Crystal growth processes based on capillarity: czochralski, floating zone, shaping and crucible techniques
Gespeichert in:
Format: | Buch |
---|---|
Sprache: | English |
Veröffentlicht: |
Hoboken, N.J.
Wiley
2010
|
Schlagworte: | |
Online-Zugang: | Inhaltsverzeichnis |
Beschreibung: | Includes bibliographical references and index |
Beschreibung: | XXII, 533 S. graph. Darst. |
ISBN: | 9780470712443 |
Internformat
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245 | 1 | 0 | |a Crystal growth processes based on capillarity |b czochralski, floating zone, shaping and crucible techniques |c edited by Thierry Duffar |
264 | 1 | |a Hoboken, N.J. |b Wiley |c 2010 | |
300 | |a XXII, 533 S. |b graph. Darst. | ||
336 | |b txt |2 rdacontent | ||
337 | |b n |2 rdamedia | ||
338 | |b nc |2 rdacarrier | ||
500 | |a Includes bibliographical references and index | ||
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Datensatz im Suchindex
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adam_text | Titel: Crystal growth processes based on capillarity
Autor: Duffar, Thierry
Jahr: 2010
Contents
Préface page xm
Introduction xv
Acknowledgements xxv
Nomenclature xxvii
Contributors xxxi
1. Basic Principles of Capillarity in Relation to Crystal Growth 1
Nicolas Eustathopoulos, Béatrice Drevet, Simon Brandon and
Alexander Virozuh
1.1
1.2
1.3
Définitions 1
1.1.1 Characteristic Energies of Surfaces and Interfaces 1
1.1.2 Capillary Pressure 3
1.1.3 Surface Energy versus Surface Tension 4
Contact Angles 4
1.2.1 Thermodynamics 5
1.2.2 Dynamics of Wetting 12
1.2.3 Measurements of Contact Angle and Surface Tension by
the Sessile Drop Technique 16
1.2.4 Selected Data for the Contact Angle for Systems of
Interest for Crystal Growth 17
Growth Angles 28
1.3.1 Theory 28
1.3.2 Measurements of Growth Angles: Methods and Values 35
1.3.3 Application of the Growth Angle Condition in
Simulations of Crystal Growth 38
1.3.4 Summary 45
Acknowledgements 45
Références 46
The Possibility of Shape Stability in Capillary Crystal Growth
and Practical Realization of Shaped Crystals 51
Vitali A. Tatartchenko
2.1 Crucible-Free Crystal Growth - Capillary Shaping Techniques 52
2.2 Dynamic Stability of Crystallization - the Basis of Shaped Crystal
Growth by CST 54
2.2.1 Lyapunov Equations 57
2.2.2 Capillary Problem - Common Approach 59
2.2.3 Equation of Crystal Dimension Change Rate 62
viii Crystal Growth Processes Based on Capillarity
2.2 A Equation of Crystallization Front Displacement Rate 63
2.2.5 Stability Analysis in a System with Two Degrees of Freedom 64
2.3 Stability Analysis and Growth of Shaped Crystals by
the Cz Technique 65
2.3.1 Capillary Problem 65
2.3.2 Température Distribution in the Crystal-Melt System 65
2.3.3 Stability Analysis and Shaped Crystal Growth 68
2.3.4 Dynamic Stability Problem for the Kyropoulos Technique 69
2.4 Stability Analysis and Growth of Shaped Crystals by the
Vemeuil Technique 70
2.4.1 Principal Schemes of Growth 70
2.4.2 Theoretical Investigation 71
2.4.3 Practical Results of the Theoretical Analysis 76
2.4.4 Stability Analysis-Based Automation 78
2.5 Stability Analysis and Growth of Shaped Crystals by the
FZ Technique 80
2.6 TPS Techniques: Capillary Shaping and Impurity Distribution 81
2.6.1 Capillary Boundary Problem for TPS 81
2.6.2 Stability Analysis 92
2.6.3 Expérimental Tests of the Capillary Shaping Theory
Statements 94
2.6.4 Impurity Distribution 100
2.6.5 Définition of TPS 104
2.6.6 BriefHistoryofTPS 104
2.7 Shaped Growth of Ge, Sapphire, Si, and Metals: a Brief Présentation 108
2.7.1 Ge 108
2.7.2 Sapphire 109
2.7.3 Si 109
2.7.4 Metals and Alloys 110
2.8 TPS Peculiarities 110
Références 111
Czochralski Process Dynamics and Control Design 115
Jan Winkler, Michael Neubert, Joachim Rudolph, Ning Duanmu and
Michael Gevelber
3.1 Introduction and Motivation 116
3.1.1 Overview of Cz Control Issues 116
3.1.2 Diameter Control 117
3.1.3 Growth Rate Control 117
3.1.4 Reconstruction of Quantities not Directly Measured 117
3.1.5 Spécifie Problems for Control in Cz Crystal Growth 118
3.1.6 PID Control vs. Model-Based Control 121
