Handbook of optical metrology: principles and applications
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Boca Raton [u.a.]
CRC Press
2009
|
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis Klappentext |
| Beschreibung: | XIII, 730 S. Ill., graph. Darst. |
| ISBN: | 9780849337604 |
Internformat
MARC
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| 245 | 1 | 0 | |a Handbook of optical metrology |b principles and applications |c ed. by Toru Yoshizawa |
| 264 | 1 | |a Boca Raton [u.a.] |b CRC Press |c 2009 | |
| 300 | |a XIII, 730 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
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Datensatz im Suchindex
| _version_ | 1804138672112533504 |
|---|---|
| adam_text | Contents
Preface
..............................................................................................................................................ix
Contributors
......................................................................................................................................xi
PART I Fundamentals of Optical Elements and Devices
Chapter
1
Light Sources
................................................................................................................3
Natalia Dushkina
Chapter
2
Lenses, Prisms, and Mirrors
......................................................................................85
Peter R. Hall
Chapter
3
Optoelectronic Sensors
.............................................................................................105
Motohiro Suyama
Chapter
4
Optical Devices and Optomechanical Elements
......................................................135
Akihiko Chaki and Kenji
Magara
PART
//
Fundamentals of Principles and Techniques
for Metrology
Chapter
5
Propagation of Light
.................................................................................................157
Natalia Dushkina
Chapter
6
Interferometry
..........................................................................................................191
David A. Page
Chapter? Holography
...............................................................................................................219
Giuncarlo Pedrini
Chapters Speckle Methods and Applications
..........................................................................241
Nandigana Krishna Mohan
Chapter
9
Moire Metrology
......................................................................................................263
Lianhua Jin
v
vi
Contents
Chapter
10
Optical Heterodyne Measurement Method
..............................................................281
Masao Hirano
Chapter
11
Diffraction
................................................................................................................309
Toru
Yoshizawa
Chapter
12
Light Scattering
........................................................................................................321
Lev T. Perelman
Chapter
13
Polarization
..............................................................................................................339
Michael Shribak
Chapter
14
Near-Field Optics
....................................................................................................351
Wenhao Huang,
Xi
Li, and Guoyong Zhang
Chapter
15
Length and Size
........................................................................................................365
René Schädel
PART III Practical Applications
Chapter
16
Displacement
............................................................................................................393
Akiko Hirai,
Mariko Kajima,
and Souichi
Telada
Chapter
17
Straightness and Alignment
.....................................................................................411
Ruedi
Thalmann
Chapter
18
Flatness
.....................................................................................................................423
Toshiyuki Takatsuji and Youichi
Bitou
Chapter
19
Surface Profilometry
................................................................................................437
Toru
Yoshizawa and Toshitaka Wakayama
Chapter
20
Three-Dimensional Shape Measurement
.................................................................475
Frank Chen, Gordon M. Brown, and Mumin Song
Chapter
21
Fringe Analysis
........................................................................................................499
Jun-ichi
Kato
Contents
vii
Chapter
22
Photogrammetry
.......................................................................................................511
Nobuo Kochi
Chapter
23
Optical Methods in Solid Mechanics
.......................................................................531
Anand Asundi
Chapter
24
Optical Methods in Flow Measurement
...................................................................551
Sang
Joon Lee
Chapter
25
Polarimetry
...............................................................................................................573
Baoliang Wang
Chapter
26
Birefringence Measurement
.....................................................................................615
Yukitoshi Otani
Chapter
27
Ellipsometry
.............................................................................................................641
Hiroyuki Fujiwara
Chapter
28
Optical Thin Film and Coatings
..............................................................................661
Cheng-Chung Lee and Shigetaro Ogura
Chapter
29
Film Surface and Thickness Profilometry
...............................................................677
Katsuichi Kitagawa
Chapter
30
On-Machine Measurements
.....................................................................................693
Takashi Nomura and Kazuhide Kamiya
Index
..........................................................................................................................................715
OPTICS
Handbook of
OPTICAL METROLOGY
Principles and Applications
The field of optical metrology offers a wealth of both practical and theoretical accomplishments,
and can cite any number of academic papers recording such. However, while several books covering
specific areas of optical metrology do exist, until the pages herein were researched, written, and
compiled, the field lacked a comprehensive handbook, one providing an overview of optical metrology
that covers practical applications as well as fundamentals.
Carefully designed to make information accessible to beginners without sacrificing academic rigor,
the Handbook of Optical Metrology: Principles and Applications discusses fundamental principles
and techniques before exploring practical applications. Comprehensive and authoritative, the first
handbook in the field
—
Covers fundamentals of light sources, lenses, prisms, and mirrors, as well as optoelectronic
sensors, optical devices, and optomechanical elements
Discusses
interferometry,
holography, and speckle methods and applications
Explains moire metrology and the optical heterodyne measurement method
Delves into the specifics of diffraction, scattering, polarization, and near-field optics
Considers applications for measuring length and size, displacement, straightness and
parallelism, flatness, and three-dimensional shapes
Explores advanced methods such as fringe analysis, photogrammetry, polarimetry, birefringence
measurement, and ellipsometry
Discusses advances in optical thin film and coatings, and film surface and thickness profilometry
With contributions from veterans in the field, as well as from up-and-coming researchers, the
Handbook offers
30
substantial and well-referenced chapters. In addition to the introductory matter,
forward-thinking descriptions are included in every chapter, which makes this a valuable reference
for all those involved with optical metrology.
|
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| indexdate | 2024-07-09T21:31:54Z |
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| isbn | 9780849337604 |
| language | English |
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| spelling | Handbook of optical metrology principles and applications ed. by Toru Yoshizawa Boca Raton [u.a.] CRC Press 2009 XIII, 730 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Optical measurements Handbooks, manuals, etc Metrology Handbooks, manuals, etc Optische Messung (DE-588)4121429-8 gnd rswk-swf Metrologie (DE-588)4169749-2 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Optische Messung (DE-588)4121429-8 s DE-604 Metrologie (DE-588)4169749-2 s Yoshizawa, Tôru Sonstige oth Digitalisierung UB Bayreuth application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=017155510&sequence=000003&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis Digitalisierung UB Bayreuth application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=017155510&sequence=000004&line_number=0002&func_code=DB_RECORDS&service_type=MEDIA Klappentext |
| spellingShingle | Handbook of optical metrology principles and applications Optical measurements Handbooks, manuals, etc Metrology Handbooks, manuals, etc Optische Messung (DE-588)4121429-8 gnd Metrologie (DE-588)4169749-2 gnd |
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| title | Handbook of optical metrology principles and applications |
| title_auth | Handbook of optical metrology principles and applications |
| title_exact_search | Handbook of optical metrology principles and applications |
| title_full | Handbook of optical metrology principles and applications ed. by Toru Yoshizawa |
| title_fullStr | Handbook of optical metrology principles and applications ed. by Toru Yoshizawa |
| title_full_unstemmed | Handbook of optical metrology principles and applications ed. by Toru Yoshizawa |
| title_short | Handbook of optical metrology |
| title_sort | handbook of optical metrology principles and applications |
| title_sub | principles and applications |
| topic | Optical measurements Handbooks, manuals, etc Metrology Handbooks, manuals, etc Optische Messung (DE-588)4121429-8 gnd Metrologie (DE-588)4169749-2 gnd |
| topic_facet | Optical measurements Handbooks, manuals, etc Metrology Handbooks, manuals, etc Optische Messung Metrologie Aufsatzsammlung |
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