Verfügbarkeit: Solid state gas sensing

Solid state gas sensing:

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Bibliographische Detailangaben
Weitere Verfasser:	Comini, Elisabetta (HerausgeberIn)
Format:	Buch
Sprache:	English
Veröffentlicht:	New York, NY Springer 2009
Schlagworte:	Gassensor
Online-Zugang:	Inhaltsverzeichnis Klappentext
Beschreibung:	XV, 337 S. Ill., graph. Darst.
ISBN:	9780387096643

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Datensatz im Suchindex

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adam_text	Contents 1 Micro-Fabrication of Gas Sensors ........................... 1 Jan Spannhake. Andreas Helwig. Olaľ Schulz, and Gerhard Müller 1.1 Introduction ...................................... 1 1.2 Gas Sensors and M EMS Miniaturization Techniques ....................................... З 1.2.1 Silicon as a Sensor Material .................... 3 1.2.2 Thermal Sensors and Actuators ................. 4 1.2.3 Thermal Microstructures ....................... 6 1.3 Specific Sensor Examples ............................ 11 1.3.1 Heat Conductivity Sensors ..................... 12 1.3.2 Metal-Oxide-Based Gas Sensors ................. 16 1.3.3 Field-Elïect Gas Sensors ....................... 19 1.3.4 Thermal Infrared Emitters ..................... 21 1.4 Gas-Sensing Microsystems ........................... 22 1.4.1 Low False-Alarm-Rate Fire Detection ............ 23 1.4.2 Air Quality Monitoring and Leak Detection ....... 27 1.5 Industrialization Issues .............................. 34 1.5.1 Initiating a System-Level Innovation ............. 34 1.5.2 Building Added-Value Lines .................... 34 1.5.3 Mastering the MEMS Challenge ................. 36 1.5.4 Cooperation Across Technical and Economic Interfaces ................................... 37 1.5.5 Creating Higher Added Value ................... 40 1.6 Conclusions and Outlook ............................ 40 References ............................................. 41 2 Electrical-Based Gas Sensing ............................... 47 Elisabetta Comini. Guido Faglia and Giorgio Sberveglieri 2.1 Introduction ...................................... 47 2.2 Metal Oxide Semiconductor Surfaces .................. 49 2.2.1 Geometric Structures .......................... 49 2.2.2 Electronic Structures .......................... 50 Contents 2.3 Electrical Properties of Metal Oxide Semiconductor Surfaces .......................................... 50 2.3.1 Semiconductor Statistics ....................... 50 2.3.2 Surface States ............................... 52 2.3.3 Surface Space Charge Region ................... 54 2.3.4 Surface Dipoles .............................. 57 2.4 Conduction Models of Metal Oxides Semiconductor ...... 58 2.4.1 Polycrystalline Materials with Large Grains ........ 60 2.4.2 Polycrystalline Materials with Small Grains ........ 61 2.4.3 Mono-crystalline Materials ..................... 63 2.5 Adsorption over Metal Oxide Semiconductor Surfaces ..... 65 2.5.1 Physical and Chemical Adsorption ............... 65 2.5.2 Surface Reactions Towards Electrical Properties .... 67 2.5.3 Catalysts and Promoters ....................... 69 2.6 Deposition Techniques .............................. 70 2.6.1 Three-Dimensional Nanostructures .............. 70 2.6.2 Two-Dimensional Nanostructures ............... 71 2.6.3 One-Dimensional Materials .................... 80 2.7 Conductometric Sensor Fabrication ................... 84 2.7.1 Substrate and Heater .......................... 84 2.7.2 Electrical Contacts ............................ 88 2.7.3 Heating Treatments ........................... 89 2.7.4 Dopings. Catalysts and Filters .................. 90 2.8 Transduction Principles and Related Novel Devices ....... 92 2.8.1 DC Resistance ............................... 92 2.8.2 AC Impedance ............................... 94 2.8.3 Response Photoactivation ...................... 95 2.9 Conclusions and Outlook ............................ 99 References ............................................. 99 Capacitive-Type Relative Humidity Sensor with Hydrophobie Polymer Films .......................................... 109 Yoshihiko Sadaoka 3.1 Introduction ...................................... 