Actuator 96: 5th International Conference on New Actuators ; 26 - 28 June, 1996, Bremen, Germany ; conference proceedings
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AXON Technologie Consult GmbH
1996
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adam_text | ACTUATOR 96
5th International
Conference on New Actuators
26-28 June 1996
Bremen, Germany
Conference Proceedings
Editor:
Hubert Borgmann
Published by:
AXON Technologie Consult GmbH
Buer
ULB Darmstadt
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19980642
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Microactuators
Technical Papers and Authors No Page
A New Bidirectional Micropump for Liquids and Gases P 3 61
M Stehr, S Messner, R Zengerle
Institute of Micro- and Informationtechnology,
Villingen-Schwenningen, Germany
Gas Handling System with Integrated Microactuators - Concept P 4 65
and Design Considerations for a Miniaturised Gasanalyser
A Meckes, J Behrens, M Gebhard, W Benecke
University of Bremen, Germany
A Micro Mobile Mechanism Driven by Impulsive Inertial Force P 5 68
Y Yamagata, Kanagawa Academy of Science and Technology, Kawasaki, Japan
T Higuchi, O Ohmichi, The University of Tokyo, Japan
Fabrication and Characterization of Truly Three-Dimensional P 6 72
Diffuser/Nozzle Micro Structures in Silicon
M Heschel, M Müllenborn, S Bouwstra
Technical University of Denmark, Lyngby, Denmark
Electromagnetic Membrane Actuator With a Compliant P 7 76
Silicone Suspension
A Feustel, O Krusemark, U Lehmann, J Müller, T Sperling
University of Technology Hamburg-Harburg, Germany
Design Considerations on the Dynamic Micropump P 8 80
T Gerlach, H Wurmus, Technical University of Ilmenau, Germany
Thermal Actuation Units for Microvalves and Micropumps P 9 84
M Freygang, H Glosch, H Haffner, S Messner ^
Hahn-Schickard-Gesellschaft für angewandte Forschung e V ,
Villingen-Schwenningen, Germany
A Silicon Micromachined Magnetic Actuator Using P 10 88
a Two Layer Electroplating Process
D De Bruyker, R Puers, Katholieke Universiteit Leuven, Heverlee, Belgium
J B Chevrier, K Baert, IMEC vzw , Leuven, Belgium
H Löwe, Institut für Mikrotechnik Mainz GmbH, Germany
Manufacturing and Measurement of Microstructures Using P 11 92
Ultraprecision Machining and Atomic Force Microscopy
E Brinksmeier, R Malz, University of Bremen, Germany
Conducting Polymer Flexural Elements for Micropump Driving P 12 96
A Della Santa, A Mazzoldi, D De Rossi, University of Pisa, Italy
T Gerlach, M Kloepzig, T Hofman, Technical University of Ilmenau, Germany
10
ACTUATOR 96, 5th International Conference on New Actuators, 26 - 28 June 1996, Bremen, Germany
Microactuators
Technical Papers and Authors
No
Adhesive Gripper - A New Approach to Handling MEMS P 13
E Westkämper, R D Schraft, C Bark, G Vögele, T Weisener
Fraunhofer-Institute Manufacturing Engineering and Automation,
Stuttgart, Germany
Micropump / Fluidic Micromotor P 14
T Weisener, C Bark, R D Schraft, G Vögele, M Widmann
Fraunhofer-Institut für Produktionstechnik und Automatisierung,
Stuttgart, Germany
A Bertholds, A Braunschweiler, AGIE, Losone, Switzerland
Wafer Bonding for Fabrication of a Mirror-Array P 15
J Krujatz, W Grebner, C Kaufmann, R Hahn, U Wollmann, T Geßner
TU Chemnitz-Zwickau, Germany
Magnetic Microactuators Fabricated by the LIGA-Technique P 16
for Large Displacements or Large Forces
B Rogge, J Schulz, J Mohr, A Thommes,
Forschungszentrum Karlsruhe, Germany
New Developments and Investigations on Electrostatic Driven P 17
Actuators with Nonplanar Electrodes
S Hoerschelmann, H J Quenzer, K Reimer, B Wagner
Fraunhofer-Institut für Siliziumtechnologie, Berlin, Germany
