Depla, D. (2008). Reactive sputter deposition. Springer.
Chicago Style (17th ed.) CitationDepla, Diederik. Reactive Sputter Deposition. Berlin [u.a.]: Springer, 2008.
MLA (9th ed.) CitationDepla, Diederik. Reactive Sputter Deposition. Springer, 2008.
Warning: These citations may not always be 100% accurate.