109 3.2 Fundamental Aspects ............................... 110 3.2.1 Sorption Isotherms of Polymers ................. 110 3.2.2 Water Sorption Behavior of Polymers ............ Ill 3.2.3 Effects of the Sorbed Water on the Dielectric Properties ................................... Ill 3.3 Characterization of Polymers ......................... 113 3.3.1 Sorption Isotherms ........................... 113 3.3.2 FT IR Measurement .......................... 115 3.3.3 Solvatochromism ............................. 117 3.3.4 Capacitance Changes with Water Sorption......... 120 3.3.5 Cross-Linked Polvmer ......................... 124 Contents 3.4 Humidity-Sensors-Based Hydrophobie Polymer Thin Films....................................... 130 3.4.1 Poly-Methylmethacrylate-Based Humidity Sensor..................................... 131 3.4.2 Characteristics of Cross-Linked PMMA-Based Sensor..................................... 133 3.4.3 Polysulfone-based Sensor...................... 136 3.4.4 Acetylene-Terminated Polyimide-based Sensor..... 138 3.4.5 Cross-Lined Fluorinated Polyimide-Based Sensor ... 143 3.4.6 Improvements Using MEMS Technology......... 145 References ............................................. 149 FET Gas-Sensing Mechanism, Experimental and Theoretical Studies ................................................ 153 Anita Lloyd Spetz, Magnus Skoglundh. and Lars Ojamäe 4.1 Introduction ...................................... 153 4.2 Brief Summary of the Detection Mechanism of FET Devices .................................... 154 4.3 UHV Studies of FET Surface Reactions ................ 157 4.4 ТЕМ and SËM Studies of the Nanostructure of FET Sensing Layers .............................. 160 4.5 Mass Spectrometry for Atmospheric Pressure Studies ...... 161 4.6 The Scanning Light Pulse Technology .................. 162 4.7 DRIFT Spectroscopy for In Situ Studies of Adsorbates .... 163 4.8 Atomistic Modelling of Chemical Reactions on FET Sensor Surfaces ............................. 168 4.9 Nanoparticles as Sensing Layers in FET Devices ......... 171 4.10 Summary and Outlook .............................. 173 References ............................................. 174 Solid-State Electrochemical Gas Sensing ...................... 181 Norio Miura, Perumal Elumalai. Vladimir V. Plashnitsa. Taro Ueda. Ryotaro Warna, and Masahiro Utiyama 5.1 Introduction ...................................... 181 5.2 Mixed-Potential-Type Sensors ........................ 185 5.2.1 High-Temperature-Type NOx Sensors ............ 185 5.2.2 Improvement in NO; Sensitivity by Additives ...... 189 5.2.3 Hydrocarbon (CH,, or CH4) Sensors ............. 191 5.2.4 Use of Nanostructured NiO-Based Materials ....... 192 5.2.5 Nanosized Au Thin-Layer for Sensing Electrode .... 196 5.3 Amperometric Sensors .............................. 198 5.4 Impedancemetric Sensors ............................ 200 5.4.1 Sensing of Various Gases in ppm Level ........... 200 5.4.2 Environmental Monitoring of C,Hf, in ppb Level ................ ...................... 201 Contents 5.5 Solid-State Reference Electrode ....................... 204 5.6 Conclusions and Future Prospective ................... 205 References ............................................. 206 Optical Gas Sensing ...................................... 209 Папа Cacciari and Giancarlo С Righini 6.1 Introduction ...................................... 209 6.2 Spectroscopic Detection Schemes ...................... 210 6.3 Ellipsometry ...................................... 213 6.4 Surface Plasmon Resonance .......................... 216 6.5 Guided-Wave Configurations for Gas Sensing ........... 221 6.5.1 Integrated Optical SPR Sensors ................. 223 6.5.2 Fiber Optic SPR Sensors ....................... 223 6.5.3 Conventional and Microstructured Fibers for Gas Sensing ..................................... 225 6.6 Conclusions ...................................... 229 References ............................................. 231 Thermometric Gas Sensing ................................. 237 István Bársony. Csaba Dücsű and Péter Fürjes 7.1 Detection of Combustible Gases ...................... 