Materials science of thin films: deposition and structure
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
San Diego, CA
Academic Press
2002
|
| Ausgabe: | 2nd ed |
| Schlagworte: | |
| Online-Zugang: | BFB01 BFE01 BSB01 BTU01 DMM01 EUV01 FAB01 FAN01 FAW01 FAW02 FCO01 FFW01 FHA01 FHD01 FHI01 FHM01 FHN01 FHO01 FHR01 FKE01 FLA01 FNU01 FWS01 FWS02 HTW01 HWR01 IOS01 LCO01 SAB01 SBA01 SBG01 SBR01 SDL01 SND01 TUM01 UBA01 UBG01 UBM01 UBR01 UBT01 UBW01 UBY01 UEI01 UER01 UPA01 WHM01 Volltext |
| Beschreibung: | Includes bibliographical references and index A review of materials science -- Vacuum science and technology -- Thin-film evaporation processes -- Discharges, plasmas, and ion-surface interactions -- Plasma and ion beam processing of thin films -- Chamical vapor deposition -- Substrate surfaces and thin-film nucleation -- Epitaxy -- Film structure -- Characterixation of thin films and surfaces -- Interdiffusion, reactions, and transformations in thin films -- Mechanical properties of thin films |
| Beschreibung: | xxi, 794 p. ill |
| ISBN: | 0585470979 |
Internformat
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| 245 | 1 | 0 | |a Materials science of thin films |b deposition and structure |c Milton Ohring |
| 250 | |a 2nd ed | ||
| 264 | 1 | |a San Diego, CA |b Academic Press |c 2002 | |
| 300 | |a xxi, 794 p. |b ill | ||
| 336 | |b txt |2 rdacontent | ||
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| 500 | |a Includes bibliographical references and index | ||
| 500 | |a A review of materials science -- Vacuum science and technology -- Thin-film evaporation processes -- Discharges, plasmas, and ion-surface interactions -- Plasma and ion beam processing of thin films -- Chamical vapor deposition -- Substrate surfaces and thin-film nucleation -- Epitaxy -- Film structure -- Characterixation of thin films and surfaces -- Interdiffusion, reactions, and transformations in thin films -- Mechanical properties of thin films | ||
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Datensatz im Suchindex
| DE-BY-FWS_katkey | 342685 |
|---|---|
| _version_ | 1806177578096001024 |
| any_adam_object | |
| author | Ohring, Milton |
| author_facet | Ohring, Milton |
| author_role | aut |
| author_sort | Ohring, Milton |
| author_variant | m o mo |
| building | Verbundindex |
| bvnumber | BV035413945 |
| callnumber-first | T - Technology |
| callnumber-label | TA418 |
| callnumber-raw | TA418.9.T45 |
| callnumber-search | TA418.9.T45 |
| callnumber-sort | TA 3418.9 T45 |
| callnumber-subject | TA - General and Civil Engineering |
| classification_rvk | UP 7500 UP 7550 ZN 4150 |
| classification_tum | ELT 279f WER 070f |
| collection | ZDB-1-NEL |
| ctrlnum | (OCoLC)645593561 (DE-599)GBVNLM003531430 |
| dewey-full | 621.38152 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.38152 |
| dewey-search | 621.38152 |
| dewey-sort | 3621.38152 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Werkstoffwissenschaften Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | 2nd ed |
| format | Electronic eBook |
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| id | DE-604.BV035413945 |
| illustrated | Not Illustrated |
| indexdate | 2024-08-01T11:39:26Z |
| institution | BVB |
| isbn | 0585470979 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-017334469 |
| oclc_num | 645593561 |
| open_access_boolean | |
| owner | DE-12 DE-384 DE-473 DE-BY-UBG DE-824 DE-19 DE-BY-UBM DE-91 DE-BY-TUM DE-739 DE-355 DE-BY-UBR DE-20 DE-706 DE-Aug4 DE-1046 DE-1102 DE-858 DE-1050 DE-1028 DE-573 DE-859 DE-M347 DE-1049 DE-92 DE-863 DE-BY-FWS DE-37 DE-128 DE-22 DE-BY-UBG DE-70 DE-Di1 DE-150 DE-210 DE-521 DE-522 DE-Eb1 DE-898 DE-BY-UBR DE-860 DE-29 DE-703 DE-1043 DE-1047 DE-1051 DE-862 DE-BY-FWS DE-634 DE-2070s DE-155 DE-BY-UBR DE-W89 DE-Re13 DE-BY-UBR DE-523 |
| owner_facet | DE-12 DE-384 DE-473 DE-BY-UBG DE-824 DE-19 DE-BY-UBM DE-91 DE-BY-TUM DE-739 DE-355 DE-BY-UBR DE-20 DE-706 DE-Aug4 DE-1046 DE-1102 DE-858 DE-1050 DE-1028 DE-573 DE-859 DE-M347 DE-1049 DE-92 DE-863 DE-BY-FWS DE-37 DE-128 DE-22 DE-BY-UBG DE-70 DE-Di1 DE-150 DE-210 DE-521 DE-522 DE-Eb1 DE-898 DE-BY-UBR DE-860 DE-29 DE-703 DE-1043 DE-1047 DE-1051 DE-862 DE-BY-FWS DE-634 DE-2070s DE-155 DE-BY-UBR DE-W89 DE-Re13 DE-BY-UBR DE-523 |
| physical | xxi, 794 p. ill |
| psigel | ZDB-1-NEL |
| publishDate | 2002 |
| publishDateSearch | 2002 |
| publishDateSort | 2002 |
| publisher | Academic Press |
| record_format | marc |
| spellingShingle | Ohring, Milton Materials science of thin films deposition and structure Dünnschichttechnik (DE-588)4136339-5 gnd Dünne Schicht (DE-588)4136925-7 gnd |
| subject_GND | (DE-588)4136339-5 (DE-588)4136925-7 |
| title | Materials science of thin films deposition and structure |
| title_auth | Materials science of thin films deposition and structure |
| title_exact_search | Materials science of thin films deposition and structure |
| title_full | Materials science of thin films deposition and structure Milton Ohring |
| title_fullStr | Materials science of thin films deposition and structure Milton Ohring |
| title_full_unstemmed | Materials science of thin films deposition and structure Milton Ohring |
| title_short | Materials science of thin films |
| title_sort | materials science of thin films deposition and structure |
| title_sub | deposition and structure |
| topic | Dünnschichttechnik (DE-588)4136339-5 gnd Dünne Schicht (DE-588)4136925-7 gnd |
| topic_facet | Dünnschichttechnik Dünne Schicht |
| url | http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=92177 |
| work_keys_str_mv | AT ohringmilton materialsscienceofthinfilmsdepositionandstructure |