On-chip Coils Produced by Electroplating P 18
R Catanescu, J Noetzel, J Zacheja, J Binder, K -L Krieger, R Laur
University of Bremen, Germany
Electromagnetic Actuation for Micropumps and -Valves P 19
J Behrens, A Meckes, M Gebhard, W Benecke /
University of Bremen, Germany
Micropump Manufactured by Photolithography P 20
and Diaphragm Transfer
B Büstgens, W Menz, University of Freiburg, Germany
W Bacher, W K Schomburg, Research Centre Karlsruhe, Germany
Magnetic Microactuators for Relay Applications P 21
T Earles, P Mangat, J Klein, H Guckel,
University of Wisconsin-Madison, USA
Realisation of a Microactuator for the two-dimensional P 22
Alignment of Optical Fibres
Th Frank, Technical University of Ilmenau, Germany
Page
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104
108
112
116
120
124
128
132
136
ACTUATOR 96, 5th International Conference on New Actuators, 26 - 28 June 1996, Bremen, Germany
11
Piezoelectric Actuators
Technical Papers and Authors
No
Trends and Challenges in New Piezoelectric Actuator 2 0
Applications (Review)
K Spanner, Physik Instrumente GmbH amp; Co,Waldbronn, Germany
W W Wolny, Ferroperm A/S, Kvistgärd, Denmark
Piezoelectric multi-degree-of-freedom Actuators/Sensors 2 1
R Bansevicius, Kaunas University of Technology, Lithuania
JAG Knight, De Montfort University, Leceister, UK
Principle of Smart Piezoactuators 2 2
H Janocha, D J Jendritza, P Scheer, P Stephan
Consultant Agency D*ASS, Saarbrücken, Germany
A New Multi-mode Piezoelectric Motor 2 3
F Claeyssen, R LeLetty, L Chouteau, N Lhermet,
Cedrat Recherche, Meylan, France
L Petit, R Briot, P Gonnard, INSA (LGEF), Villeurbanne, France
A Comparative Study of Traveling Wave and Standing Wave — 2 4
Piezomotors from the Mechanical Point of View
L Buchaillot, Laboratory of Integrated Micro-Mechanical Systems-Institute of
Industrial Science, Tokyo, Japan
P Minotti, P Le Moal, A Ferreira
Laboratoire de Mecanique Appliquee R Chaleat, Besan^on, France
High Torque/High Power Piezomotor — 2 5
Influence of the Rotor Vibration
D Guyomar, T Mazoyer, G Ching, J D Sauzade, O Lagarrigue
*
Techsonic, Antibes, France
C El hassani, H Aikyo, Y Noda, M Gschwind, J Lauretti, P Bonnefoy
IMRA Europe SA, Sophia Antipolis, France
Improved Torque of PZT Thin Film Actuated Elastic Fin 2 6
Micromotor
M -A Dubois, P Muralt, K G Brooks
Laboratoire de Ceramique, EPFL, Lausanne, Switzerland
R Luthier, ASULAB SA, Epagnier-Marin, Switzerland
PZT Thin Film Buckling Actuator for Optical Applications 2 7
M Sakata, S Wakabayashi, H Totani, H Goto, M Takeuchi, T Yada
OMRON Corp , Tsukuba, Japan
Characteristics of a Piezoelectric Miniature Motor P 23
M Bexell, S Johansson, Uppsala University, Sweden
Page
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147
148
152
156
160
165
169
173
12
ACTUATOR 96, 5th International Conference on New Actuators, 26 - 28 June 1996, Bremen, Germany
Piezoelectric Actuators
Technical Papers and Authors
No Page
Properties and Performance of Multilayer Actuators for Dynamic Applications B Andersen, Ferroperm A/S, Kvistgärd, Denmark P 24 177
Modelling and Simulation of Piezoelectric Actuators with Way Enlargement System R Kasper, J Heinrich, Otto-von-Guericke-University, Magdeburg, Germany A Wagner, Consultant Agency New Controlling and Regulation Systems for Fluid Drives, Magdeburg, Germany P 25 181
Modelling of Piezoactuators and a Newly Developed Control Unit for Inside-Automotive Applications T Vetter, H -C Reuss, Dresden University of Technology, Germany P 26 187
Dynamic Behaviour of PZT Multilayer Actuators A Wolff, D Cramer, H Hellebrand, C Schuh, T Steinkopff, K Lubitz Siemens AG, München, Germany P27 193
