Holdings: Transparent conductive zinc oxide

Transparent conductive zinc oxide: basics and applications in thin film solar cells ; with 50 tables

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Bibliographic Details
Other Authors:	Ellmer, Klaus (Editor)
Format:	Book
Language:	English
Published:	Berlin [u.a.] Springer 2008
Series:	Springer series in materials science 104
Subjects:	Dünne Schicht Elektronische Eigenschaft Zinkoxid Dünnschichtsolarzelle Aufsatzsammlung
Online Access:	Inhaltsverzeichnis
Item Description:	Literaturangaben
Physical Description:	XIII, 443 S. Ill., graph. Darst.
ISBN:	9783540736110 3540736115

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245	1	0	\|a Transparent conductive zinc oxide \|b basics and applications in thin film solar cells ; with 50 tables \|c Klaus Ellmer ... ed.
264		1	\|a Berlin [u.a.] \|b Springer \|c 2008
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Record in the Search Index

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adam_text	CONTENTS 1 ZNO AND ITS APPLICATIONS K. ELLMER AND A. KLEIN . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 1.1 INTRODUCTION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 1.2 ZINC OXIDE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2 1.4 MATERIAL PREPARATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9 1.4.1 GROWTH OF ZNO SINGLE CRYSTALS . . . . . . . . . . . . . . . . . . . . . . . . . . . 9 1.4.2 DEPOSITION OF ZNO THIN FILMS . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9 1.5 ELECTRONIC STRUCTURE OF ZNO . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12 1.6 INTRINSIC DEFECTS IN ZNO . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14 1.6.1 THERMODYNAMIC PROPERTIES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14 1.6.2 SELF-DIFFUSION IN ZNO . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19 1.7 APPLICATIONS OF ZNO . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21 1.7.1 TRANSPARENT ELECTRODES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24 1.7.2 VARISTORS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25 1.7.3 PIEZOELECTRIC DEVICES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26 1.7.5 TRANSPARENT OXIDE THIN FILM TRANSISTORS . . . . . . . . . . . . . . . . . . 26 1.7.6 SPINTRONICS. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27 REFERENCES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27 2 ELECTRICAL PROPERTIES K. ELLMER . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35 2.1 ELECTRICAL PROPERTIES OF ZNO SINGLE CRYSTALS . . . . . . . . . . . . . . . . . . . . 36 2.1.1 DOPANTS IN ZNO SINGLE CRYSTALS . . . . . . . . . . . . . . . . . . . . . . . . . . 38 2.1.2 ELECTRICAL TRANSPORT IN ZNO SINGLE CRYSTALS . . . . . . . . . . . . . . . . 41 2.2 ELECTRICAL TRANSPORT IN POLYCRYSTALLINE ZNO . . . . . . . . . . . . . . . . . . . . . 53 2.2.1 ZNO VARISTORS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53 2.2.2 THIN ZNO FILMS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56 2.2.3 TRANSPORT PROCESSES IN POLYCRYSTALLINE FILMS . . . . . . . . . . . . . . . 57 2.2.4 EXPERIMENTAL MOBILITY DATA OF POLYCRYSTALLINE ZNO . . . . . . . . . 61 2.4 TRANSPARENT FIELD EFFECT TRANSISTORS WITH ZNO . . . . . . . . . . . . . . . . . . 70 X CONTENTS 2.5 SEARCH FOR P-TYPE CONDUCTIVITY IN ZNO . . . . . . . . . . . . . . . . . . . . . . . . 71 REFERENCES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72 3 OPTICAL PROPERTIES OF ZNO AND RELATED COMPOUNDS C. BUNDESMANN, R. SCHMIDT-GRUND, AND M. SCHUBERT . . . . . . . . . . . . . . . 79 3.1 INTRODUCTION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 79 3.2 BASIC CONCEPTS AND PROPERTIES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81 3.2.1 STRUCTURAL PROPERTIES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81 3.2.2 VIBRATIONAL PROPERTIES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 83 3.2.3 INFRARED MODEL DIELECTRIC FUNCTION: PHONONS AND PLASMONS . . 