Dielectric films for advanced microelectronics:
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Chichester
Wiley
2008
|
| Ausgabe: | Repr. |
| Schriftenreihe: | Wiley series in materials for electronic and optoelectronic applications
|
| Schlagworte: | |
| Online-Zugang: | Table of contents only Contributor biographical information Publisher description Inhaltsverzeichnis |
| Beschreibung: | Includes bibliographical references and index |
| Beschreibung: | XXII, 486 S. Ill., graph. Darst. |
| ISBN: | 0470013605 9780470013601 |
Internformat
MARC
| LEADER | 00000nam a2200000zc 4500 | ||
|---|---|---|---|
| 001 | BV035048396 | ||
| 003 | DE-604 | ||
| 005 | 20090317 | ||
| 007 | t | ||
| 008 | 080911s2008 xxkad|| |||| 00||| eng d | ||
| 010 | |a 2006030740 | ||
| 015 | |a GBA689828 |2 dnb | ||
| 020 | |a 0470013605 |c hbk. |9 0-470-01360-5 | ||
| 020 | |a 9780470013601 |9 978-0-470-01360-1 | ||
| 035 | |a (OCoLC)552240550 | ||
| 035 | |a (DE-599)BVBBV035048396 | ||
| 040 | |a DE-604 |b ger |e aacr | ||
| 041 | 0 | |a eng | |
| 044 | |a xxk |c GB | ||
| 049 | |a DE-92 |a DE-29T |a DE-634 | ||
| 050 | 0 | |a TK7871.15.F5 | |
| 082 | 0 | |a 621.381 | |
| 084 | |a ZN 3490 |0 (DE-625)157325: |2 rvk | ||
| 245 | 1 | 0 | |a Dielectric films for advanced microelectronics |c ed. by Mikhail Baklanov ... |
| 250 | |a Repr. | ||
| 264 | 1 | |a Chichester |b Wiley |c 2008 | |
| 300 | |a XXII, 486 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Wiley series in materials for electronic and optoelectronic applications | |
| 500 | |a Includes bibliographical references and index | ||
| 650 | 4 | |a Dielectric films | |
| 650 | 4 | |a Microelectronics |x Materials | |
| 650 | 0 | 7 | |a Dielektrische Schicht |0 (DE-588)4194257-7 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4143413-4 |a Aufsatzsammlung |2 gnd-content | |
| 689 | 0 | 0 | |a Dielektrische Schicht |0 (DE-588)4194257-7 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Baklanov, Mikhail |e Sonstige |4 oth | |
| 856 | 4 | |u http://www.loc.gov/catdir/toc/ecip071/2006030740.html |3 Table of contents only | |
| 856 | 4 | |u http://www.loc.gov/catdir/enhancements/fy0739/2006030740-b.html |3 Contributor biographical information | |
| 856 | 4 | |u http://www.loc.gov/catdir/enhancements/fy0739/2006030740-d.html |3 Publisher description | |
| 856 | 4 | 2 | |m LoC Fremddatenuebernahme |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=016717114&sequence=000003&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-016717114 | ||
Datensatz im Suchindex
| _version_ | 1804137986650013696 |
|---|---|
| adam_text | DIELECTRIC FILMS FOR ADVANCED MICROELECTRONICS / BAKLANOV, MIKHAIL :
C2007 TABLE OF CONTENTS / INHALTSVERZEICHNIS LOW AND ULTRALOW
DIELECTRIC CONSTANT FILMS PREPARED BY PLASMA-ENHANCED CHEMICAL VAPOR
DEPOSITION / A. GRILL SPIN-ON DIELECTRIC MATERIALS / GERAUD DUBOIS,
ROBERT D. MILLER, WILLI VOLKSEN POSITRON ANNIHILATION SPECTROSCOPY /
DAVID W. GIDLEY, HUA-GEN PENG, RICHARD VALLERY STRUCTURE
CHARACTERIZATION OF NANOPOROUS INTERLEVEL DIELECTRIC THIN FILMS WITH
X-RAY AND NEUTRON RADIATION / CHRISTOPHER L. SOLES ... [ET AL.]
