APA-Zitierstil (7. Ausg.)

(2010). Handbook of silicon based MEMS materials and technologies (1. ed.). William Andrew/Elsevier.

Chicago-Zitierstil (17. Ausg.)

Handbook of Silicon Based MEMS Materials and Technologies. 1. ed. Amsterdam [u.a.]: William Andrew/Elsevier, 2010.

MLA-Zitierstil (9. Ausg.)

Handbook of Silicon Based MEMS Materials and Technologies. 1. ed. William Andrew/Elsevier, 2010.