85 3.2.4 VISIBLE-TO-VACUUM-ULTRAVIOLET MODEL DIELECTRIC FUNCTION: BAND-TO-BAND TRANSITIONS AND THEIR CRITICAL-POINT STRUCTURES . . . . . . . . . . . . . . . . . . . . . . . . 86 3.2.5 SPECTROSCOPIC ELLIPSOMETRY . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 88 3.3 DIELECTRIC CONSTANTS AND DIELECTRIC FUNCTIONS . . . . . . . . . . . . . . . . . . . 90 3.4 PHONONS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92 3.4.1 UNDOPED ZNO . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92 3.4.2 DOPED ZNO . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 98 3.4.3 MG X ZN 1 * X O. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 99 3.4.4 PHONON MODE BROADENING PARAMETERS . . . . . . . . . . . . . . . . . . . . . 100 3.5 PLASMONS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 102 3.6 BELOW-BAND-GAP INDEX OF REFRACTION . . . . . . . . . . . . . . . . . . . . . . . . . . 105 3.6.1 ZNO . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 105 3.6.2 MG X ZN 1 * X O. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 106 3.7 BAND-TO-BAND TRANSITIONS AND EXCITONIC PROPERTIES . . . . . . . . . . . . . . 108 3.7.1 ZNO . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 108 3.7.2 MG X ZN 1 * X O. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 116 REFERENCES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 118 4 SURFACES AND INTERFACES OF SPUTTER-DEPOSITED ZNO FILMS A. KLEIN AND F. S¨ AUBERLICH . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 125 4.1 INTRODUCTION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 126 4.1.1 SEMICONDUCTOR INTERFACES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 126 4.1.2 ZNO IN THIN-FILM SOLAR CELLS . . . . . . . . . . . . . . . . . . . . . . . . . . . . 127 4.1.3 PHOTOELECTRON SPECTROSCOPY (PES) . . . . . . . . . . . . . . . . . . . . . . . . 128 4.2 SURFACE PROPERTIES OF ZNO . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 131 4.2.1 CRYSTALLOGRAPHIC STRUCTURE OF ZNO SURFACES . . . . . . . . . . . . . . . . 131 4.2.2 CHEMICAL SURFACE COMPOSITION OF SPUTTERED ZNO FILMS . . . . . . 133 4.2.3 ELECTRONIC STRUCTURE OF ZNO SURFACES . . . . . . . . . . . . . . . . . . . . . . 139 4.3 THE CDS/ZNO INTERFACE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 149 4.3.1 BAND ALIGNMENT OF II*VI SEMICONDUCTORS . . . . . . . . . . . . . . . . . . 149 4.3.2 SPUTTER DEPOSITION OF ZNO ONTO CDS . . . . . . . . . . . . . . . . . . . . . . 151 4.3.3 DEPENDENCE ON PREPARATION CONDITION . . . . . . . . . . . . . . . . . . . . . 156 4.3.4 SUMMARY OF CDS/ZNO INTERFACE PROPERTIES . . . . . . . . . . . . . . . . 162 4.4 THE CU(IN,GA)SE 2 /ZNO INTERFACE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 164 CONTENTS XI 4.4.1 CHEMICAL PROPERTIES. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 165 4.4.2 ELECTRONIC PROPERTIES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 169 4.5 THE IN 2 S 3 /ZNO INTERFACE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 172 4.5.1 CU(IN,GA)SE 2 SOLAR CELLS WITH IN 2 S 3 BUFFER LAYERS . . . . . . . . . . 172 4.5.2 CHEMICAL PROPERTIES. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 173 4.5.3 ELECTRONIC PROPERTIES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 176 REFERENCES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 180 5 MAGNETRON SPUTTERING OF ZNO FILMS B. SZYSZKA . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 187 5.1 INTRODUCTION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 187 5.2 HISTORY OF ZNO SPUTTERING . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 188 5.3 MAGNETRON SPUTTERING . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 189 5.3.1 GLOW DISCHARGE CHARACTERISTICS . . . . . . . . . . . . . . . . . . . . . . . . . . . 