APA (7th ed.) Citation

(2010). Handbook of silicon based MEMS materials and technologies (1. ed.). William Andrew/Elsevier.

Chicago Style (17th ed.) Citation

Handbook of Silicon Based MEMS Materials and Technologies. 1. ed. Amsterdam [u.a.]: William Andrew/Elsevier, 2010.

MLA (9th ed.) Citation

Handbook of Silicon Based MEMS Materials and Technologies. 1. ed. William Andrew/Elsevier, 2010.

Warning: These citations may not always be 100% accurate.