Selected papers from the proceedings of the Ninth International Symposium on Sputtering and Plasma Processes (ISSP 2007), 6 - 8 June 2007, Kanazawa, Japan:
Gespeichert in:
| Format: | Tagungsbericht Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Orlando, Fla. [u.a.]
Elsevier
2008
|
| Schriftenreihe: | Vacuum
83,3 : Special issue |
| Schlagworte: | |
| Beschreibung: | Einzelaufnahme eines Zs.-Heftes |
| Beschreibung: | S. 459 - 710 Ill., graph. Darst. |
Internformat
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV036069670 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | t | ||
| 008 | 100309s2008 ad|| |||| 10||| eng d | ||
| 035 | |a (OCoLC)552297641 | ||
| 035 | |a (DE-599)GBV590172778 | ||
| 040 | |a DE-604 |b ger | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-706 | ||
| 245 | 1 | 0 | |a Selected papers from the proceedings of the Ninth International Symposium on Sputtering and Plasma Processes (ISSP 2007), 6 - 8 June 2007, Kanazawa, Japan |
| 264 | 1 | |a Orlando, Fla. [u.a.] |b Elsevier |c 2008 | |
| 300 | |a S. 459 - 710 |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Vacuum |v 83,3 : Special issue | |
| 500 | |a Einzelaufnahme eines Zs.-Heftes | ||
| 650 | 0 | 7 | |a Plasmaphysik |0 (DE-588)4046259-6 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Sputtern |0 (DE-588)4182614-0 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 2007 |z Kanazawa |2 gnd-content | |
| 689 | 0 | 0 | |a Sputtern |0 (DE-588)4182614-0 |D s |
| 689 | 0 | 1 | |a Plasmaphysik |0 (DE-588)4046259-6 |D s |
| 689 | 0 | |5 DE-604 | |
| 711 | 2 | |a International Symposium on Sputtering and Plasma Processes |n 9 |d 2007 |c Kanazawa |j Sonstige |0 (DE-588)16047304-4 |4 oth | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-018960966 | ||
Datensatz im Suchindex
| _version_ | 1804141120027885568 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV036069670 |
| ctrlnum | (OCoLC)552297641 (DE-599)GBV590172778 |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01271nam a2200337 cb4500</leader><controlfield tag="001">BV036069670</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">100309s2008 ad|| |||| 10||| eng d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)552297641</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)GBV590172778</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-706</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Selected papers from the proceedings of the Ninth International Symposium on Sputtering and Plasma Processes (ISSP 2007), 6 - 8 June 2007, Kanazawa, Japan</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Orlando, Fla. [u.a.]</subfield><subfield code="b">Elsevier</subfield><subfield code="c">2008</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">S. 459 - 710</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Vacuum</subfield><subfield code="v">83,3 : Special issue</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Einzelaufnahme eines Zs.-Heftes</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Plasmaphysik</subfield><subfield code="0">(DE-588)4046259-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Sputtern</subfield><subfield code="0">(DE-588)4182614-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">2007</subfield><subfield code="z">Kanazawa</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Sputtern</subfield><subfield code="0">(DE-588)4182614-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Plasmaphysik</subfield><subfield code="0">(DE-588)4046259-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="711" ind1="2" ind2=" "><subfield code="a">International Symposium on Sputtering and Plasma Processes</subfield><subfield code="n">9</subfield><subfield code="d">2007</subfield><subfield code="c">Kanazawa</subfield><subfield code="j">Sonstige</subfield><subfield code="0">(DE-588)16047304-4</subfield><subfield code="4">oth</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-018960966</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift 2007 Kanazawa gnd-content |
| genre_facet | Konferenzschrift 2007 Kanazawa |
| id | DE-604.BV036069670 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T22:10:49Z |
| institution | BVB |
| institution_GND | (DE-588)16047304-4 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-018960966 |
| oclc_num | 552297641 |
| open_access_boolean | |
| owner | DE-706 |
| owner_facet | DE-706 |
| physical | S. 459 - 710 Ill., graph. Darst. |
| publishDate | 2008 |
| publishDateSearch | 2008 |
| publishDateSort | 2008 |
| publisher | Elsevier |
| record_format | marc |
| series2 | Vacuum |
| spelling | Selected papers from the proceedings of the Ninth International Symposium on Sputtering and Plasma Processes (ISSP 2007), 6 - 8 June 2007, Kanazawa, Japan Orlando, Fla. [u.a.] Elsevier 2008 S. 459 - 710 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Vacuum 83,3 : Special issue Einzelaufnahme eines Zs.-Heftes Plasmaphysik (DE-588)4046259-6 gnd rswk-swf Sputtern (DE-588)4182614-0 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2007 Kanazawa gnd-content Sputtern (DE-588)4182614-0 s Plasmaphysik (DE-588)4046259-6 s DE-604 International Symposium on Sputtering and Plasma Processes 9 2007 Kanazawa Sonstige (DE-588)16047304-4 oth |
| spellingShingle | Selected papers from the proceedings of the Ninth International Symposium on Sputtering and Plasma Processes (ISSP 2007), 6 - 8 June 2007, Kanazawa, Japan Plasmaphysik (DE-588)4046259-6 gnd Sputtern (DE-588)4182614-0 gnd |
| subject_GND | (DE-588)4046259-6 (DE-588)4182614-0 (DE-588)1071861417 |
| title | Selected papers from the proceedings of the Ninth International Symposium on Sputtering and Plasma Processes (ISSP 2007), 6 - 8 June 2007, Kanazawa, Japan |
| title_auth | Selected papers from the proceedings of the Ninth International Symposium on Sputtering and Plasma Processes (ISSP 2007), 6 - 8 June 2007, Kanazawa, Japan |
| title_exact_search | Selected papers from the proceedings of the Ninth International Symposium on Sputtering and Plasma Processes (ISSP 2007), 6 - 8 June 2007, Kanazawa, Japan |
| title_full | Selected papers from the proceedings of the Ninth International Symposium on Sputtering and Plasma Processes (ISSP 2007), 6 - 8 June 2007, Kanazawa, Japan |
| title_fullStr | Selected papers from the proceedings of the Ninth International Symposium on Sputtering and Plasma Processes (ISSP 2007), 6 - 8 June 2007, Kanazawa, Japan |
| title_full_unstemmed | Selected papers from the proceedings of the Ninth International Symposium on Sputtering and Plasma Processes (ISSP 2007), 6 - 8 June 2007, Kanazawa, Japan |
| title_short | Selected papers from the proceedings of the Ninth International Symposium on Sputtering and Plasma Processes (ISSP 2007), 6 - 8 June 2007, Kanazawa, Japan |
| title_sort | selected papers from the proceedings of the ninth international symposium on sputtering and plasma processes issp 2007 6 8 june 2007 kanazawa japan |
| topic | Plasmaphysik (DE-588)4046259-6 gnd Sputtern (DE-588)4182614-0 gnd |
| topic_facet | Plasmaphysik Sputtern Konferenzschrift 2007 Kanazawa |
| work_keys_str_mv | AT internationalsymposiumonsputteringandplasmaprocesseskanazawa selectedpapersfromtheproceedingsoftheninthinternationalsymposiumonsputteringandplasmaprocessesissp200768june2007kanazawajapan |