237 7.1.1 Combustion ................................. 237 7.1.2 Thermal Considerations during Combustion ....... 238 7.1.3 Catalysis .................................... 239 7.1.4 Explosive Mixtures ........................... 240 7.2 Catalytic Sensing .................................. 241 7.2.1 Pellistors ................................... 242 7.2.2 Microcalorimcters in Enzymatic Reactions ........ 248 7.3 Thermal Conductivity Sensors ........................ 249 7.4 Calorimetrie Sensors Measuring Adsorption Desorption Enthalpy ......................................... 251 7.5 MEMS and Silicon Components ...................... 251 7.5.1 Thermal Considerations ....................... 252 7.5.2 Temperature Readout ......................... 254 7.5.3 Integrated Calorimetrie Sensors ................. 256 7.6 Sensor Arrays and Electronic Noses ................... 257 References ............................................. 259 Acoustic Wave Gas and Vapor Sensors ....................... 261 Samuel J. Ippolito. Adrian Trinchi. David A. Powell. and Wojtek Wlodarski 8.1 Introduction ...................................... 261 8.1.1 Acoustic Waves in Elastic Media ................ 263 8.1.2 Advantages of Acoustic-Wave-Based Gas-Phase Sensors ..................................... 266 Contents xi 8.2 Thickness Shear Mode (TSM)-Based Gas Sensors ........ 267 8.2.1 Quartz Crystal Microbalance (QCM)-Based Gas Sensors ..................................... 268 8.2.2 Thin-Film Resonator (TFR)-Based Gas Sensors .... 276 8.3 Surface Acoustic Wave (SAWJ-Based Gas Sensors ........ 282 8.3.1 Conventional SAW Gas Sensors ................. 285 8.3.2 Multi-Layered SAW Gas Sensors ................ 286 8.3.3 Gas and Vapor Sensitivity ...................... 286 8.3.4 SAW Device Gas Sensor Performance ............ 291 8.4 Concluding Remarks ............................... 296 References ............................................. 296 9 Cantilever-Based Gas Sensing .............................. 305 Hans Peter Lang 9.1 Introduction to Microcantilcver-Based Sensing ........... 305 9.1.1 Early Approaches to Mechanical Sensing .......... 305 9.1.2 Cantilever Sensors ............................ 306 9.1.3 Deflection Measurement ....................... 307 9.2 Modes of Operation ................................ 310 9.2.1 Static Mode ................................. 310 9.2.2 Dynamic Mode .............................. 311 9.3 Functionalization .................................. 312 9.4 Example of an Optical Beam-Deflection Setup ........... 313 9.4.1 General Description .......................... 313 9.4.2 Cantilever-Based Electronic Nose Application ...... 314 9.5 Applications of Cantilever-Based Gas Sensors ........... 316 9.5.1 Gas Sensing ................................. 316 9.5.2 Chemical Vapor Detection ..................... 318 9.5.3 Explosives Detection .......................... 319 9.5.4 Gas Pressure and Flow Sensing .................. 321 9.6 Other Techniques .................................. 322 9.6.1 Metal Oxide Gas Sensors ...................... 322 9.6.2 Quartz Crystal Microbalance ................... 323 9.6.3 Conducting Poh mer Sensors .................... 323 9.6.4 Surface Acoustic Waves ....................... 323 9.6.5 Field Effect Transistor Sensors Devices ........... 324 References ............................................. 3-5 Index ..................................................... 329 Elisabetta Comini Guido Faglia Giorgio Sberveglieri Editors Solid State Gas Sensing Solid State Gas Sensing offers insight into the principles, applications, and new trends in gas sensor technology. Developments in this field are rapidly advancing due to the recent and continuing impact of nanotechnology, and this book addresses the demand for small, reliable, inexpensive and portable systems for monitoring environmental concerns, indoor air quality, food quality, and many other specific applications. Working principles, including electrical, permittivity, field effect, electrochemical, optical, thermometric and mass (both quartz and cantilever types), are discussed, making the book valuable and accessible to a variety of researchers and engineers in the field of material science.
