APA (7th ed.) Citation

(2007). Microlithography: Science and technology (2. ed.). CRC Press.

Chicago Style (17th ed.) Citation

Microlithography: Science and Technology. 2. ed. Boca Raton, Fla. [u.a.]: CRC Press, 2007.

MLA (9th ed.) Citation

Microlithography: Science and Technology. 2. ed. CRC Press, 2007.