\|u https://doi.org/10.1007/3-540-29499-6 \|l FFW01 \|p ZDB-1-SCM \|x Verlag \|3 Volltext
966	e		\|u https://doi.org/10.1007/3-540-29499-6 \|l FHA01 \|p ZDB-1-SCM \|x Verlag \|3 Volltext
966	e		\|u https://doi.org/10.1007/3-540-29499-6 \|l FHD01 \|p ZDB-1-SCM \|x Verlag \|3 Volltext
966	e		\|u https://doi.org/10.1007/3-540-29499-6 \|l FHI01 \|p ZDB-1-SCM \|x Verlag \|3 Volltext
966	e		\|u https://doi.org/10.1007/3-540-29499-6 \|l FHM01 \|p ZDB-1-SCM \|x Verlag \|3 Volltext
966	e		\|u https://doi.org/10.1007/3-540-29499-6 \|l FHN01 \|p ZDB-1-SCM \|x Verlag \|3 Volltext
966	e		\|u https://doi.org/10.1007/3-540-29499-6 \|l FHR01 \|p ZDB-1-SCM \|x Verlag \|3 Volltext
966	e		\|u https://doi.org/10.1007/3-540-29499-6 \|l FKE01 \|p ZDB-1-SCM \|x Verlag \|3 Volltext
966	e		\|u https://doi.org/10.1007/3-540-29499-6 \|l FLA01 \|p ZDB-1-SCM \|x Verlag \|3 Volltext
966	e		\|u https://doi.org/10.1007/3-540-29499-6 \|l FWS01 \|p ZDB-1-SCM \|x Verlag \|3 Volltext
966	e		\|u https://doi.org/10.1007/3-540-29499-6 \|l FWS02 \|p ZDB-1-SCM \|x Verlag \|3 Volltext
966	e		\|u https://doi.org/10.1007/3-540-29499-6 \|l HTW01 \|p ZDB-1-SCM \|x Verlag \|3 Volltext
966	e		\|u https://doi.org/10.1007/3-540-29499-6 \|l HWR01 \|p ZDB-1-SCM \|x Verlag \|3 Volltext
966	e		\|u https://doi.org/10.1007/3-540-29499-6 \|l LCO01 \|p ZDB-1-SCM \|x Verlag \|3 Volltext
966	e		\|u https://doi.org/10.1007/3-540-29499-6 \|l SAB01 \|p ZDB-1-SCM \|x Verlag \|3 Volltext
966	e		\|u https://doi.org/10.1007/3-540-29499-6 \|l SAM01 \|p ZDB-1-SCM \|x Verlag \|3 Volltext
966	e		\|u https://doi.org/10.1007/3-540-29499-6 \|l SBG01 \|p ZDB-1-SCM \|x Verlag \|3 Volltext
966	e		\|u https://doi.org/10.1007/3-540-29499-6 \|l SBR01 \|p ZDB-1-SCM \|x Verlag \|3 Volltext
966	e		\|u https://doi.org/10.1007/3-540-29499-6 \|l SND01 \|p ZDB-1-SCM \|x Verlag \|3 Volltext
966	e		\|u https://doi.org/10.1007/3-540-29499-6 \|l TUM01 \|p ZDB-1-SCM \|x Verlag \|3 Volltext
966	e		\|u https://doi.org/10.1007/3-540-29499-6 \|l UBA01 \|p ZDB-1-SCM \|x Verlag \|3 Volltext
966	e		\|u https://doi.org/10.1007/3-540-29499-6 \|l UBG01 \|p ZDB-1-SCM \|x Verlag \|3 Volltext
966	e		\|u https://doi.org/10.1007/3-540-29499-6 \|l UBM01 \|p ZDB-1-SCM \|x Verlag \|3 Volltext
966	e		\|u https://doi.org/10.1007/3-540-29499-6 \|l UBR01 \|p ZDB-1-SCM \|x Verlag \|3 Volltext
966	e		\|u https://doi.org/10.1007/3-540-29499-6 \|l UBT01 \|p ZDB-1-SCM \|x Verlag \|3 Volltext
966	e		\|u https://doi.org/10.1007/3-540-29499-6 \|l UBW01 \|p ZDB-1-SCM \|x Verlag \|3 Volltext
966	e		\|u https://doi.org/10.1007/3-540-29499-6 \|l UBY01 \|p ZDB-1-SCM \|x Verlag \|3 Volltext
966	e		\|u https://doi.org/10.1007/3-540-29499-6 \|l UER01 \|p ZDB-1-SCM \|x Verlag \|3 Volltext
966	e		\|u https://doi.org/10.1007/3-540-29499-6 \|l UPA01 \|p ZDB-1-SCM \|x Verlag \|3 Volltext

Datensatz im Suchindex

DE-BY-FWS_katkey	379348
_version_	1806177753194561536
any_adam_object
author	Perevoščikov, Viktor A. Skupov, Vladimir D.