Piezoelectric Nano-Actuator with Large Dynamic Range and Extreme Position Stability H van der Wulp, M Hoogteijling, P V Pistecky Delft University of Technology, The Netherlands P 29 196
Piezoelectric Travelling Wave Motors Generating Direct Linear Motion M Hermann, W Schinköthe, Universität Stuttgart, Germany P 30 200
Strain Actuation on Composite Panels L De Vivo, A Concilio, Italian Aerospace Research Center, Capua, Italy P 31 204
High Pressure Piezoelectrics Pumps G Ching, J -D Guyomar, J D Sauzade, TechSonic, Antibes, France P Minier, Renault DR, Rueil Malmaison, France P 32 208
Vibration Drive E Wehrsdorfer, G Borchhardt, P Pertsch, W Karthe, Fraunhofer-Institute for Applied Optics and Precision Engineering, Jena, Germany P 34 209
Development and Control of Piezoelectric Actuators for a Mobile Micromanipulation System R Munassypov, B Grossmann, B Magnussen, S Fatikow University of Karlsruhe, Germany P 35 213
Properties of Piezoelectric Multilayer Actuators P 36 217
under Uniaxial Compressive Stress
P Pertsch, F Bohrisch, G Borchardt, B Höfer, H Rohr, E Wehrsdorfer
Fraunhofer-Institute for Applied Optics and Precision Engineering, Jena, Germany
ACTUATOR 96, 5th International Conference on New Actuators, 26 - 28 June 1996, Bremen, Germany
13
Piezoelectric Actuators
Technical Papers and Authors
No
Single Phase Piezoelectric Motor with Sensorless Position P 37
Detection
C Peclat, Helbling Technik AG, Bern, Switzerland
M Jufer, Swiss Federal Institute of Technology, Lausanne, Switzerland
A Digitally Driven Actuator P 38
M Bexell, S Johansson, Uppsala University, Sweden
B Anderson, Ferroperm A/S, Kvistgärd, Denmark
Piezoelectric Actuators for Large-Signal-Applications P 39
DJ Jendritza, H Janocha, P Stephan, Consultant Agency D*ASS,
Saarbrücken, Germany
Properties of Piezoelectric-based Actuators (COST 503)* P 40
J F Fernandez
Institute de Cerämica y Vidrio, Madrid, Spain
A Dogan, J Tressler, K Uchino, R E Newnham
The Pennsylvania State University, USA
Piezoactuators in Multifunctional Interface Elements P 42
for High Load Applications
E Breitbach, U Gnauert, M Holst
German Aerospace Research Establishment (DLR), Braunschweig, Germany
R Wimmel, ERAS GmbH, Göttingen, Germany
Piezodriven Ultrafast Mechanical Circuit Breaker P 43
for Power Distributions
J Bosselmann, F Kettelhake, G Trenkler
University of the Federal Armed Forces, Hamburg, Germany
Characteristics of Inverter-^fed Ultrasonic Motors — P 44
Optimization of Stator/Rotor-Interface
J Maas, P Ide, H Grotstollen, University of Paderborn, Germany
Piezoelectric Rotary Motors P 45
W Vishnewsky, PI Ceramic GmbH, Lederhose, Germany
R Glöß, Physik Instrumente (PI) GmbH, Waldbronn, Germany
New Methods for Measuring Mechanical Stiffness P 46
of Piezo Actuators
E Hennig, PI Ceramic GmbH, Lederhose, Germany
P Pertsch, Fraunhofer-Institute for Applied Optics and Precision Engineering,
Jena, Germany
Page
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225
229
233
234
237
241
245
249
14
ACTUATOR 96, 5th International Conference on New Actuators, 26 - 28 June 1996, Bremen, Germany
Piezoelectric Actuators
Technical Papers and Authors
No
On Application of Ultrasonic Concentrators P 47
in Piezoelectric Transducers
V M Sharapov, I B Chudaeva, Institute of Engineering and Technology
Cherkasy, Ukraine
A N Podlipenets, R amp;D Centre ’’Resistance”, Kyiv, Ukraine
Piezoelectric Composites as Large-area Actuators P 48
R Y Ting, T R Howarth
U S Naval Undersea Warfare Center, Orlando, FI , USA
Tailoring Performance of Cymbal Actuators P 49
J F Fernandez
Institute de Cerämica y Vidrio, Madrid, Spain
