Handbook of silicon based MEMS materials and technologies:
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Amsterdam [u.a.]
William Andrew/Elsevier
2010
|
| Edition: | 1. ed |
| Series: | Micro & nano technologies series
|
| Subjects: | |
| Item Description: | Includes bibliographical references and index |
| Physical Description: | xxxii, 636 p. ill. 29 cm |
| ISBN: | 9780815515944 0815515944 |
Staff View
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| 245 | 1 | 0 | |a Handbook of silicon based MEMS materials and technologies |c Veikko Lindroos ... |
| 250 | |a 1. ed | ||
| 264 | 1 | |a Amsterdam [u.a.] |b William Andrew/Elsevier |c 2010 | |
| 300 | |a xxxii, 636 p. |b ill. |c 29 cm | ||
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| 490 | 0 | |a Micro & nano technologies series | |
| 500 | |a Includes bibliographical references and index | ||
| 650 | 4 | |a Microelectromechanical systems | |
| 650 | 4 | |a Microelectromechanical systems / Materials | |
| 650 | 4 | |a Silicon / Electric properties | |
| 650 | 4 | |a Microelectromechanical systems | |
| 650 | 4 | |a Microelectromechanical systems |x Materials | |
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| 700 | 1 | |a Lindroos, Veikko |e Sonstige |4 oth | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-018968104 | ||
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| id | DE-604.BV036076951 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T22:11:00Z |
| institution | BVB |
| isbn | 9780815515944 0815515944 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-018968104 |
| oclc_num | 428777214 |
| open_access_boolean | |
| owner | DE-858 DE-573 DE-859 DE-29T |
| owner_facet | DE-858 DE-573 DE-859 DE-29T |
| physical | xxxii, 636 p. ill. 29 cm |
| publishDate | 2010 |
| publishDateSearch | 2010 |
| publishDateSort | 2010 |
| publisher | William Andrew/Elsevier |
| record_format | marc |
| series2 | Micro & nano technologies series |
| spelling | Handbook of silicon based MEMS materials and technologies Veikko Lindroos ... 1. ed Amsterdam [u.a.] William Andrew/Elsevier 2010 xxxii, 636 p. ill. 29 cm txt rdacontent n rdamedia nc rdacarrier Micro & nano technologies series Includes bibliographical references and index Microelectromechanical systems Microelectromechanical systems / Materials Silicon / Electric properties Microelectromechanical systems Materials Silicon Electric properties MEMS (DE-588)4824724-8 gnd rswk-swf Silicium (DE-588)4077445-4 gnd rswk-swf MEMS (DE-588)4824724-8 s Silicium (DE-588)4077445-4 s DE-604 Lindroos, Veikko Sonstige oth |
| spellingShingle | Handbook of silicon based MEMS materials and technologies Microelectromechanical systems Microelectromechanical systems / Materials Silicon / Electric properties Microelectromechanical systems Materials Silicon Electric properties MEMS (DE-588)4824724-8 gnd Silicium (DE-588)4077445-4 gnd |
| subject_GND | (DE-588)4824724-8 (DE-588)4077445-4 |
| title | Handbook of silicon based MEMS materials and technologies |
| title_auth | Handbook of silicon based MEMS materials and technologies |
| title_exact_search | Handbook of silicon based MEMS materials and technologies |
| title_full | Handbook of silicon based MEMS materials and technologies Veikko Lindroos ... |
| title_fullStr | Handbook of silicon based MEMS materials and technologies Veikko Lindroos ... |
| title_full_unstemmed | Handbook of silicon based MEMS materials and technologies Veikko Lindroos ... |
| title_short | Handbook of silicon based MEMS materials and technologies |
| title_sort | handbook of silicon based mems materials and technologies |
| topic | Microelectromechanical systems Microelectromechanical systems / Materials Silicon / Electric properties Microelectromechanical systems Materials Silicon Electric properties MEMS (DE-588)4824724-8 gnd Silicium (DE-588)4077445-4 gnd |
| topic_facet | Microelectromechanical systems Microelectromechanical systems / Materials Silicon / Electric properties Microelectromechanical systems Materials Silicon Electric properties MEMS Silicium |
| work_keys_str_mv | AT lindroosveikko handbookofsiliconbasedmemsmaterialsandtechnologies |