Dielectric films for advanced microelectronics:
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Chichester
Wiley
2008
|
| Edition: | Repr. |
| Series: | Wiley series in materials for electronic and optoelectronic applications
|
| Subjects: | |
| Online Access: | Table of contents only Contributor biographical information Publisher description Inhaltsverzeichnis |
| Item Description: | Includes bibliographical references and index |
| Physical Description: | XXII, 486 S. Ill., graph. Darst. |
| ISBN: | 0470013605 9780470013601 |
Staff View
MARC
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Record in the Search Index
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|---|---|
| adam_text | DIELECTRIC FILMS FOR ADVANCED MICROELECTRONICS / BAKLANOV, MIKHAIL :
C2007 TABLE OF CONTENTS / INHALTSVERZEICHNIS LOW AND ULTRALOW
DIELECTRIC CONSTANT FILMS PREPARED BY PLASMA-ENHANCED CHEMICAL VAPOR
DEPOSITION / A. GRILL SPIN-ON DIELECTRIC MATERIALS / GERAUD DUBOIS,
ROBERT D. MILLER, WILLI VOLKSEN POSITRON ANNIHILATION SPECTROSCOPY /
DAVID W. GIDLEY, HUA-GEN PENG, RICHARD VALLERY STRUCTURE
CHARACTERIZATION OF NANOPOROUS INTERLEVEL DIELECTRIC THIN FILMS WITH
X-RAY AND NEUTRON RADIATION / CHRISTOPHER L. SOLES ... [ET AL.]
ELLIPSOMETRIC POROSIMETRY / MIKHAIL R. BAKLANOV MECHANICAL AND TRANSPORT
PROPERTIES OF LOW-K DIELECTRICS / J. L. PLAWSKY ... [ET AL.] INTEGRATION
OF LOW-K DIELECTRIC FILMS IN DAMASCENE PROCESSES / R. J. O. M. HOOFMAN
... [ET AL.] ONO STRUCTURES AND OXYNITRIDES IN MODERN MICROELECTRONICS :
MATERIAL SCIENCE, CHARACTERIZATION AND APPLICATION / YAKOV ROIZIN,
VLADIMIR GRITSENKO MATERIAL ENGINEERING OF HIGH-K GATE DIELECTRICS /
AKIRA TORIUMI, KOJI KITA PHYSICAL CHARACTERIZATION OF ULTRA-THIN HIGH-K
DIELECTRIC / T. CONARD, H. BENDER, W. VANDERVORST ELECTRICAL
CHARACTERIZATION OF ADVANCED GATE DIELECTRICS / ROBIN DEGRAEVE ... [ET
AL.] INTEGRATION ISSUES OF HIGH-K GATE DIELECTRICS / YASUO NARA
ANISOTROPIC CONDUCTIVE FILM (ACF) FOR ADVANCED MICROELECTRONIC
INTERCONNECTS / YI LI, C. P. WONG. DIESES SCHRIFTSTUECK WURDE
MASCHINELL ERZEUGT.
|
| adam_txt |
DIELECTRIC FILMS FOR ADVANCED MICROELECTRONICS / BAKLANOV, MIKHAIL :
C2007 TABLE OF CONTENTS / INHALTSVERZEICHNIS LOW AND ULTRALOW
DIELECTRIC CONSTANT FILMS PREPARED BY PLASMA-ENHANCED CHEMICAL VAPOR
DEPOSITION / A. GRILL SPIN-ON DIELECTRIC MATERIALS / GERAUD DUBOIS,
ROBERT D. MILLER, WILLI VOLKSEN POSITRON ANNIHILATION SPECTROSCOPY /
DAVID W. GIDLEY, HUA-GEN PENG, RICHARD VALLERY STRUCTURE
CHARACTERIZATION OF NANOPOROUS INTERLEVEL DIELECTRIC THIN FILMS WITH
X-RAY AND NEUTRON RADIATION / CHRISTOPHER L. SOLES . [ET AL.]