adam_txt	Contents 1 Micro-Fabrication of Gas Sensors . 1 Jan Spannhake. Andreas Helwig. Olaľ Schulz, and Gerhard Müller 1.1 Introduction . 1 1.2 Gas Sensors and M EMS Miniaturization Techniques . З 1.2.1 Silicon as a Sensor Material . 3 1.2.2 Thermal Sensors and Actuators . 4 1.2.3 Thermal Microstructures . 6 1.3 Specific Sensor Examples . 11 1.3.1 Heat Conductivity Sensors . 12 1.3.2 Metal-Oxide-Based Gas Sensors . 16 1.3.3 Field-Elïect Gas Sensors . 19 1.3.4 Thermal Infrared Emitters . 21 1.4 Gas-Sensing Microsystems . 22 1.4.1 Low False-Alarm-Rate Fire Detection . 23 1.4.2 Air Quality Monitoring and Leak Detection . 27 1.5 Industrialization Issues . 34 1.5.1 Initiating a System-Level Innovation . 34 1.5.2 Building Added-Value Lines . 34 1.5.3 Mastering the MEMS Challenge . 36 1.5.4 Cooperation Across Technical and Economic Interfaces . 37 1.5.5 Creating Higher Added Value . 40 1.6 Conclusions and Outlook . 40 References . 41 2 Electrical-Based Gas Sensing . 47 Elisabetta Comini. Guido Faglia and Giorgio Sberveglieri 2.1 Introduction . 47 2.2 Metal Oxide Semiconductor Surfaces . 49 2.2.1 Geometric Structures . 49 2.2.2 Electronic Structures . 50 Contents 2.3 Electrical Properties of Metal Oxide Semiconductor Surfaces . 50 2.3.1 Semiconductor Statistics . 50 2.3.2 Surface States . 52 2.3.3 Surface Space Charge Region . 54 2.3.4 Surface Dipoles . 57 2.4 Conduction Models of Metal Oxides Semiconductor . 58 2.4.1 Polycrystalline Materials with Large Grains . 60 2.4.2 Polycrystalline Materials with Small Grains . 61 2.4.3 Mono-crystalline Materials . 63 2.5 Adsorption over Metal Oxide Semiconductor Surfaces . 65 2.5.1 Physical and Chemical Adsorption . 65 2.5.2 Surface Reactions Towards Electrical Properties . 67 2.5.3 Catalysts and Promoters . 69 2.6 Deposition Techniques . 70 2.6.1 Three-Dimensional Nanostructures . 70 2.6.2 Two-Dimensional Nanostructures . 71 2.6.3 One-Dimensional Materials . 80 2.7 Conductometric Sensor Fabrication . 84 2.7.1 Substrate and Heater . 84 2.7.2 Electrical Contacts . 88 2.7.3 Heating Treatments . 89 2.7.4 Dopings. Catalysts and Filters . 90 2.8 Transduction Principles and Related Novel Devices . 92 2.8.1 DC Resistance . 92 2.8.2 AC Impedance . 94 2.8.3 Response Photoactivation . 95 2.9 Conclusions and Outlook . 99 References . 99 Capacitive-Type Relative Humidity Sensor with Hydrophobie Polymer Films . 109 Yoshihiko Sadaoka 3.1 Introduction . 109 3.2 Fundamental Aspects . 110 3.2.1 Sorption Isotherms of Polymers . 110 3.2.2 Water Sorption Behavior of Polymers . Ill 3.2.3 Effects of the Sorbed Water on the Dielectric Properties . Ill 3.3 Characterization of Polymers . 113 3.3.1 Sorption Isotherms . 113 3.3.2 FT IR Measurement . 115 3.3.3 Solvatochromism . 117 3.3.4 Capacitance Changes with Water Sorption. 120 3.3.5 Cross-Linked Polvmer . 124 Contents 3.4 Humidity-Sensors-Based Hydrophobie Polymer Thin Films. 130 3.4.1 Poly-Methylmethacrylate-Based Humidity Sensor. 131 3.4.2 Characteristics of Cross-Linked PMMA-Based Sensor. 133 3.4.3 Polysulfone-based Sensor. 136 3.4.4 Acetylene-Terminated Polyimide-based Sensor. 138 3.4.5 Cross-Lined Fluorinated Polyimide-Based Sensor . 143 3.4.6 Improvements Using MEMS Technology. 145 References . 149 FET Gas-Sensing Mechanism, Experimental and Theoretical Studies . 153 Anita Lloyd Spetz, Magnus Skoglundh. and Lars Ojamäe 4.1 Introduction . 