A Dogan, J Tressler, K Uchino, R E Newnham
The Pennsylvania State University, USA
Page
253
257
261
ACTUATOR 96, 5th International Conference on New Actuators, 26 - 28 June 1996, Bremen, Germany
15
Magnetostrictive Actuators
Technical Papers and Authors
No
Giant Magnetostrictive Materials and their Application — 3 0
Comparative Analysis and Future Aspect (Review)
H Uchida, Tokai University, Kanagawa, Japan
H Kaneko, Society of Non-Traditional Technology, Tokyo, Japan
Large Amplitude Resonant Actuators Using 3 1
TERFENOL-D Transducers
A E Crawford
ETREMA Products, Inc , Ames, Iowa, USA/University of Southampton, UK
A New Resonant Magnetostrictive Rotating Motor 3 2
F Claeyssen, N Lhermet, R Le Letty, L Chouteau
Cedrat Recherche, Meylan, France
Effects of the Preparation Method and Condition 3 3
on the Magnetic and Giant Magnetostrictive Properties
of the (Tb,Dy)Fe2 Thin Films
H Uchida, M Wada, A Ichikawa, Y Matsumura, H H Uchida
Tokai University, Kanagawa, Japan
Magnetostrictive Thin Film Transducers for Applications 3 4
in Microsystem Technology (BRE2-OS 36)*
E Quandt, K Seemann, Forschungszentrum Karlsruhe, Germany
Torsion based, Drift-free Magnetostrictive 3 5
Microactuators (BRE2-OS 36)*
J Betz, K Mackay, J -C Peuzin
Laboratoire de Magnetisme, CNRS, Grenoble, France
B Halstrup, Universität Kassel, Germany
N Lhermet, Cedrat Recherche, Meylan, France
Performance Simulations of Magnetostrictive Actuators 3 6
with Resonant Mechanical Loads
G Engdahl, ABB Corporate Research, Västeräs, Sweden
F Stillesjö, A Bergqvist, Royal Institute of Technology, Stockholm, Sweden
Controlled Magnetostrictive Actuation Performance P 50
under Digital Variable Structure Control
RJE Smith, A G Jenner, A J Wilkinson, R D Greenough,
University of Hull, UK
Design and Realisation of a Magnetostrictive Actuator P 51
M G Salloker, E Reisinger, JOANNEUM RESEARCH, Graz, Austria
Page
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268
272
275
279
283
287
291
292
16
ACTUATOR 96, 5th International Conference on New Actuators, 26 - 28 June 1996, Bremen, Germany
Magnetostrictive Actuators
Technical Papers and Authors No Page
Design of Fast and Precise Solid-State Actuators P 54 296
with Large Displacements
D J Jendritza, Consultant Agency D*ASS, Saarbrücken, Germany
J Schröder, Consultant agency new controlling and regulation systems
for fluid actuators, Magdeburg, Germany
Displacement Amplifier for Solid-State Actuators P 55 300
DJ Jendritza, H Janocha, H Schmidt, Consultant Agency D*ASS,
Saarbrücken, Germany
Hybrid Actuator with Piezoelectric and P 56 304
Magnetostrictive Material
H Janocha, B Clephas, University of the Saarland, Germany
Finite Element Modelling of a Magnetostrictive P 57 308
Micromembrane
C Body, O Cugat, G Reyne, G Meunier
Laboratoire d’Electrotechnique de Grenoble, France
Active Control of Vibrations: Impedance Matching of P 58 312
Actuators (BRE2-0952)*
W Steichen, F Luc, M Lagier, Thomson-Sintra ASM, Sophia Antipolis, France
ACTUATOR 96, 5th International Conference on New Actuators, 26 - 28 June 1996, Bremen, Germany 17
Electro-/ Magnetorheological
Actuators
Technical Papers and Authors No Page
The Performance of Field-Controllable Fluids and 4 0 313
Devices (Review)
J M Ginder, Ford Motor Company, Dearborn, Michigan, USA
J L Sproston, University of Liverpool, UK
Acoustic Properties of Electrorheological Fluids K Wicker, C Eberius, D Guicking, Universität Göttingen, Germany 4 1 320
Electrical Controlled Generator Drive with an ER-Fluid-Clutch B Bäker, J -U Varchmin, TU Braunschweig, Germany B Rech, W Linder, Volkswagen AG, Wolfsburg, Germany 4 2 324
