Sputtering by particle bombardment: experiments and computer calculations from threshold to MeV energies
Saved in:
| Other Authors: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Berlin [u.a.]
Springer
2007
|
| Series: | Topics in applied physics
110 |
| Subjects: | |
| Online Access: | Sputtering by particle bombardment |
| Physical Description: | XVII, 507 S. Ill., graph. Darst. |
| ISBN: | 9783540445005 9783642079443 |
Staff View
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV035637863 | ||
| 003 | DE-604 | ||
| 005 | 20180220 | ||
| 007 | t | ||
| 008 | 090721s2007 ad|| |||| 00||| eng d | ||
| 015 | |a 07,N22,1137 |2 dnb | ||
| 020 | |a 9783540445005 |c : EUR 181.85 (freier Pr.), sfr 278.50 (freier Pr.) |9 978-3-540-44500-5 | ||
| 020 | |a 9783642079443 |9 978-3-642-07944-3 | ||
| 028 | 5 | 2 | |a 10989166 |
| 035 | |a (OCoLC)255905859 | ||
| 035 | |a (DE-599)HBZHT015244962 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-91G |a DE-83 |a DE-Aug4 |a DE-11 |a DE-384 | ||
| 050 | 0 | |a QC176.8.S72 | |
| 082 | 0 | |a 530.416 | |
| 084 | |a UD 9450 |0 (DE-625)145549: |2 rvk | ||
| 084 | |a UP 9350 |0 (DE-625)146462: |2 rvk | ||
| 084 | |a PHY 599f |2 stub | ||
| 084 | |a FER 786f |2 stub | ||
| 245 | 1 | 0 | |a Sputtering by particle bombardment |b experiments and computer calculations from threshold to MeV energies |c Rainer Behrisch ... (eds.) |
| 264 | 1 | |a Berlin [u.a.] |b Springer |c 2007 | |
| 300 | |a XVII, 507 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Topics in applied physics |v 110 | |
| 650 | 4 | |a Sputtern | |
| 650 | 4 | |a Sputtering (Physics) | |
| 650 | 0 | 7 | |a Sputtern |0 (DE-588)4182614-0 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Sputtern |0 (DE-588)4182614-0 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Behrisch, Rainer |d 1934-2011 |0 (DE-588)1031698396 |4 edt | |
| 776 | 0 | 8 | |i Erscheint auch als |n Online-Ausgabe |z 978-3-540-44502-9 |
| 830 | 0 | |a Topics in applied physics |v 110 |w (DE-604)BV008007504 |9 110 | |
| 856 | 4 | |u http://digitool.hbz-nrw.de:1801/webclient/DeliveryManager?pid=2415523&custom_att_2=simple_viewer |x Verlagsdaten Springer |y Sputtering by particle bombardment | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-017692709 | ||
Record in the Search Index
| _version_ | 1804139317228994560 |
|---|---|
| any_adam_object | |
| author2 | Behrisch, Rainer 1934-2011 |
| author2_role | edt |
| author2_variant | r b rb |
| author_GND | (DE-588)1031698396 |
| author_facet | Behrisch, Rainer 1934-2011 |
| building | Verbundindex |
| bvnumber | BV035637863 |
| callnumber-first | Q - Science |
| callnumber-label | QC176 |
| callnumber-raw | QC176.8.S72 |
| callnumber-search | QC176.8.S72 |
| callnumber-sort | QC 3176.8 S72 |
| callnumber-subject | QC - Physics |
| classification_rvk | UD 9450 UP 9350 |
| classification_tum | PHY 599f FER 786f |
| ctrlnum | (OCoLC)255905859 (DE-599)HBZHT015244962 |
| dewey-full | 530.416 |
| dewey-hundreds | 500 - Natural sciences and mathematics |
| dewey-ones | 530 - Physics |
| dewey-raw | 530.416 |
| dewey-search | 530.416 |
| dewey-sort | 3530.416 |
| dewey-tens | 530 - Physics |
| discipline | Physik Fertigungstechnik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01772nam a2200469 cb4500</leader><controlfield tag="001">BV035637863</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20180220 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">090721s2007 ad|| |||| 00||| eng d</controlfield><datafield tag="015" ind1=" " ind2=" "><subfield code="a">07,N22,1137</subfield><subfield code="2">dnb</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783540445005</subfield><subfield code="c">: EUR 181.85 (freier Pr.), sfr 278.50 (freier Pr.)</subfield><subfield code="9">978-3-540-44500-5</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783642079443</subfield><subfield code="9">978-3-642-07944-3</subfield></datafield><datafield tag="028" ind1="5" ind2="2"><subfield code="a">10989166</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)255905859</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)HBZHT015244962</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-91G</subfield><subfield code="a">DE-83</subfield><subfield code="a">DE-Aug4</subfield><subfield code="a">DE-11</subfield><subfield code="a">DE-384</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">QC176.8.S72</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">530.416</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UD 9450</subfield><subfield code="0">(DE-625)145549:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UP 9350</subfield><subfield code="0">(DE-625)146462:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">PHY 599f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">FER 786f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Sputtering by particle bombardment</subfield><subfield code="b">experiments and computer calculations from threshold to MeV energies</subfield><subfield code="c">Rainer Behrisch ... (eds.)