190 5.3.2 PROCESSES AT THE TARGET SURFACE . . . . . . . . . . . . . . . . . . . . . . . . . . . 190 5.3.3 MAGNETRON OPERATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 192 5.3.4 MAGNETRON SPUTTERING OF ZNO . . . . . . . . . . . . . . . . . . . . . . . . . . . . 194 5.3.5 CERAMIC TARGET MAGNETRON SPUTTERING . . . . . . . . . . . . . . . . . . . . . 215 5.3.6 OTHER TECHNOLOGIES FOR SPUTTER DEPOSITION OF ZNO . . . . . . . . . . 217 5.4 MANUFACTURING TECHNOLOGY. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 218 5.4.1 IN-LINE COATING . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 218 5.4.2 ROTATABLE TARGET MAGNETRON SPUTTERING . . . . . . . . . . . . . . . . . . . 225 5.5 EMERGING DEVELOPMENTS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 227 5.5.1 IONIZED PVD TECHNIQUES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 227 5.5.2 HOLLOW CATHODE SPUTTERING . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 227 5.5.3 MODEL-BASED PROCESS DEVELOPMENT . . . . . . . . . . . . . . . . . . . . . . . . 228 REFERENCES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 229 6 ZINC OXIDE GROWN BY CVD PROCESS AS TRANSPARENT CONTACT FOR THIN FILM SOLAR CELL APPLICATIONS S. FA¨ Y AND A. SHAH . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 235 6.1 INTRODUCTION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 235 6.1.1 HISTORY OF ZNO GROWTH BY CVD PROCESS. . . . . . . . . . . . . . . . . . . 235 6.1.2 EXTRINSIC DOPING OF CVD ZNO . . . . . . . . . . . . . . . . . . . . . . . . . . . 236 6.2 DEVELOPMENT OF DOPED CVD ZNO FILMS . . . . . . . . . . . . . . . . . . . . . . . . 238 6.2.1 INFLUENCE OF DEPOSITION PRESSURE . . . . . . . . . . . . . . . . . . . . . . . . . . 238 6.2.2 GROWTH MECHANISMS FOR CVD ZNO . . . . . . . . . . . . . . . . . . . . . . . . 241 6.2.3 INFLUENCE OF SUBSTRATE TEMPERATURE . . . . . . . . . . . . . . . . . . . . . . . 252 6.2.4 INFLUENCE OF PRECURSOR FLUX . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 261 6.2.5 DOPING OF CVD ZNO FILMS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 266 6.2.6 THE EFFECT OF GRAIN SIZE ON ELECTRICAL AND OPTICAL PROPERTIES OF CVD ZNO LAYERS . . . . . . . . . . . . . . . . 277 6.2.7 ALTERNATIVE CVD METHODS FOR DEPOSITION OF THIN ZNO FILMS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 279 XII CONTENTS 6.3 CVD ZNO AS TRANSPARENT ELECTRODE FOR THIN FILM SOLAR CELLS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 280 6.3.1 CHARACTERISTICS REQUIRED FOR CVD ZNO LAYERS INCORPORATED WITHIN THIN FILM SOLAR CELLS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 280 6.3.2 EXPERIMENTAL RESULTS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 289 6.4 CONCLUSIONS. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 298 REFERENCES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 299 7 PULSED LASER DEPOSITION OF ZNO-BASED THIN FILMS M. LORENZ . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 303 7.1 BRIEF HISTORY AND BASICS. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 303 7.2 FUNDAMENTAL PROCESSES AND PLASMA DIAGNOSTICS . . . . . . . . . . . . . . . . . 305 7.3 PLD INSTRUMENTATION AND PARAMETERS FOR ZNO . . . . . . . . . . . . . . . . . . 309 7.4 RESULTS ON EPITAXIAL PLD ZNO THIN FILMS . . . . . . . . . . . . . . . . . . . . . 313 7.4.1 STRUCTURE OF NOMINALLY UNDOPED PLD ZNO THIN FILMS . . . . . . 314 7.4.2 SURFACE MORPHOLOGY OF PLD ZNO THIN FILMS . . . . . . . . . . . . . . . 319 7.4.3 ELECTRICAL PROPERTIES OF PLD ZNO THIN FILMS: EFFECT OF BUFFER LAYERS. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 322 7.4.4 LUMINESCENCE OF PLD ZNO THIN FILMS ON SAPPHIRE . . . . . . . . . 327 7.4.5 CHEMICAL COMPOSITION OF DOPED PLD ZNO FILMS AND DOPING EFFECTS. