Principles and practice of variable pressure, environmental scanning electron microscopy (VP-ESEM):
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| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Chichester, West Sussex, United Kingdom [u.a.]
Wiley
2008
|
| Edition: | 1. publ. |
| Subjects: | |
| Online Access: | Inhaltsverzeichnis |
| Item Description: | Includes bibliographical references and index |
| Physical Description: | XII, 221 S. Ill., graph. Darst. |
| ISBN: | 9780470065402 |
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MARC
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| 100 | 1 | |a Stokes, Debbie J. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Principles and practice of variable pressure, environmental scanning electron microscopy (VP-ESEM) |c Debbie J. Stokes |
| 250 | |a 1. publ. | ||
| 264 | 1 | |a Chichester, West Sussex, United Kingdom [u.a.] |b Wiley |c 2008 | |
| 300 | |a XII, 221 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 500 | |a Includes bibliographical references and index | ||
| 650 | 4 | |a Scanning electron microscopy | |
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| 999 | |a oai:aleph.bib-bvb.de:BVB01-017151198 | ||
Record in the Search Index
| _version_ | 1804138665901817856 |
|---|---|
| adam_text | Contents
Preface
xi
1
A Brief Historical Overview
1
1.1
Scanning Electron Microscopy
1
1.1.1
The Beginnings
1
1.1.2
The Need for Added Capabilities
3
1.2
The Development of Imaging in a Gas Environment
6
1.2.1
Overcoming the Limits of Conventional
SEM 6
1.2.2
Leaps and Bounds
9
2
Principles of
SEM 17
2.1
Introduction
17
2.1.1
Why Use An Electron Beam?
17
2.1.2
The
SEM
Column
19
2.1.3
Why Do We Need a Vacuum System?
19
2.2
Electron Sources
20
2.2.1
Thermionic Emission Sources
21
2.2.2
Field Emission Sources
22
2.3
Electron Optics
23
2.3.1
Lenses
23
2.3.2
Lens Aberrations
26
2.4
Signals and Detection
31
2.4.1
Primary Electrons and the Interaction Volume
33
2.4.2
Backscattered Electrons
39
2.4.3
Secondary Electrons
41
2.4.4
X-ray Radiation
45
2.4.5
Cathodoluminescence
47
2.5
Practical Aspects of Electron Beam Irradiation
48
2.5.1
Radiation Damage
48
CONTENTS
2.5.2
Minimising Specimen Charging
-
Low-Voltage
SEM
50
2.5.3
Increasing Surface and Bulk Conductivities
51
2.6 SEM in
Operation
53
2.6.1
Building Up an Image
53
2.6.2
Magnification
53
2.6.3
Signal-to-Noise Ratio
54
2.6.4
Contrast
55
2.6.5
Adjusting the Contrast
56
2.6.6
Resolution
57
2.6.7
Depth of Field
59
2.6.8
Image Capture
60
General Principles of VP-ESEM: Utilising a Gas
63
3.1
Introduction
63
3.2
VP-ESEM Instrumentation
64
3.2.1
Typical Features
64
3.2.2
Primary Electron Scattering in VP-ESEM
-
the
General Case
65
3.2.3
Units of Pressure
68
33
Signal Generation in a Gas
68
3.3.1
Introduction
68
3.3.2
Direct Collection of Electrons and Ions
69
3.3.3
Collection of Photons
-
the Gas Luminescence
Signal
74
3.3.4
Detecting Indirect Electron and Ion Currents
78
3.4
Imaging with Water Vapour
81
3.4.1
Introduction
81
3.4.2
Thermodynamic Equilibria
81
3.4.3
Nonequilibrium Conditions
86
3.4.4
Practicalities of Stabilising
Hydrated
Specimens
87
Imaging and Analysis in VP-ESEM: The Influence of a Gas
93
4.1
Introduction
93
4.2
Background to Theoretical Calculations
94
4.2.1
Calculating the Mean Free Paths of Primary Elec¬
trons
94
4.2.2
Calculating Pressure-Dependent Variables
94
4.2.3
Estimating the Useful Primary Electron Current
95
4.3
Which Gas?
98
4.3.1
Introduction
98
CONTENTS
ix
4.3.2
Usefulness of the Gas
-
Experimental Conditions
98
4.3.3
Ionisation
and Excitation for Different Gases
99
4.3.4
Scattering of the Primary Electron Beam in Differ¬
ent Gases
101
4.4
Exploring the Gas Path Length
106
4.4.1
Introduction
106
4.4.2
Influence of GPL on the Skirt Radius
107
4.4.3
Gas Path Length and Useful Primary Electron
Beam Current
108
4.4.4
Constraints on Reducing the Gas Path Length
109
4.4.5
Separating Gas Path Length from Working Dis¬
tance 111
4.5
How Much Gas?
