Handbook of silicon based MEMS materials and technologies:
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Amsterdam [u.a.]
William Andrew/Elsevier
2010
|
| Ausgabe: | 1. ed |
| Schriftenreihe: | Micro & nano technologies series
|
| Schlagworte: | |
| Beschreibung: | Includes bibliographical references and index |
| Beschreibung: | xxxii, 636 p. ill. 29 cm |
| ISBN: | 9780815515944 0815515944 |
Internformat
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV036076951 | ||
| 003 | DE-604 | ||
| 005 | 20100707 | ||
| 007 | t | ||
| 008 | 100312s2010 a||| |||| 00||| eng d | ||
| 015 | |a GBA974559 |2 dnb | ||
| 020 | |a 9780815515944 |9 978-0-8155-1594-4 | ||
| 020 | |a 0815515944 |9 0-8155-1594-4 | ||
| 035 | |a (OCoLC)428777214 | ||
| 035 | |a (DE-599)BVBBV036076951 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-858 |a DE-573 |a DE-859 |a DE-29T | ||
| 050 | 0 | |a TK7875 | |
| 082 | 0 | |a 621.38152 |2 22 | |
| 084 | |a ZN 3750 |0 (DE-625)157334: |2 rvk | ||
| 245 | 1 | 0 | |a Handbook of silicon based MEMS materials and technologies |c Veikko Lindroos ... |
| 250 | |a 1. ed | ||
| 264 | 1 | |a Amsterdam [u.a.] |b William Andrew/Elsevier |c 2010 | |
| 300 | |a xxxii, 636 p. |b ill. |c 29 cm | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Micro & nano technologies series | |
| 500 | |a Includes bibliographical references and index | ||
| 650 | 4 | |a Microelectromechanical systems | |
| 650 | 4 | |a Microelectromechanical systems / Materials | |
| 650 | 4 | |a Silicon / Electric properties | |
| 650 | 4 | |a Microelectromechanical systems | |
| 650 | 4 | |a Microelectromechanical systems |x Materials | |
| 650 | 4 | |a Silicon |x Electric properties | |
| 650 | 0 | 7 | |a MEMS |0 (DE-588)4824724-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Silicium |0 (DE-588)4077445-4 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a MEMS |0 (DE-588)4824724-8 |D s |
| 689 | 0 | 1 | |a Silicium |0 (DE-588)4077445-4 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Lindroos, Veikko |e Sonstige |4 oth | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-018968104 | ||
Datensatz im Suchindex
| _version_ | 1804141131786616832 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV036076951 |
| callnumber-first | T - Technology |
| callnumber-label | TK7875 |
| callnumber-raw | TK7875 |
| callnumber-search | TK7875 |
| callnumber-sort | TK 47875 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | ZN 3750 |
| ctrlnum | (OCoLC)428777214 (DE-599)BVBBV036076951 |
| dewey-full | 621.38152 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.38152 |
| dewey-search | 621.38152 |
| dewey-sort | 3621.38152 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | 1. ed |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01616nam a2200481 c 4500</leader><controlfield tag="001">BV036076951</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20100707 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">100312s2010 a||| |||| 00||| eng d</controlfield><datafield tag="015" ind1=" " ind2=" "><subfield code="a">GBA974559</subfield><subfield code="2">dnb</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780815515944</subfield><subfield code="9">978-0-8155-1594-4</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0815515944</subfield><subfield code="9">0-8155-1594-4</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)428777214</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV036076951</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-858</subfield><subfield code="a">DE-573</subfield><subfield code="a">DE-859</subfield><subfield code="a">DE-29T</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TK7875</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.38152</subfield><subfield code="2">22</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 3750</subfield><subfield code="0">(DE-625)157334:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Handbook of silicon based MEMS materials and technologies</subfield><subfield code="c">Veikko Lindroos ...</subfield></datafield><datafield tag="250" ind1=" " ind2=" "><subfield code="a">1. ed</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Amsterdam [u.a.]</subfield><subfield code="b">William Andrew/Elsevier</subfield><subfield code="c">2010</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">xxxii, 636 p.