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 331 7.5 DEMONSTRATOR DEVICES WITH PLD ZNO THIN FILMS . . . . . . . . . . . . . . . 336 7.5.1 LARGE-AREA ZNO SCINTILLATOR FILMS . . . . . . . . . . . . . . . . . . . . . . . . . 338 7.5.2 BRAGG REFLECTOR MIRRORS AND ZNO QUANTUM WELL STRUCTURES . . 340 7.5.3 SCHOTTKY DIODES TO ZNO THIN FILMS. . . . . . . . . . . . . . . . . . . . . . . 341 7.5.4 PLD OF ZNO PN-JUNCTIONS, FIRST LEDS, AND OTHER HIGHLIGHTS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 344 7.6 ADVANCED PLD TECHNIQUES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 346 7.6.1 ADVANCES IN PLD OF THIN FILMS . . . . . . . . . . . . . . . . . . . . . . . . . . 346 7.6.2 HIGH-PRESSURE PLD OF ZNO-BASED NANOSTRUCTURES. . . . . . . . . . . 348 7.7 SUMMARY. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 349 REFERENCES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 350 8 TEXTURE ETCHED ZNO:AL FOR SILICON THIN FILM SOLAR CELLS J. H¨ UPKES, J. M¨ ULLER, AND B. RECH . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 359 8.1 INTRODUCTION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 359 8.2 SILICON THIN FILM SOLAR CELLS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 361 8.2.1 PRINCIPLE OF OPERATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 361 8.2.2 AMORPHOUS AND MICROCRYSTALLINE SILICON . . . . . . . . . . . . . . . . . . . 363 8.2.3 DESIGN ASPECTS OF SILICON THIN FILM SOLAR CELLS. . . . . . . . . . . . . 365 8.2.4 REQUIREMENTS FOR TCO CONTACTS . . . . . . . . . . . . . . . . . . . . . . . . . . 368 8.2.5 SOLAR MODULE ASPECTS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 373 8.2.6 APPROACHES FOR LIGHT TRAPPING OPTIMIZATION . . . . . . . . . . . . . . . 375 8.3 SPUTTER DEPOSITION AND ETCHING OF ZNO:AL. . . . . . . . . . . . . . . . . . . . . . 377 8.3.1 PROPERTIES OF SPUTTER DEPOSITED ZNO:AL . . . . . . . . . . . . . . . . . . . 378 CONTENTS XIII 8.3.2 ETCHING BEHAVIOR OF ZINC OXIDE. . . . . . . . . . . . . . . . . . . . . . . . . . . 379 8.3.3 PRACTICAL ASPECTS FOR ETCHING OF SPUTTERED ZNO:AL . . . . . . . . . . 392 8.4 HIGH EFFICIENCY SILICON THIN FILM SOLAR CELLS. . . . . . . . . . . . . . . . . . . . 393 8.4.1 OPTIMIZATION OF SOLAR CELLS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 393 8.4.2 HIGHLY TRANSPARENT ZNO:AL FRONT CONTACTS . . . . . . . . . . . . . . . . 401 8.4.3 APPLICATION OF TEXTURE ETCHED ZNO:AL FILMS IN HIGH EFFICIENCY SOLAR CELLS AND MODULES . . . . . . . . . . . . . . . . . 403 8.5 SUMMARY. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 404 REFERENCES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 406 9 CHALCOPYRITE SOLAR CELLS AND MODULES R. KLENK . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 415 9.1 HETEROJUNCTION FORMATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 415 9.1.1 WHY USE AN UNDOPED ZNO LAYER? . . . . . . . . . . . . . . . . . . . . . . . . 418 9.2 TRANSPARENT FRONT CONTACT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 419 9.2.1 MONOLITHIC INTEGRATION. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 420 9.2.2 OPTICAL LOSSES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 423 9.3 MANUFACTURING . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 423 9.3.1 CHEMICAL VAPOUR DEPOSITION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 425 9.3.2 SPUTTERING . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 425 9.4 STABILITY . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 427 9.4.1 MODULE DEGRADATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 428 9.5 NONCONVENTIONAL AND NOVEL APPLICATIONS . . . . . . . . . . . . . . . . . . . . . . . 431 9.5.1 DIRECT ZNO/CHALCOPYRITE JUNCTIONS . . . . . . . . . . . . . . . . . . . . . . . 431 9.5.2 SUPERSTRATES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 432 9.5.3 TRANSPARENT BACK CONTACT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 432 REFERENCES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 434 INDEX . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 439
