Handbook of silicon wafer cleaning technology:
Gespeichert in:
| Format: | Elektronisch E-Book |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Norwich, NY
William Andrew
2008
|
| Ausgabe: | 2nd ed. |
| Schriftenreihe: | Materials science & process technology series
|
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Beschreibung: | Includes bibliographical references and index |
| Beschreibung: | 1 Online-Ressource (xxvi, 718 p.) ill. |
| ISBN: | 9780815515548 0815515545 9780815517733 |
Internformat
MARC
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| 245 | 1 | 0 | |a Handbook of silicon wafer cleaning technology |c edited by Karen A. Reinhardt, Werner Kern |
| 246 | 1 | 3 | |a Silicon wafer cleaning technology |
| 250 | |a 2nd ed. | ||
| 264 | 1 | |a Norwich, NY |b William Andrew |c 2008 | |
| 300 | |a 1 Online-Ressource (xxvi, 718 p.) |b ill. | ||
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| 490 | 0 | |a Materials science & process technology series | |
| 500 | |a Includes bibliographical references and index | ||
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| 700 | 1 | |a Reinhardt, Karen A. |e Sonstige |4 oth | |
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Datensatz im Suchindex
| _version_ | 1806055217368662016 |
|---|---|
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| bvnumber | BV035285303 |
| callnumber-first | T - Technology |
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| callnumber-search | TK7871.85 |
| callnumber-sort | TK 47871.85 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | ZN 4150 |
| collection | ZDB-10-ESC ZDB-10-CHE |
| ctrlnum | (OCoLC)316302116 (DE-599)BVBBV035285303 |
| dewey-full | 621.3815/2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/2 |
| dewey-search | 621.3815/2 |
| dewey-sort | 3621.3815 12 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | 2nd ed. |
| format | Electronic eBook |
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| id | DE-604.BV035285303 |
| illustrated | Illustrated |
| indexdate | 2024-07-31T01:14:34Z |
| institution | BVB |
| isbn | 9780815515548 0815515545 9780815517733 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-017090449 |
| oclc_num | 316302116 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM |
| owner_facet | DE-91 DE-BY-TUM |
| physical | 1 Online-Ressource (xxvi, 718 p.) ill. |
| psigel | ZDB-10-ESC ZDB-10-CHE |
| publishDate | 2008 |
| publishDateSearch | 2008 |
| publishDateSort | 2008 |
| publisher | William Andrew |
| record_format | marc |
| series2 | Materials science & process technology series |
| spelling | Handbook of silicon wafer cleaning technology edited by Karen A. Reinhardt, Werner Kern Silicon wafer cleaning technology 2nd ed. Norwich, NY William Andrew 2008 1 Online-Ressource (xxvi, 718 p.) ill. txt rdacontent c rdamedia cr rdacarrier Materials science & process technology series Includes bibliographical references and index Silicon-on-insulator technology SOI-Technik (DE-588)4128029-5 gnd rswk-swf Oberflächenreinigung (DE-588)4204243-4 gnd rswk-swf Wafer (DE-588)4294605-0 gnd rswk-swf SOI-Technik (DE-588)4128029-5 s Wafer (DE-588)4294605-0 s Oberflächenreinigung (DE-588)4204243-4 s 1\p DE-604 Reinhardt, Karen A. Sonstige oth Kern, Werner Sonstige oth http://www.knovel.com/web/portal/browse/display?_EXT_KNOVEL_DISPLAY_bookid=2225 Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Handbook of silicon wafer cleaning technology Silicon-on-insulator technology SOI-Technik (DE-588)4128029-5 gnd Oberflächenreinigung (DE-588)4204243-4 gnd Wafer (DE-588)4294605-0 gnd |
| subject_GND | (DE-588)4128029-5 (DE-588)4204243-4 (DE-588)4294605-0 |
| title | Handbook of silicon wafer cleaning technology |
| title_alt | Silicon wafer cleaning technology |
| title_auth | Handbook of silicon wafer cleaning technology |
| title_exact_search | Handbook of silicon wafer cleaning technology |
| title_full | Handbook of silicon wafer cleaning technology edited by Karen A. Reinhardt, Werner Kern |
| title_fullStr | Handbook of silicon wafer cleaning technology edited by Karen A. Reinhardt, Werner Kern |
| title_full_unstemmed | Handbook of silicon wafer cleaning technology edited by Karen A. Reinhardt, Werner Kern |
| title_short | Handbook of silicon wafer cleaning technology |
| title_sort | handbook of silicon wafer cleaning technology |
| topic | Silicon-on-insulator technology SOI-Technik (DE-588)4128029-5 gnd Oberflächenreinigung (DE-588)4204243-4 gnd Wafer (DE-588)4294605-0 gnd |
| topic_facet | Silicon-on-insulator technology SOI-Technik Oberflächenreinigung Wafer |
| url | http://www.knovel.com/web/portal/browse/display?_EXT_KNOVEL_DISPLAY_bookid=2225 |
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