APA (7th ed.) Citation

Franz, G. (2009). Low pressure plasmas and microstructuring technology ([1. ed.].). Springer.

Chicago Style (17th ed.) Citation

Franz, Gerhard. Low Pressure Plasmas and Microstructuring Technology. [1. ed.]. Berlin [u.a.]: Springer, 2009.

MLA (9th ed.) Citation

Franz, Gerhard. Low Pressure Plasmas and Microstructuring Technology. [1. ed.]. Springer, 2009.