3.1.7 Components of a Control System 122
3.1.8 Modelling in Crystal Growth Analysis and Control 123
3.2 Cz Control Approaches 124
Contents ix
3.2.1 Proper Choice of Manipulated Variables 124
3.2.2 Feedforward Control 125
3.2.3 Model-Based Analysis of the Process 126
3.2.4 Stability 127
3.2.5 Model-Based Control 127
3.2.6 Identification 130
3.2.7 Measurement Issues and State Estimation 130
3.3 Mathematical Model 132
3.3.1 Hydromechanical-Geometrical Model 133
3.3.2 Model of Thermal Behaviour 142
3.3.3 Linear System Model Analysis 148
3.4 Process Dynamics Analysis for Control 150
3.4.1 Operating Régime and Batch Implications 152
3.4.2 Actuator Performance Analysis 154
3.4.3 Curved Interface 157
3.4.4 Nonlinear Dynamics 157
3.5 Conventional Control Design 161
3.5.1 Control Based on Optical Diameter Estimation 161
3.5.2 Weight-Based Control 164
3.6 Geometry-Based Nonlinear Control Design 170
3.6.1 Basic Idea 170
3.6.2 Parametrization of the Hydromechanical-Geometrical Model
in Crystal Length 171
3.6.3 Flatness and Model-Based Feedback Control of the
Length-Parametrized Model 172
3.6.4 Control of Radius and Growth Rate 176
3.7 Advanced Techniques 181
3.7.1 Linear Observer Design 182
3.7.2 Nonlinear Observer Design 183
3.7.3 Control Structure Design for Batch Disturbance Rejection 194
Références 199
4 Floating Zone Crystal Growth 203
Anke Liidge, Helge Riemann, Michael Wiinscher, Gunter Behr,
Wolfgang Loser, Andris Muiznieks and Arne Crôll
4.1 FZ Processes with RF Heating 207
4.1.1 FZ Method for Si by RF Heating 207
4.1.2 FZ Growth for Metallic Melts 220
4.2 FZ Growth with Optical Heating 230
4.2.1 Introduction 230
4.2.2 Image Furnaces 230
4.2.3 Laser Heating 240
4.2.4 FZ Growth for Oxide Melts 242
4.3 Numerical Analysis of the Needle-Eye FZ Process 247
4.3.1 Literature Overview 248
x Crystal Growth Processes Based on Capillarlty
4.3.2 Quasi-Stationary Axisymmetric Mathematical Model
of the Shape of the Molten Zone 249
4.3.3 Numerical Investigation of the Influence of Growth
Parameters on the Shape of the Molten Zone 256
4.3.4 Nonstationary Axisymmetric Mathematical Model for
Transient Crystal Growth Processes 258
Appendix: Code for Calculating the Free Surface During a FZ
Process in Python 267
Références 270
5 Shaped Crystal Growth 277
Vladimir N. Kurlov, Sergei N. Rossolenko, Nikolai V. Abrosimov
and Kheirreddine Lebbou
5.1 Introduction 277
5.2 Shaped Si 279
5.2.1 EFGMethod 281
5.2.2 Dendritic Web Growth 286
5.2.3 String Ribbon 288
5.2.4 Ribbon Growth on Substrate (RGS) 290
5.3 Sapphire Shaped Crystal Growth 292
5.3.1 EFG 293
5.3.2 Variable Shaping Technique (VST) 295
5.3.3 Noncapillary Shaping (NCS) 297
5.3.4 Growth from an Elément of Shape (GES) 307
5.3.5 Modulation-Doped Shaped Crystal Growth Techniques 312
5.3.6 Automated Control of Shaped Crystal Growth 319
5.4 Shaped Crystals Grown by the Micro-Pulling
Down Technique (u-PD) 333
5.4.1 Crucible-Melt Relation During Crystal Growth by the u-PD
Technique 339
5.4.2 Examples of Crystals Grown by the u-PD Technique 340
5.5 Conclusions 347
Références 347
6 Vertical Bridgman Technique and Dewetting 355
Thierry Dujfar and Lamine Sylla
6.1 Peculiarities and Drawbacks of the Bridgman Processes 356
6.1.1 Thermal Interface Curvature 356
6.1.2 Melt-Crystal-Crucible Contact Angle 358
6.1.3 Crystal-Crucible Adhésion and Thermomechanical Detachment 360
6.1.4 Spurious Nucleation on Crucible Walls 363
6.2 Full Encapsulation 366
6.2.1 Introduction 366
6.2.2 LiCl-KCl Encapsulant for Antimonides 368
6.2.3 B203 Encapsulant 371
6.2.4 Conclusion 372
6.3
Contents xi
The Dewetting Process: a Modified VB Technique 373
6.3.1 Introduction 373
6.3.2 Dewetting in Microgravity 374
6.3.3 Dewetting in Normal Gravity 378
6.3.4 Theoretical Models of Dewetting 394
6.3.5 Stability Analysis 404
Conclusion and Outlook 407
Références 408
6.4
7 Marangoni Convection in Crystal Growth 413
Ame Crôll, Taketoshi Hibiya, Suguru Shiratori, Koichi Kakimoto
and Lijun Liu
7.1 Thermocapillary Convection in Float Zones 417
7.1.1 Model Materials 417
7.1.2 Semiconductors and Metals 417
7.1.3 Effect of Oxygen Partial Pressure on Thermocapillary
Flow in Si 419