112
4.5.1
Introduction
112
4.5.2
Scattering of Primary Electrons as a Function of
Pressure
114
4.6
X-ray Microanalysis in VP-ESEM
121
4.6.1
Introduction
121
4.6.2
Effects of Chamber Gas on X-ray Signals
121
4.6.3
Considerations for Minimising the Effects of the
Gas
123
4.6.4
Post-Acquisition Methods to Correct for Scatter¬
ing
126
5
Imaging Uncoated Specimens in the VP-ESEM
131
5.1
Introduction
131
5.2
Electronic Structure
132
5.2.1
The Energy Level Diagram
132
5.2.2
Conductors, Semiconductors and Insulators
133
5.3
Factors Affecting Secondary Electron Emission
135
5.3.1
Transport of Excited Electrons
135
5.3.2
Escape of Excited Electrons
137
5.4
The Influence of the Specimen on the System
137
5.4.1
The Effect of Charging
-
the General Case
137
5.4.2
Measuring Surface Potential
141
5.4.3
Conductive, Electrically Grounded Bulk Materials
141
5.4.4
Conductive, Electrically Isolated Materials
142
5.4.5
Nonconductive, Uncoated Materials
143
5.5
Time- and Temperature-Dependent Effects
145
5.5.1
Introduction
145
5.5.2
Conductivity and Some Time-Dependent Effects
145
x
CONTENTS
5.5.3
Charge
Traps and Thermal Effects
150
5.6
Imaging Soft Materials
151
5.6.1
Introduction
151
5.6.2
Choosing an Appropriate Primary Beam Energy
152
5.6.3
Radiation Damage
156
5.7
Effects of Ions on Imaging
158
5.7.1
Introduction
158
5.7.2
Consideration of the Concentration of Positive
Ions
158
5.7.3
Ion Mobility Effects
159
5.7.4
An Additional Surface Potential
161
5.7.5
Electron-Ion Recombination and Signal Scaveng¬
ing
162
5.7.6
Combating Excess Ions
163
5.8
Imaging with a Gas: Summary
164
6
A Lab in a Chamber
-
in situ Methods in VP-ESEM and Other
Applications
169
6.1
Introduction
169
6.2
Nanocharacterisation of Insulating Materials
170
6.2.1
High-Resolution Imaging
170
6.2.2
Anti-Contamination in the VP-ESEM
171
6.2.3
Nanometrology
172
6.2.4
Utilising Novel Contrast Mechanisms
173
6.2.5
Transmitted Electron Signals
-
STEM and Wet
STEM
178
6.3
In situ Experiments
181
6.3.1
Deformation and Failure
181
6.3.2
Low-Temperature Experiments
182
6.3.3
High-Temperature Experiments
186
6.3.4
Condensation and Evaporation of Water
189
6.3.5
Processes Using Electron Beam Gas Chemistry in
the VP-ESEM
194
6.3.6
High-Pressure Experiments
196
6.4
Other Applications
198
6.4.1
Introduction
198
6.4.2
Biological Specimens
198
6.4.3
Liquids and Soft Materials
202
6.4.4
Hard/Soft Composites and Hard Materials
204
Index
215
|
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| author_facet | Stokes, Debbie J. |
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| dewey-search | 502.8/25 |
| dewey-sort | 3502.8 225 |
| dewey-tens | 500 - Natural sciences and mathematics |
| discipline | Allgemeine Naturwissenschaft Physik |
| edition | 1. publ. |
| format | Book |
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| illustrated | Illustrated |
| indexdate | 2024-07-09T21:31:48Z |
| institution | BVB |
| isbn | 9780470065402 |
| language | English |
| lccn | 2008029099 |
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| physical | XII, 221 S. Ill., graph. Darst. |
| publishDate | 2008 |
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| publisher | Wiley |
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| spelling | Stokes, Debbie J. Verfasser aut Principles and practice of variable pressure, environmental scanning electron microscopy (VP-ESEM) Debbie J. Stokes 1. publ. Chichester, West Sussex, United Kingdom [u.a.] Wiley 2008 XII, 221 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Includes bibliographical references and index Scanning electron microscopy Rasterelektronenmikroskopie (DE-588)4048455-5 gnd rswk-swf Rasterelektronenmikroskopie (DE-588)4048455-5 s DE-604 Digitalisierung UB Bayreuth application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=017151198&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Stokes, Debbie J. Principles and practice of variable pressure, environmental scanning electron microscopy (VP-ESEM) Scanning electron microscopy Rasterelektronenmikroskopie (DE-588)4048455-5 gnd |
| subject_GND | (DE-588)4048455-5 |
| title | Principles and practice of variable pressure, environmental scanning electron microscopy (VP-ESEM) |
| title_auth | Principles and practice of variable pressure, environmental scanning electron microscopy (VP-ESEM) |
| title_exact_search | Principles and practice of variable pressure, environmental scanning electron microscopy (VP-ESEM) |
| title_full | Principles and practice of variable pressure, environmental scanning electron microscopy (VP-ESEM) Debbie J. Stokes |
| title_fullStr | Principles and practice of variable pressure, environmental scanning electron microscopy (VP-ESEM) Debbie J. Stokes |
| title_full_unstemmed | Principles and practice of variable pressure, environmental scanning electron microscopy (VP-ESEM) Debbie J. Stokes |
| title_short | Principles and practice of variable pressure, environmental scanning electron microscopy (VP-ESEM) |
| title_sort | principles and practice of variable pressure environmental scanning electron microscopy vp esem |
| topic | Scanning electron microscopy Rasterelektronenmikroskopie (DE-588)4048455-5 gnd |
| topic_facet | Scanning electron microscopy Rasterelektronenmikroskopie |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=017151198&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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