any_adam_object	1
author2	Ellmer, Klaus
author2_role	edt
author2_variant	k e ke
author_facet	Ellmer, Klaus
building	Verbundindex
bvnumber	BV035396968
classification_rvk	UP 3100 UP 7570 ZP 3730
ctrlnum	(OCoLC)633440487 (DE-599)BVBBV035396968
dewey-full	546.66153 621.31244
dewey-hundreds	500 - Natural sciences and mathematics 600 - Technology (Applied sciences)
dewey-ones	546 - Inorganic chemistry 621 - Applied physics
dewey-raw	546.66153 621.31244
dewey-search	546.66153 621.31244
dewey-sort	3546.66153
dewey-tens	540 - Chemistry and allied sciences 620 - Engineering and allied operations
discipline	Chemie / Pharmazie Maschinenbau / Maschinenwesen Physik Elektrotechnik / Elektronik / Nachrichtentechnik Energietechnik
format	Book
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spelling	Transparent conductive zinc oxide basics and applications in thin film solar cells ; with 50 tables Klaus Ellmer ... ed. Berlin [u.a.] Springer 2008 XIII, 443 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Springer series in materials science 104 Literaturangaben Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Elektronische Eigenschaft (DE-588)4235053-0 gnd rswk-swf Zinkoxid (DE-588)4190864-8 gnd rswk-swf Dünnschichtsolarzelle (DE-588)4150833-6 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Zinkoxid (DE-588)4190864-8 s Dünne Schicht (DE-588)4136925-7 s Elektronische Eigenschaft (DE-588)4235053-0 s DE-604 Dünnschichtsolarzelle (DE-588)4150833-6 s Ellmer, Klaus edt Springer series in materials science 104 (DE-604)BV000683335 104 SWB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=017317679&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis
spellingShingle	Transparent conductive zinc oxide basics and applications in thin film solar cells ; with 50 tables Springer series in materials science Dünne Schicht (DE-588)4136925-7 gnd Elektronische Eigenschaft (DE-588)4235053-0 gnd Zinkoxid (DE-588)4190864-8 gnd Dünnschichtsolarzelle (DE-588)4150833-6 gnd
subject_GND	(DE-588)4136925-7 (DE-588)4235053-0 (DE-588)4190864-8 (DE-588)4150833-6 (DE-588)4143413-4
title	Transparent conductive zinc oxide basics and applications in thin film solar cells ; with 50 tables
title_auth	Transparent conductive zinc oxide basics and applications in thin film solar cells ; with 50 tables
title_exact_search	Transparent conductive zinc oxide basics and applications in thin film solar cells ; with 50 tables
title_full	Transparent conductive zinc oxide basics and applications in thin film solar cells ; with 50 tables Klaus Ellmer ... ed.
title_fullStr	Transparent conductive zinc oxide basics and applications in thin film solar cells ; with 50 tables Klaus Ellmer ... ed.
title_full_unstemmed	Transparent conductive zinc oxide basics and applications in thin film solar cells ; with 50 tables Klaus Ellmer ... ed.
title_short	Transparent conductive zinc oxide
title_sort	transparent conductive zinc oxide basics and applications in thin film solar cells with 50 tables
title_sub	basics and applications in thin film solar cells ; with 50 tables
topic	Dünne Schicht (DE-588)4136925-7 gnd Elektronische Eigenschaft (DE-588)4235053-0 gnd Zinkoxid (DE-588)4190864-8 gnd Dünnschichtsolarzelle (DE-588)4150833-6 gnd
topic_facet	Dünne Schicht Elektronische Eigenschaft Zinkoxid Dünnschichtsolarzelle Aufsatzsammlung
url	http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=017317679&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA
volume_link	(DE-604)BV000683335
work_keys_str_mv	AT ellmerklaus transparentconductivezincoxidebasicsandapplicationsinthinfilmsolarcellswith50tables

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