Antagonized Bellows Active Damper Using ER Suspension and its Application to Vibration Isolation Control M Nakano, K Ito, Yamagata University, Japan 4 3 328
Design of Magnetorheological Fluid Actuators R Bölter, H Janocha, St Hellbrück, University of the Saarland, Saarbrücken, Germany Cl Kormann, BASF AG, Ludwigshafen, Germany 4 4 329
Controllable Squeeze Film Damping Using Magnetorheological Fluid M R Jolly, J D Carlson, Lord Corporation, Cary, North Carolina, USA 4 5 333
Electrorheological Generator of Liquid Pressure Oscillations E V Korobko, Academy of Sciences, Minsk, Belarussia P 59 337
An Electrostatically Controlled Automobile Power Train E C Partington, C K Wong, University of Hong Kong W A Bullough, University of Sheffield, UK P 60 341
A New Type of Hydraulic Actuator Using Electrorheological Fluids E Wendt, K W Büsing, Bayer AG, Leverkusen, Germany P 61 342
Positioning Behaviour of a Closed Loop Controlled ER-Actuator C Wolff-Jesse, RWTH Aachen, Germany P 62 346
Research and Development Activities of the Producer-User P 63 351
Initiative for Electrorheological and Magnetorheological Fluids
DJ Jendritza, R Bolter, Consultant Agency D*ASS, Saarbrücken, Germany
E Wendt, Bayer AG, Leverkusen, Germany
18
ACTUATOR 96, 5th International Conference on New Actuators, 26 - 28 June 1996, Bremen, Germany
Shape Memory Actuators
Technical Papers and Authors No
Shape Memory Actuators from Macro to Micro Range (Review) 5 0
W Van Moorleghem, C Chandrasekaran
AMT, Herk-de-Stad, Belgium
S Miyazaki, University of Tsukuba, Japan
Thermomechanical Properties of Shape Memory Polymer 5 1
of Polyurethane Series and their Applications
H Tobushi, H Hara, E Yamada, Aichi Institute of Technology, Toyota, Japan
S Hayashi, Mitsubishi Heavy Industries, Ltd , Nagoya, Japan
Stress-Optimized Integrated Linear Actuators 5 2
with Shape Memory Effect
M Kohl, K D Skrobanek, A Schüssler, M Teschner
Forschungszentrum Karlsruhe, Germany
S Miyazaki, University of Tsukuba, Japan
Shape Memory Alloy Ribbon Actuator 5 3
M Kao, D Schmitz, P Thoma, M Klaus, D Angst
Johnson Controls, Inc , Milwaukee, Wisconsin, USA
Nitinol-based Microinstruments for Endoscopic Neurosurgery 5 4
A E Guber, O Baldinus, M Loser, A Schüssler,
Forschungszentrum Karlsruhe, Germany
N Giordano, P Wieneke, AESCULAP AG, Tuttlingen, Germany
An SMA-actuated Implantable System for Delivery of 5 5
Liquid Drugs (BRE2-579)*
D Reynaerts, J Peirs, H Van Brussel
Katholieke Universiteit Leuven, Heverlee, Belgium
Actuator Array for Use in Minimal Invasive Surgery P 64
H Fischer, R Trapp, Forschungszentrum Karlsruhe, Germany
B Hoffmann, Universität Karlsruhe, Germany
Cyclic Deformation Properties of TiNi Shape Memory Alloy P 65
for Application to Thermal Actuator
H Tobushi, T Nakahara, S Yamada, T Hachisuka
Aichi Institute of Technology, Toyota, Japan
K Tanaka, Tokyo Metropolitan Institute of Technology, Japan
Fatigue Properties of Pseudoelastic NiTi Thin Sheet P 66
under Cyclic Pure Bending
R Plietsch, P Schloßmacher, T Stöber, K Ehrlich
Forschungszentrum Karlsruhe, Germany
Simulation and Control of Shape Memory Actuators P 67
J Hesselbach, H Stork, Technical University of Braunschweig, Germany
Page
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362
366
370
375
379
383
388
392
396
ACTUATOR 96, 5th International Conference on New Actuators, 26 - 28 June 1996, Bremen, Germany
19
Shape Memory Actuators
Technical Papers and Authors
No
Development of Sputter-deposited Ti-Ni-Cu Shape Memory P 68
Alloy Thin Films
S Miyazaki, T Hashinaga, University of Tsukuba, Japan
A Ishida, National Research Institute for Metals, Tsukuba, Japan
Anisotropy of Shape Memory Behaviour of Rolled Ti-Ni P 69