author_facet	Perevoščikov, Viktor A. Skupov, Vladimir D.
author_role	aut aut
author_sort	Perevoščikov, Viktor A.
author_variant	v a p va vap v d s vd vds
building	Verbundindex
bvnumber	BV036650648
classification_rvk	UQ 2400 ZN 4800
collection	ZDB-1-SCM
ctrlnum	(OCoLC)315812232 (DE-599)GBV524966486
dewey-full	621.3815/2
dewey-hundreds	600 - Technology (Applied sciences)
dewey-ones	621 - Applied physics
dewey-raw	621.3815/2
dewey-search	621.3815/2
dewey-sort	3621.3815 12
dewey-tens	620 - Engineering and allied operations
discipline	Physik Elektrotechnik / Elektronik / Nachrichtentechnik
doi_str_mv	10.1007/3-540-29499-6
format	Electronic eBook
fullrecord	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>05834nmm a2200985 cb4500</leader><controlfield tag="001">BV036650648</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20220317 </controlfield><controlfield tag="007">cr\|uuu---uuuuu</controlfield><controlfield tag="008">100902s2005 \|\|\|\| o\|\|u\| \|\|\|\|\|\|eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783540294993</subfield><subfield code="c">Online</subfield><subfield code="9">978-3-540-29499-3</subfield></datafield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1007/3-540-29499-6</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)315812232</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)GBV524966486</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-526</subfield><subfield code="a">DE-522</subfield><subfield code="a">DE-634</subfield><subfield code="a">DE-2070s</subfield><subfield code="a">DE-210</subfield><subfield code="a">DE-155</subfield><subfield code="a">DE-150</subfield><subfield code="a">DE-70</subfield><subfield code="a">DE-22</subfield><subfield code="a">DE-54</subfield><subfield code="a">DE-128</subfield><subfield code="a">DE-863</subfield><subfield code="a">DE-862</subfield><subfield code="a">DE-898</subfield><subfield code="a">DE-92</subfield><subfield code="a">DE-M347</subfield><subfield code="a">DE-859</subfield><subfield code="a">DE-573</subfield><subfield code="a">DE-1028</subfield><subfield code="a">DE-1050</subfield><subfield code="a">DE-858</subfield><subfield code="a">DE-1102</subfield><subfield code="a">DE-1046</subfield><subfield code="a">DE-1047</subfield><subfield code="a">DE-Aug4</subfield><subfield code="a">DE-706</subfield><subfield code="a">DE-20</subfield><subfield code="a">DE-739</subfield><subfield code="a">DE-355</subfield><subfield code="a">DE-91</subfield><subfield code="a">DE-19</subfield><subfield code="a">DE-29</subfield><subfield code="a">DE-703</subfield><subfield code="a">DE-473</subfield><subfield code="a">DE-384</subfield><subfield code="a">DE-12</subfield><subfield code="a">DE-860</subfield><subfield code="a">DE-B768</subfield><subfield code="a">DE-523</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.3815/2</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UQ 2400</subfield><subfield code="0">(DE-625)146493:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 4800</subfield><subfield code="0">(DE-625)157408:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Perevoščikov, Viktor A.</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Gettering Defects in Semiconductors</subfield><subfield code="c">V. A. Perevostchikov ; V. D. Skoupov. [Transl.: Victor Gloumov]</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Berlin [u.a.]</subfield><subfield code="b">Springer</subfield><subfield code="c">2005</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Springer Series in Advanced Microelectronics</subfield><subfield code="v">19</subfield></datafield><datafield tag="533" ind1=" " ind2=" "><subfield code="a">Online-Ausgabe</subfield><subfield code="f">Springer ebook collection / Chemistry and Materials Science 2005-2008</subfield><subfield code="n">Sonstige Standardnummer des Gesamttitels: 041171-1</subfield></datafield><datafield tag="534" ind1=" " ind2=" "><subfield code="c">2005</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Chemical engineering</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Optical materials</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Getterung</subfield><subfield code="0">(DE-588)4157223-3</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Störstelle</subfield><subfield code="0">(DE-588)4193400-3</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Störstelle</subfield><subfield code="0">(DE-588)4193400-3</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Getterung</subfield><subfield code="0">(DE-588)4157223-3</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Skupov, Vladimir D.