ELLIPSOMETRIC POROSIMETRY / MIKHAIL R. BAKLANOV MECHANICAL AND TRANSPORT
PROPERTIES OF LOW-K DIELECTRICS / J. L. PLAWSKY ... [ET AL.] INTEGRATION
OF LOW-K DIELECTRIC FILMS IN DAMASCENE PROCESSES / R. J. O. M. HOOFMAN
... [ET AL.] ONO STRUCTURES AND OXYNITRIDES IN MODERN MICROELECTRONICS :
MATERIAL SCIENCE, CHARACTERIZATION AND APPLICATION / YAKOV ROIZIN,
VLADIMIR GRITSENKO MATERIAL ENGINEERING OF HIGH-K GATE DIELECTRICS /
AKIRA TORIUMI, KOJI KITA PHYSICAL CHARACTERIZATION OF ULTRA-THIN HIGH-K
DIELECTRIC / T. CONARD, H. BENDER, W. VANDERVORST ELECTRICAL
CHARACTERIZATION OF ADVANCED GATE DIELECTRICS / ROBIN DEGRAEVE ... [ET
AL.] INTEGRATION ISSUES OF HIGH-K GATE DIELECTRICS / YASUO NARA
ANISOTROPIC CONDUCTIVE FILM (ACF) FOR ADVANCED MICROELECTRONIC
INTERCONNECTS / YI LI, C. P. WONG. DIESES SCHRIFTSTUECK WURDE
MASCHINELL ERZEUGT.
|
| adam_txt |
DIELECTRIC FILMS FOR ADVANCED MICROELECTRONICS / BAKLANOV, MIKHAIL :
C2007 TABLE OF CONTENTS / INHALTSVERZEICHNIS LOW AND ULTRALOW
DIELECTRIC CONSTANT FILMS PREPARED BY PLASMA-ENHANCED CHEMICAL VAPOR
DEPOSITION / A. GRILL SPIN-ON DIELECTRIC MATERIALS / GERAUD DUBOIS,
ROBERT D. MILLER, WILLI VOLKSEN POSITRON ANNIHILATION SPECTROSCOPY /
DAVID W. GIDLEY, HUA-GEN PENG, RICHARD VALLERY STRUCTURE
CHARACTERIZATION OF NANOPOROUS INTERLEVEL DIELECTRIC THIN FILMS WITH
X-RAY AND NEUTRON RADIATION / CHRISTOPHER L. SOLES . [ET AL.]
ELLIPSOMETRIC POROSIMETRY / MIKHAIL R. BAKLANOV MECHANICAL AND TRANSPORT
PROPERTIES OF LOW-K DIELECTRICS / J. L. PLAWSKY . [ET AL.] INTEGRATION
OF LOW-K DIELECTRIC FILMS IN DAMASCENE PROCESSES / R. J. O. M. HOOFMAN
. [ET AL.] ONO STRUCTURES AND OXYNITRIDES IN MODERN MICROELECTRONICS :
MATERIAL SCIENCE, CHARACTERIZATION AND APPLICATION / YAKOV ROIZIN,
VLADIMIR GRITSENKO MATERIAL ENGINEERING OF HIGH-K GATE DIELECTRICS /
AKIRA TORIUMI, KOJI KITA PHYSICAL CHARACTERIZATION OF ULTRA-THIN HIGH-K
DIELECTRIC / T. CONARD, H. BENDER, W. VANDERVORST ELECTRICAL
CHARACTERIZATION OF ADVANCED GATE DIELECTRICS / ROBIN DEGRAEVE . [ET
AL.] INTEGRATION ISSUES OF HIGH-K GATE DIELECTRICS / YASUO NARA
ANISOTROPIC CONDUCTIVE FILM (ACF) FOR ADVANCED MICROELECTRONIC
INTERCONNECTS / YI LI, C. P. WONG. DIESES SCHRIFTSTUECK WURDE
MASCHINELL ERZEUGT. |
| any_adam_object | 1 |
| any_adam_object_boolean | 1 |
| building | Verbundindex |
| bvnumber | BV035048396 |
| callnumber-first | T - Technology |
| callnumber-label | TK7871 |
| callnumber-raw | TK7871.15.F5 |
| callnumber-search | TK7871.15.F5 |
| callnumber-sort | TK 47871.15 F5 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | ZN 3490 |
| ctrlnum | (OCoLC)552240550 (DE-599)BVBBV035048396 |
| dewey-full | 621.381 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381 |
| dewey-search | 621.381 |
| dewey-sort | 3621.381 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| discipline_str_mv | Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | Repr. |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02017nam a2200493zc 4500</leader><controlfield tag="001">BV035048396</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20090317 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">080911s2008 xxkad|| |||| 00||| eng d</controlfield><datafield tag="010" ind1=" " ind2=" "><subfield code="a">2006030740</subfield></datafield><datafield tag="015" ind1=" " ind2=" "><subfield code="a">GBA689828</subfield><subfield code="2">dnb</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0470013605</subfield><subfield code="c">hbk.</subfield><subfield code="9">0-470-01360-5</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780470013601</subfield><subfield code="9">978-0-470-01360-1</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)552240550</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV035048396</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="a">xxk</subfield><subfield code="c">GB</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-92</subfield><subfield code="a">DE-29T</subfield><subfield code="a">DE-634</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TK7871.15.F5</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.381</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 3490</subfield><subfield code="0">(DE-625)157325:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Dielectric films for advanced microelectronics</subfield><subfield code="c">ed. by Mikhail Baklanov ...</subfield></datafield><datafield tag="250" ind1=" " ind2=" "><subfield code="a">Repr.