Thin Plates
K Kitamura, S Miyazaki, University of Tsukuba, Japan
M Kohl, Forschungszentrum Karlsruhe, Germany
Integration of Shape Memory Actuators in Miniature Robots P 70
G Pritschow, G Kehl, Universität Stuttgart, Germany
J Hesselbach, H Stork, Technische Universität Braunschweig, Germany
Design of a Shape Memory Actuated Gastrointestinal P 72
Intervention System (BRE2-OS79)*
D Reynaerts, J Peirs, H Van Brussel, Katholieke Universiteit Leuven,
Heverlee, Belgium
Shape Memory Actuators and Actuators P 73
based on Electro-magnetorheological Fluids
E Kibirkstis, D Gvalda, Kaunas University of Technology, Lithuania
Cycling Effect on the Shape Memory Characteristics P 74
in Sputter-deposited Ti-Ni Alloy Thin Films
K Nomura, S Miyazaki, University of Tsukuba, Japan
A Ishida, National Research Institute for Metals, Tsukuba, Japan
Procedure for the Calculation of the Geometry P 75
of a Resistance Heated NiTi-Actuator
P A Besselink, Memory Metal Holland, Enschede, The Netherlands
Page
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401
405
409
413
417
421
20
ACTUATOR 96, 5th International Conference on New Actuators, 26 - 28 June 1996, Bremen, Germany
ectromagnetic Actuators
finical Papers and Authors No Page
filectromagnetic Drives - Requirements for Modern Design 6 0 425
and Control (Review)
E Kallenbach, Technical University of Ilmenau, Germany
R Eick, Lucas Automotive GmbH, Koblenz, Germany
Electromagnetic Permanent Magnet Micromotor 6 1 429
with Integrated Micro Gear Box
K -P Kämper, W Ehrfeld, B Hagemann, H Lehr, F Michel, A Schirling,
Ch Thürigen, Th Wittig, Institut für Mikrotechnik Mainz GmbH, Germany
Path Control of a Linear Direct Drive for the 6 2 433
Submicrometer-Range
U Schuffenhauer, Technische Universität Chemnitz-Zwickau, Germany
Development of a Linear Drive System for Micropositioning 6 3 437
J Brinkemper, Lust Antriebstechnik GmbH, Lahnau, Germany
Indirect Position Measurement on Electromagnetic Actuators 6 4 441
Th Roschke, Technische Universität Dresden, Germany
Intelligent Electromechanical Servosystems 6 5 445
T Pfeufer, R Isermann, Technical University of Darmstadt, Germany
STURGEON - A Modern Design Tool P 76 449
for Electromagnetical Drives
E Kallenbach, S Spiller, F Dronsz, K Feindt, O Birli
Technical University of Ilmenau, Germany
Minimization of the Air Gap in Electro-Magnetic Systems P 77 450
for Levitation and Propulson through the Application
of High fit Winding Material
A Molenaar, H F van Beek, Delft University of Technology, The Netherlands
Simulation of Transient Magnetic Fields Using FEM P 78 454
M Dotterweich, G Szymanski, PROFI ENGINEERING SYSTEMS GmbH,
Darmstadt, Germany
KIM (Künstlicher intelligenter Muskel) P 79 458
Artificial Intelligent Muscle
A Krug, WITTENSTEIN Motion Control GmbH, Bad Mergentheim, Germany
Open-Loop Controlled Linear Drive with High Accuracy P 80 459
of Positioning
P -K Budig, TU Chemnitz, Germany
From Intelligent Actuators to Intelligent Actuation: Outline P 81 462
of ESPRIT DIAS,PRIAM and EIAMUG Projects
(ESPRIT II 2172, ESPRIT III 6188, ESPRIT 8244)*
J F Petin, B lung, G Morel, Centre de Recherche en Automatique Nancy, France
ACTUATOR 96, 5th International Conference on New Actuators, 26 - 28 June 1996, Bremen, Germany
21
Electromagnetic Actuators
Technical Papers and Authors
No
Adjustment of Micro-Optical Components by a Carefully P 82
Measured Tapping - An Intelligent Driving Method
C Siebenhaar, V Guyenot, Fraunhofer-Institut Angewandte Optik und
Feinmechanik, Jena, Germany
Design and Optimization of Lift Solenoids P 83
A T Hoang, Binder Magnete GmbH, Villingen-Schwenningen, Germany