</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Reproduktion von</subfield><subfield code="a">Perevoščikov, Viktor A.</subfield><subfield code="t">Gettering Defects in Semiconductors</subfield><subfield code="d">2005</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Druckausgabe</subfield><subfield code="z">978-3-540-26244-2</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Springer Series in Advanced Microelectronics</subfield><subfield code="v">19</subfield><subfield code="w">(DE-604)BV041461435</subfield><subfield code="9">19</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doi.org/10.1007/3-540-29499-6</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-1-SCM</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-020570162</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/3-540-29499-6</subfield><subfield code="l">BFB01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/3-540-29499-6</subfield><subfield code="l">BHS01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/3-540-29499-6</subfield><subfield code="l">BSB01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/3-540-29499-6</subfield><subfield code="l">BTU01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/3-540-29499-6</subfield><subfield code="l">BTW01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/3-540-29499-6</subfield><subfield code="l">DMM01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/3-540-29499-6</subfield><subfield code="l">FAN01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/3-540-29499-6</subfield><subfield code="l">FAW01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/3-540-29499-6</subfield><subfield code="l">FAW02</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/3-540-29499-6</subfield><subfield code="l">FCO01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/3-540-29499-6</subfield><subfield code="l">FFW01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/3-540-29499-6</subfield><subfield code="l">FHA01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/3-540-29499-6</subfield><subfield code="l">FHD01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/3-540-29499-6</subfield><subfield code="l">FHI01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/3-540-29499-6</subfield><subfield code="l">FHM01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/3-540-29499-6</subfield><subfield code="l">FHN01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/3-540-29499-6</subfield><subfield code="l">FHR01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/3-540-29499-6</subfield><subfield code="l">FKE01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/3-540-29499-6</subfield><subfield code="l">FLA01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/3-540-29499-6</subfield><subfield code="l">FWS01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/3-540-29499-6</subfield><subfield code="l">FWS02</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/3-540-29499-6</subfield><subfield code="l">HTW01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/3-540-29499-6</subfield><subfield code="l">HWR01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/3-540-29499-6</subfield><subfield code="l">LCO01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/3-540-29499-6</subfield><subfield code="l">SAB01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/3-540-29499-6</subfield><subfield