153 4.2 Brief Summary of the Detection Mechanism of FET Devices . 154 4.3 UHV Studies of FET Surface Reactions . 157 4.4 ТЕМ and SËM Studies of the Nanostructure of FET Sensing Layers . 160 4.5 Mass Spectrometry for Atmospheric Pressure Studies . 161 4.6 The Scanning Light Pulse Technology . 162 4.7 DRIFT Spectroscopy for In Situ Studies of Adsorbates . 163 4.8 Atomistic Modelling of Chemical Reactions on FET Sensor Surfaces . 168 4.9 Nanoparticles as Sensing Layers in FET Devices . 171 4.10 Summary and Outlook . 173 References . 174 Solid-State Electrochemical Gas Sensing . 181 Norio Miura, Perumal Elumalai. Vladimir V. Plashnitsa. Taro Ueda. Ryotaro Warna, and Masahiro Utiyama 5.1 Introduction . 181 5.2 Mixed-Potential-Type Sensors . 185 5.2.1 High-Temperature-Type NOx Sensors . 185 5.2.2 Improvement in NO; Sensitivity by Additives . 189 5.2.3 Hydrocarbon (CH,, or CH4) Sensors . 191 5.2.4 Use of Nanostructured NiO-Based Materials . 192 5.2.5 Nanosized Au Thin-Layer for Sensing Electrode . 196 5.3 Amperometric Sensors . 198 5.4 Impedancemetric Sensors . 200 5.4.1 Sensing of Various Gases in ppm Level . 200 5.4.2 Environmental Monitoring of C,Hf, in ppb Level .". 201 Contents 5.5 Solid-State Reference Electrode . 204 5.6 Conclusions and Future Prospective . 205 References . 206 Optical Gas Sensing . 209 Папа Cacciari and Giancarlo С Righini 6.1 Introduction . 209 6.2 Spectroscopic Detection Schemes . 210 6.3 Ellipsometry . 213 6.4 Surface Plasmon Resonance . 216 6.5 Guided-Wave Configurations for Gas Sensing . 221 6.5.1 Integrated Optical SPR Sensors . 223 6.5.2 Fiber Optic SPR Sensors . 223 6.5.3 Conventional and Microstructured Fibers for Gas Sensing . 225 6.6 Conclusions . 229 References . 231 Thermometric Gas Sensing . 237 István Bársony. Csaba Dücsű and Péter Fürjes 7.1 Detection of Combustible Gases . 237 7.1.1 Combustion . 237 7.1.2 Thermal Considerations during Combustion . 238 7.1.3 Catalysis . 239 7.1.4 Explosive Mixtures . 240 7.2 Catalytic Sensing . 241 7.2.1 " Pellistors" . 242 7.2.2 Microcalorimcters in Enzymatic Reactions . 248 7.3 Thermal Conductivity Sensors . 249 7.4 Calorimetrie Sensors Measuring Adsorption Desorption Enthalpy . 251 7.5 MEMS and Silicon Components . 251 7.5.1 Thermal Considerations . 252 7.5.2 Temperature Readout . 254 7.5.3 Integrated Calorimetrie Sensors . 256 7.6 Sensor Arrays and Electronic Noses . 257 References . 259 Acoustic Wave Gas and Vapor Sensors . 261 Samuel J. Ippolito. Adrian Trinchi. David A. Powell. and Wojtek Wlodarski 8.1 Introduction . 261 8.1.1 Acoustic Waves in Elastic Media . 263 8.1.2 Advantages of Acoustic-Wave-Based Gas-Phase Sensors . 266 Contents xi 8.2 Thickness Shear Mode (TSM)-Based Gas Sensors . 267 8.2.1 Quartz Crystal Microbalance (QCM)-Based Gas Sensors . 268 8.2.2 Thin-Film Resonator (TFR)-Based Gas Sensors . 276 8.3 Surface Acoustic Wave (SAWJ-Based Gas Sensors . 282 8.3.1 Conventional SAW Gas Sensors . 285 8.3.2 Multi-Layered SAW Gas Sensors . 286 8.3.3 Gas and Vapor Sensitivity . 286 8.3.4 SAW Device Gas Sensor Performance . 291 8.4 Concluding Remarks . 296 References . 296 9 Cantilever-Based Gas Sensing . 305 Hans Peter Lang 9.1 Introduction to Microcantilcver-Based Sensing . 305 9.1.1 Early Approaches to Mechanical Sensing . 305 9.1.2 Cantilever Sensors . 306 9.1.3 Deflection Measurement . 307 9.2 Modes of Operation . 310 9.2.1 Static Mode . 