</subfield><subfield code="b">ill.</subfield><subfield code="c">29 cm</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Micro & nano technologies series</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references and index</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microelectromechanical systems</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microelectromechanical systems / Materials</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Silicon / Electric properties</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microelectromechanical systems</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microelectromechanical systems</subfield><subfield code="x">Materials</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Silicon</subfield><subfield code="x">Electric properties</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">MEMS</subfield><subfield code="0">(DE-588)4824724-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Silicium</subfield><subfield code="0">(DE-588)4077445-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">MEMS</subfield><subfield code="0">(DE-588)4824724-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Silicium</subfield><subfield code="0">(DE-588)4077445-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Lindroos, Veikko</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-018968104</subfield></datafield></record></collection> |
| id | DE-604.BV036076951 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T22:11:00Z |
| institution | BVB |
| isbn | 9780815515944 0815515944 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-018968104 |
| oclc_num | 428777214 |
| open_access_boolean | |
| owner | DE-858 DE-573 DE-859 DE-29T |
| owner_facet | DE-858 DE-573 DE-859 DE-29T |
| physical | xxxii, 636 p. ill. 29 cm |
| publishDate | 2010 |
| publishDateSearch | 2010 |
| publishDateSort | 2010 |
| publisher | William Andrew/Elsevier |
| record_format | marc |
| series2 | Micro & nano technologies series |
| spelling | Handbook of silicon based MEMS materials and technologies Veikko Lindroos ... 1. ed Amsterdam [u.a.] William Andrew/Elsevier 2010 xxxii, 636 p. ill. 29 cm txt rdacontent n rdamedia nc rdacarrier Micro & nano technologies series Includes bibliographical references and index Microelectromechanical systems Microelectromechanical systems / Materials Silicon / Electric properties Microelectromechanical systems Materials Silicon Electric properties MEMS (DE-588)4824724-8 gnd rswk-swf Silicium (DE-588)4077445-4 gnd rswk-swf MEMS (DE-588)4824724-8 s Silicium (DE-588)4077445-4 s DE-604 Lindroos, Veikko Sonstige oth |
| spellingShingle | Handbook of silicon based MEMS materials and technologies Microelectromechanical systems Microelectromechanical systems / Materials Silicon / Electric properties Microelectromechanical systems Materials Silicon Electric properties MEMS (DE-588)4824724-8 gnd Silicium (DE-588)4077445-4 gnd |
| subject_GND | (DE-588)4824724-8 (DE-588)4077445-4 |
| title | Handbook of silicon based MEMS materials and technologies |
| title_auth | Handbook of silicon based MEMS materials and technologies |
| title_exact_search | Handbook of silicon based MEMS materials and technologies |
| title_full | Handbook of silicon based MEMS materials and technologies Veikko Lindroos ... |
| title_fullStr | Handbook of silicon based MEMS materials and technologies Veikko Lindroos ... |
| title_full_unstemmed | Handbook of silicon based MEMS materials and technologies Veikko Lindroos ... |
| title_short | Handbook of silicon based MEMS materials and technologies |
| title_sort | handbook of silicon based mems materials and technologies |
| topic | Microelectromechanical systems Microelectromechanical systems / Materials Silicon / Electric properties Microelectromechanical systems Materials Silicon Electric properties MEMS (DE-588)4824724-8 gnd Silicium (DE-588)4077445-4 gnd |
| topic_facet | Microelectromechanical systems Microelectromechanical systems / Materials Silicon / Electric properties Microelectromechanical systems Materials Silicon Electric properties MEMS Silicium |
| work_keys_str_mv | AT lindroosveikko handbookofsiliconbasedmemsmaterialsandtechnologies |