*) Presented in cooperation with the Innovation Relay Centre North Germany *
*
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ctrlnum | (OCoLC)278212346 (DE-599)BVBBV035383498 |
format | Conference Proceeding Book |
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genre | (DE-588)1071861417 Konferenzschrift 1996 Bremen gnd-content |
genre_facet | Konferenzschrift 1996 Bremen |
id | DE-604.BV035383498 |
illustrated | Illustrated |
indexdate | 2024-07-09T21:32:34Z |
institution | BVB |
institution_GND | (DE-588)5199528-1 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-017187728 |
oclc_num | 278212346 |
open_access_boolean | |
owner | DE-91 DE-BY-TUM DE-92 |
owner_facet | DE-91 DE-BY-TUM DE-92 |
physical | 490 S. Ill., graph. Darst. |
publishDate | 1996 |
publishDateSearch | 1996 |
publishDateSort | 1996 |
publisher | AXON Technologie Consult GmbH |
record_format | marc |
spelling | Actuator 96 5th International Conference on New Actuators ; 26 - 28 June, 1996, Bremen, Germany ; conference proceedings eds.: Hubert Borgmann ... Actuator ninety-six Bremen AXON Technologie Consult GmbH 1996 490 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Actuators Congresses Electromagnetic theory Congresses Piezoelectric actuators Congresses Aktor (DE-588)4198914-4 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1996 Bremen gnd-content Aktor (DE-588)4198914-4 s DE-604 Borgmann, Hubert Sonstige oth International Conference on New Actuators 5. 1996 Bremen Sonstige (DE-588)5199528-1 oth HEBIS Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=017187728&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
spellingShingle | Actuator 96 5th International Conference on New Actuators ; 26 - 28 June, 1996, Bremen, Germany ; conference proceedings Actuators Congresses Electromagnetic theory Congresses Piezoelectric actuators Congresses Aktor (DE-588)4198914-4 gnd |
subject_GND | (DE-588)4198914-4 (DE-588)1071861417 |
title | Actuator 96 5th International Conference on New Actuators ; 26 - 28 June, 1996, Bremen, Germany ; conference proceedings |
title_alt | Actuator ninety-six |
title_auth | Actuator 96 5th International Conference on New Actuators ; 26 - 28 June, 1996, Bremen, Germany ; conference proceedings |
title_exact_search | Actuator 96 5th International Conference on New Actuators ; 26 - 28 June, 1996, Bremen, Germany ; conference proceedings |
title_full | Actuator 96 5th International Conference on New Actuators ; 26 - 28 June, 1996, Bremen, Germany ; conference proceedings eds.: Hubert Borgmann ... |
title_fullStr | Actuator 96 5th International Conference on New Actuators ; 26 - 28 June, 1996, Bremen, Germany ; conference proceedings eds.: Hubert Borgmann ... |
title_full_unstemmed | Actuator 96 5th International Conference on New Actuators ; 26 - 28 June, 1996, Bremen, Germany ; conference proceedings eds.: Hubert Borgmann ... |
title_short | Actuator 96 |
title_sort | actuator 96 5th international conference on new actuators 26 28 june 1996 bremen germany conference proceedings |
title_sub | 5th International Conference on New Actuators ; 26 - 28 June, 1996, Bremen, Germany ; conference proceedings |
topic | Actuators Congresses Electromagnetic theory Congresses Piezoelectric actuators Congresses Aktor (DE-588)4198914-4 gnd |
topic_facet | Actuators Congresses Electromagnetic theory Congresses Piezoelectric actuators Congresses Aktor Konferenzschrift 1996 Bremen |
url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=017187728&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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