</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Berlin [u.a.]</subfield><subfield code="b">Springer</subfield><subfield code="c">2007</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XVII, 507 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Topics in applied physics</subfield><subfield code="v">110</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Sputtern</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Sputtering (Physics)</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Sputtern</subfield><subfield code="0">(DE-588)4182614-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Sputtern</subfield><subfield code="0">(DE-588)4182614-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Behrisch, Rainer</subfield><subfield code="d">1934-2011</subfield><subfield code="0">(DE-588)1031698396</subfield><subfield code="4">edt</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Online-Ausgabe</subfield><subfield code="z">978-3-540-44502-9</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Topics in applied physics</subfield><subfield code="v">110</subfield><subfield code="w">(DE-604)BV008007504</subfield><subfield code="9">110</subfield></datafield><datafield tag="856" ind1="4" ind2=" "><subfield code="u">http://digitool.hbz-nrw.de:1801/webclient/DeliveryManager?pid=2415523&custom_att_2=simple_viewer</subfield><subfield code="x">Verlagsdaten Springer</subfield><subfield code="y">Sputtering by particle bombardment</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-017692709</subfield></datafield></record></collection> |
| id | DE-604.BV035637863 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T21:42:10Z |
| institution | BVB |
| isbn | 9783540445005 9783642079443 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-017692709 |
| oclc_num | 255905859 |
| open_access_boolean | |
| owner | DE-91G DE-BY-TUM DE-83 DE-Aug4 DE-11 DE-384 |
| owner_facet | DE-91G DE-BY-TUM DE-83 DE-Aug4 DE-11 DE-384 |
| physical | XVII, 507 S. Ill., graph. Darst. |
| publishDate | 2007 |
| publishDateSearch | 2007 |
| publishDateSort | 2007 |
| publisher | Springer |
| record_format | marc |
| series | Topics in applied physics |
| series2 | Topics in applied physics |
| spelling | Sputtering by particle bombardment experiments and computer calculations from threshold to MeV energies Rainer Behrisch ... (eds.) Berlin [u.a.] Springer 2007 XVII, 507 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Topics in applied physics 110 Sputtern Sputtering (Physics) Sputtern (DE-588)4182614-0 gnd rswk-swf Sputtern (DE-588)4182614-0 s DE-604 Behrisch, Rainer 1934-2011 (DE-588)1031698396 edt Erscheint auch als Online-Ausgabe 978-3-540-44502-9 Topics in applied physics 110 (DE-604)BV008007504 110 http://digitool.hbz-nrw.de:1801/webclient/DeliveryManager?pid=2415523&custom_att_2=simple_viewer Verlagsdaten Springer Sputtering by particle bombardment |
| spellingShingle | Sputtering by particle bombardment experiments and computer calculations from threshold to MeV energies Topics in applied physics Sputtern Sputtering (Physics) Sputtern (DE-588)4182614-0 gnd |
| subject_GND | (DE-588)4182614-0 |
| title | Sputtering by particle bombardment experiments and computer calculations from threshold to MeV energies |
| title_auth | Sputtering by particle bombardment experiments and computer calculations from threshold to MeV energies |
| title_exact_search | Sputtering by particle bombardment experiments and computer calculations from threshold to MeV energies |
| title_full | Sputtering by particle bombardment experiments and computer calculations from threshold to MeV energies Rainer Behrisch ... (eds.) |
| title_fullStr | Sputtering by particle bombardment experiments and computer calculations from threshold to MeV energies Rainer Behrisch ... (eds.) |
| title_full_unstemmed | Sputtering by particle bombardment experiments and computer calculations from threshold to MeV energies Rainer Behrisch ... (eds.) |
| title_short | Sputtering by particle bombardment |
| title_sort | sputtering by particle bombardment experiments and computer calculations from threshold to mev energies |
| title_sub | experiments and computer calculations from threshold to MeV energies |
| topic | Sputtern Sputtering (Physics) Sputtern (DE-588)4182614-0 gnd |
| topic_facet | Sputtern Sputtering (Physics) |
| url | http://digitool.hbz-nrw.de:1801/webclient/DeliveryManager?pid=2415523&custom_att_2=simple_viewer |
| volume_link | (DE-604)BV008007504 |
| work_keys_str_mv | AT behrischrainer sputteringbyparticlebombardmentexperimentsandcomputercalculationsfromthresholdtomevenergies |