310 9.2.2 Dynamic Mode . 311 9.3 Functionalization . 312 9.4 Example of an Optical Beam-Deflection Setup . 313 9.4.1 General Description . 313 9.4.2 Cantilever-Based Electronic Nose Application . 314 9.5 Applications of Cantilever-Based Gas Sensors . 316 9.5.1 Gas Sensing . 316 9.5.2 Chemical Vapor Detection . 318 9.5.3 Explosives Detection . 319 9.5.4 Gas Pressure and Flow Sensing . 321 9.6 Other Techniques . 322 9.6.1 Metal Oxide Gas Sensors . 322 9.6.2 Quartz Crystal Microbalance . 323 9.6.3 Conducting Poh mer Sensors . 323 9.6.4 Surface Acoustic Waves . 323 9.6.5 Field Effect Transistor Sensors Devices . 324 References . 3-5 Index . 329 Elisabetta Comini Guido Faglia Giorgio Sberveglieri Editors Solid State Gas Sensing Solid State Gas Sensing offers insight into the principles, applications, and new trends in gas sensor technology. Developments in this field are rapidly advancing due to the recent and continuing impact of nanotechnology, and this book addresses the demand for small, reliable, inexpensive and portable systems for monitoring environmental concerns, indoor air quality, food quality, and many other specific applications. Working principles, including electrical, permittivity, field effect, electrochemical, optical, thermometric and mass (both quartz and cantilever types), are discussed, making the book valuable and accessible to a variety of researchers and engineers in the field of material science.
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isbn	9780387096643
language	English
oai_aleph_id	oai:aleph.bib-bvb.de:BVB01-016793300
oclc_num	316212314
open_access_boolean
owner	DE-703
owner_facet	DE-703
physical	XV, 337 S. Ill., graph. Darst.
publishDate	2009
publishDateSearch	2009
publishDateSort	2009
publisher	Springer
record_format	marc
spelling	Solid state gas sensing Elisabetta Comini ... ed. New York, NY Springer 2009 XV, 337 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Gassensor (DE-588)4156050-4 gnd rswk-swf Gassensor (DE-588)4156050-4 s DE-604 Comini, Elisabetta edt Erscheint auch als Online-Ausgabe 978-0-387-09665-0 Digitalisierung UB Bayreuth application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=016793300&sequence=000003&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis Digitalisierung UB Bayreuth application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=016793300&sequence=000004&line_number=0002&func_code=DB_RECORDS&service_type=MEDIA Klappentext
spellingShingle	Solid state gas sensing Gassensor (DE-588)4156050-4 gnd
subject_GND	(DE-588)4156050-4
title	Solid state gas sensing
title_auth	Solid state gas sensing
title_exact_search	Solid state gas sensing
title_exact_search_txtP	Solid state gas sensing
title_full	Solid state gas sensing Elisabetta Comini ... ed.
title_fullStr	Solid state gas sensing Elisabetta Comini ... ed.
title_full_unstemmed	Solid state gas sensing Elisabetta Comini ... ed.
title_short	Solid state gas sensing
title_sort	solid state gas sensing
topic	Gassensor (DE-588)4156050-4 gnd
topic_facet	Gassensor
url	http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=016793300&sequence=000003&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=016793300&sequence=000004&line_number=0002&func_code=DB_RECORDS&service_type=MEDIA
work_keys_str_mv	AT cominielisabetta solidstategassensing

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