code="l">SAM01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/3-540-29499-6</subfield><subfield code="l">SBG01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/3-540-29499-6</subfield><subfield code="l">SBR01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/3-540-29499-6</subfield><subfield code="l">SND01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/3-540-29499-6</subfield><subfield code="l">TUM01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/3-540-29499-6</subfield><subfield code="l">UBA01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/3-540-29499-6</subfield><subfield code="l">UBG01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/3-540-29499-6</subfield><subfield code="l">UBM01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/3-540-29499-6</subfield><subfield code="l">UBR01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/3-540-29499-6</subfield><subfield code="l">UBT01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/3-540-29499-6</subfield><subfield code="l">UBW01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/3-540-29499-6</subfield><subfield code="l">UBY01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/3-540-29499-6</subfield><subfield code="l">UER01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/3-540-29499-6</subfield><subfield code="l">UPA01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield></record></collection>
id	DE-604.BV036650648
illustrated	Not Illustrated
indexdate	2024-08-01T11:42:14Z
institution	BVB
isbn	9783540294993
language	English
oai_aleph_id	oai:aleph.bib-bvb.de:BVB01-020570162
oclc_num	315812232
open_access_boolean
owner	DE-526 DE-522 DE-634 DE-2070s DE-210 DE-155 DE-BY-UBR DE-150 DE-70 DE-22 DE-BY-UBG DE-54 DE-128 DE-863 DE-BY-FWS DE-862 DE-BY-FWS DE-898 DE-BY-UBR DE-92 DE-M347 DE-859 DE-573 DE-1028 DE-1050 DE-858 DE-1102 DE-1046 DE-1047 DE-Aug4 DE-706 DE-20 DE-739 DE-355 DE-BY-UBR DE-91 DE-BY-TUM DE-19 DE-BY-UBM DE-29 DE-703 DE-473 DE-BY-UBG DE-384 DE-12 DE-860 DE-B768 DE-523
owner_facet	DE-526 DE-522 DE-634 DE-2070s DE-210 DE-155 DE-BY-UBR DE-150 DE-70 DE-22 DE-BY-UBG DE-54 DE-128 DE-863 DE-BY-FWS DE-862 DE-BY-FWS DE-898 DE-BY-UBR DE-92 DE-M347 DE-859 DE-573 DE-1028 DE-1050 DE-858 DE-1102 DE-1046 DE-1047 DE-Aug4 DE-706 DE-20 DE-739 DE-355 DE-BY-UBR DE-91 DE-BY-TUM DE-19 DE-BY-UBM DE-29 DE-703 DE-473 DE-BY-UBG DE-384 DE-12 DE-860 DE-B768 DE-523
physical	1 Online-Ressource
psigel	ZDB-1-SCM
publishDate	2005
publishDateSearch	2005
publishDateSort	2005
publisher	Springer
record_format	marc
series	Springer Series in Advanced Microelectronics
series2	Springer Series in Advanced Microelectronics
spellingShingle	Perevoščikov, Viktor A. Skupov, Vladimir D. Gettering Defects in Semiconductors Springer Series in Advanced Microelectronics Chemical engineering Optical materials Halbleiter (DE-588)4022993-2 gnd Getterung (DE-588)4157223-3 gnd Störstelle (DE-588)4193400-3 gnd
subject_GND	(DE-588)4022993-2 (DE-588)4157223-3 (DE-588)4193400-3
title	Gettering Defects in Semiconductors
title_auth	Gettering Defects in Semiconductors
title_exact_search	Gettering Defects in Semiconductors
title_full	Gettering Defects in Semiconductors V. A. Perevostchikov ; V. D. Skoupov. [Transl.: Victor Gloumov]
title_fullStr	Gettering Defects in Semiconductors V. A. Perevostchikov ; V. D. Skoupov. [Transl.: Victor Gloumov]
title_full_unstemmed	Gettering Defects in Semiconductors V. A. Perevostchikov ; V. D. Skoupov. [Transl.: Victor Gloumov]
title_short	Gettering Defects in Semiconductors
title_sort	gettering defects in semiconductors
topic	Chemical engineering Optical materials Halbleiter (DE-588)4022993-2 gnd Getterung (DE-588)4157223-3 gnd Störstelle (DE-588)4193400-3 gnd
topic_facet	Chemical engineering Optical materials Halbleiter Getterung Störstelle
url	https://doi.org/10.1007/3-540-29499-6
volume_link	(DE-604)BV041461435
work_keys_str_mv	AT perevoscikovviktora getteringdefectsinsemiconductors AT skupovvladimird getteringdefectsinsemiconductors

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