ELLIPSOMETRIC POROSIMETRY / MIKHAIL R. BAKLANOV MECHANICAL AND TRANSPORT
PROPERTIES OF LOW-K DIELECTRICS / J. L. PLAWSKY . [ET AL.] INTEGRATION
OF LOW-K DIELECTRIC FILMS IN DAMASCENE PROCESSES / R. J. O. M. HOOFMAN
. [ET AL.] ONO STRUCTURES AND OXYNITRIDES IN MODERN MICROELECTRONICS :
MATERIAL SCIENCE, CHARACTERIZATION AND APPLICATION / YAKOV ROIZIN,
VLADIMIR GRITSENKO MATERIAL ENGINEERING OF HIGH-K GATE DIELECTRICS /
AKIRA TORIUMI, KOJI KITA PHYSICAL CHARACTERIZATION OF ULTRA-THIN HIGH-K
DIELECTRIC / T. CONARD, H. BENDER, W. VANDERVORST ELECTRICAL
CHARACTERIZATION OF ADVANCED GATE DIELECTRICS / ROBIN DEGRAEVE . [ET
AL.] INTEGRATION ISSUES OF HIGH-K GATE DIELECTRICS / YASUO NARA
ANISOTROPIC CONDUCTIVE FILM (ACF) FOR ADVANCED MICROELECTRONIC
INTERCONNECTS / YI LI, C. P. WONG. DIESES SCHRIFTSTUECK WURDE
MASCHINELL ERZEUGT. |
| any_adam_object | 1 |
| any_adam_object_boolean | 1 |
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| callnumber-search | TK7871.15.F5 |
| callnumber-sort | TK 47871.15 F5 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | ZN 3490 |
| ctrlnum | (OCoLC)552240550 (DE-599)BVBBV035048396 |
| dewey-full | 621.381 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381 |
| dewey-search | 621.381 |
| dewey-sort | 3621.381 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| discipline_str_mv | Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | Repr. |
| format | Book |
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| genre_facet | Aufsatzsammlung |
| id | DE-604.BV035048396 |
| illustrated | Illustrated |
| index_date | 2024-07-02T21:55:38Z |
| indexdate | 2024-07-09T21:21:01Z |
| institution | BVB |
| isbn | 0470013605 9780470013601 |
| language | English |
| lccn | 2006030740 |
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| physical | XXII, 486 S. Ill., graph. Darst. |
| publishDate | 2008 |
| publishDateSearch | 2008 |
| publishDateSort | 2008 |
| publisher | Wiley |
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| series2 | Wiley series in materials for electronic and optoelectronic applications |
| spelling | Dielectric films for advanced microelectronics ed. by Mikhail Baklanov ... Repr. Chichester Wiley 2008 XXII, 486 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Wiley series in materials for electronic and optoelectronic applications Includes bibliographical references and index Dielectric films Microelectronics Materials Dielektrische Schicht (DE-588)4194257-7 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Dielektrische Schicht (DE-588)4194257-7 s DE-604 Baklanov, Mikhail Sonstige oth http://www.loc.gov/catdir/toc/ecip071/2006030740.html Table of contents only http://www.loc.gov/catdir/enhancements/fy0739/2006030740-b.html Contributor biographical information http://www.loc.gov/catdir/enhancements/fy0739/2006030740-d.html Publisher description LoC Fremddatenuebernahme application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=016717114&sequence=000003&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Dielectric films for advanced microelectronics Dielectric films Microelectronics Materials Dielektrische Schicht (DE-588)4194257-7 gnd |
| subject_GND | (DE-588)4194257-7 (DE-588)4143413-4 |
| title | Dielectric films for advanced microelectronics |
| title_auth | Dielectric films for advanced microelectronics |
| title_exact_search | Dielectric films for advanced microelectronics |
| title_exact_search_txtP | Dielectric films for advanced microelectronics |
| title_full | Dielectric films for advanced microelectronics ed. by Mikhail Baklanov ... |
| title_fullStr | Dielectric films for advanced microelectronics ed. by Mikhail Baklanov ... |
| title_full_unstemmed | Dielectric films for advanced microelectronics ed. by Mikhail Baklanov ... |
| title_short | Dielectric films for advanced microelectronics |
| title_sort | dielectric films for advanced microelectronics |
| topic | Dielectric films Microelectronics Materials Dielektrische Schicht (DE-588)4194257-7 gnd |
| topic_facet | Dielectric films Microelectronics Materials Dielektrische Schicht Aufsatzsammlung |
| url | http://www.loc.gov/catdir/toc/ecip071/2006030740.html http://www.loc.gov/catdir/enhancements/fy0739/2006030740-b.html http://www.loc.gov/catdir/enhancements/fy0739/2006030740-d.html http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=016717114&sequence=000003&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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