7.1.4 Fluid Dynamics of Thermocapillary Flow in Half-Zones 422
7.1.5 Full Float Zones 435
7.1.6 The Critical Marangoni Number Mac2 435
7.1.7 Controlling Thermocapillary Convection in Float Zones 443
7.2 Thermocapillary Convection in Cz Crystal Growth of Si 448
7.2.1 Introduction 448
7.2.2 Surface Tension-Driven Flow in Cz Growth 448
7.2.3 Numerical Model 449
7.2.4 Calculation Results 452
7.2.5 Summary of Cz Results 456
7.3 Thermocapillary Convection in EFG Set-Ups 456
7.4 Thermocapillary Convection in Bridgman and Related Set-Ups 457
7.5 Solutocapillary Convection 457
Références 460
8 Mathematical and Numerical Analysis of Capillarity Problems
and Processes 465
Liliana Braescu, Simona Epure and Thierry Dujfar
8.1 Mathematical Formulation of the Capillary Problem 468
8.1.1 Boundary Value Problems for the Young-Laplace Equation 468
8.1.2 Initial and Boundary Conditions of the Meniscus Problem 472
8.1.3 Approximate Solutions of the Axisymmetric Meniscus
Problem 473
8.2 Analytical and Numerical Solutions for the Meniscus Equation in
the Cz Method 476
8.3 Analytical and Numerical Solutions for the Meniscus Equation in
the EFG Method 486
8.3.1 Sheets 486
8.3.2 Cylindrical Crystals 493
xii Crystal Growth Processes Based on Capillarity
8.4 Analytical and Numerical Solutions for the Meniscus Equation in
the Dewetted Bridgman Method 500
8.4.1 Zéro Gravity 502
8.4.2 Normal Gravity 508
8.5 Conclusions 517
Appendix: Runge-Kutta Methods 518
A.l Fourth-Order Runge-Kutta Method (RK4) 518
A.2 Rkfixed and Rkadapt Routines for Solving IVP 520
Références 523
Index 525
|
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spelling | Crystal growth processes based on capillarity czochralski, floating zone, shaping and crucible techniques edited by Thierry Duffar Hoboken, N.J. Wiley 2010 XXII, 533 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Includes bibliographical references and index Crystal growth Kristallwachstum (DE-588)4123579-4 gnd rswk-swf Kapillarität (DE-588)4029556-4 gnd rswk-swf Kristallzüchtung (DE-588)4140616-3 gnd rswk-swf Kristallwachstum (DE-588)4123579-4 s Kapillarität (DE-588)4029556-4 s DE-604 Kristallzüchtung (DE-588)4140616-3 s Duffar, Thierry Sonstige oth HBZ Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=020429505&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
spellingShingle | Crystal growth processes based on capillarity czochralski, floating zone, shaping and crucible techniques Crystal growth Kristallwachstum (DE-588)4123579-4 gnd Kapillarität (DE-588)4029556-4 gnd Kristallzüchtung (DE-588)4140616-3 gnd |
subject_GND | (DE-588)4123579-4 (DE-588)4029556-4 (DE-588)4140616-3 |
title | Crystal growth processes based on capillarity czochralski, floating zone, shaping and crucible techniques |
title_auth | Crystal growth processes based on capillarity czochralski, floating zone, shaping and crucible techniques |
title_exact_search | Crystal growth processes based on capillarity czochralski, floating zone, shaping and crucible techniques |
title_full | Crystal growth processes based on capillarity czochralski, floating zone, shaping and crucible techniques edited by Thierry Duffar |
title_fullStr | Crystal growth processes based on capillarity czochralski, floating zone, shaping and crucible techniques edited by Thierry Duffar |
title_full_unstemmed | Crystal growth processes based on capillarity czochralski, floating zone, shaping and crucible techniques edited by Thierry Duffar |
title_short | Crystal growth processes based on capillarity |
title_sort | crystal growth processes based on capillarity czochralski floating zone shaping and crucible techniques |
title_sub | czochralski, floating zone, shaping and crucible techniques |
topic | Crystal growth Kristallwachstum (DE-588)4123579-4 gnd Kapillarität (DE-588)4029556-4 gnd Kristallzüchtung (DE-588)4140616-3 gnd |
topic_facet | Crystal growth Kristallwachstum Kapillarität Kristallzüchtung |
url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=020429505&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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