</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Chichester</subfield><subfield code="b">Wiley</subfield><subfield code="c">2008</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XXII, 486 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Wiley series in materials for electronic and optoelectronic applications</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references and index</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Dielectric films</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microelectronics</subfield><subfield code="x">Materials</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Dielektrische Schicht</subfield><subfield code="0">(DE-588)4194257-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4143413-4</subfield><subfield code="a">Aufsatzsammlung</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Dielektrische Schicht</subfield><subfield code="0">(DE-588)4194257-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Baklanov, Mikhail</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="856" ind1="4" ind2=" "><subfield code="u">http://www.loc.gov/catdir/toc/ecip071/2006030740.html</subfield><subfield code="3">Table of contents only</subfield></datafield><datafield tag="856" ind1="4" ind2=" "><subfield code="u">http://www.loc.gov/catdir/enhancements/fy0739/2006030740-b.html</subfield><subfield code="3">Contributor biographical information</subfield></datafield><datafield tag="856" ind1="4" ind2=" "><subfield code="u">http://www.loc.gov/catdir/enhancements/fy0739/2006030740-d.html</subfield><subfield code="3">Publisher description</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">LoC Fremddatenuebernahme</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=016717114&sequence=000003&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-016717114</subfield></datafield></record></collection> |
| genre | (DE-588)4143413-4 Aufsatzsammlung gnd-content |
| genre_facet | Aufsatzsammlung |
| id | DE-604.BV035048396 |
| illustrated | Illustrated |
| index_date | 2024-07-02T21:55:38Z |
| indexdate | 2024-07-09T21:21:01Z |
| institution | BVB |
| isbn | 0470013605 9780470013601 |
| language | English |
| lccn | 2006030740 |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-016717114 |
| oclc_num | 552240550 |
| open_access_boolean | |
| owner | DE-92 DE-29T DE-634 |
| owner_facet | DE-92 DE-29T DE-634 |
| physical | XXII, 486 S. Ill., graph. Darst. |
| publishDate | 2008 |
| publishDateSearch | 2008 |
| publishDateSort | 2008 |
| publisher | Wiley |
| record_format | marc |
| series2 | Wiley series in materials for electronic and optoelectronic applications |
| spelling | Dielectric films for advanced microelectronics ed. by Mikhail Baklanov ... Repr. Chichester Wiley 2008 XXII, 486 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Wiley series in materials for electronic and optoelectronic applications Includes bibliographical references and index Dielectric films Microelectronics Materials Dielektrische Schicht (DE-588)4194257-7 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Dielektrische Schicht (DE-588)4194257-7 s DE-604 Baklanov, Mikhail Sonstige oth http://www.loc.gov/catdir/toc/ecip071/2006030740.html Table of contents only http://www.loc.gov/catdir/enhancements/fy0739/2006030740-b.html Contributor biographical information http://www.loc.gov/catdir/enhancements/fy0739/2006030740-d.html Publisher description LoC Fremddatenuebernahme application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=016717114&sequence=000003&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Dielectric films for advanced microelectronics Dielectric films Microelectronics Materials Dielektrische Schicht (DE-588)4194257-7 gnd |
| subject_GND | (DE-588)4194257-7 (DE-588)4143413-4 |
| title | Dielectric films for advanced microelectronics |
| title_auth | Dielectric films for advanced microelectronics |
| title_exact_search | Dielectric films for advanced microelectronics |
| title_exact_search_txtP | Dielectric films for advanced microelectronics |
| title_full | Dielectric films for advanced microelectronics ed. by Mikhail Baklanov ... |
| title_fullStr | Dielectric films for advanced microelectronics ed. by Mikhail Baklanov ... |
| title_full_unstemmed | Dielectric films for advanced microelectronics ed. by Mikhail Baklanov ... |
| title_short | Dielectric films for advanced microelectronics |
| title_sort | dielectric films for advanced microelectronics |
| topic | Dielectric films Microelectronics Materials Dielektrische Schicht (DE-588)4194257-7 gnd |
| topic_facet | Dielectric films Microelectronics Materials Dielektrische Schicht Aufsatzsammlung |
| url | http://www.loc.gov/catdir/toc/ecip071/2006030740.html http://www.loc.gov/catdir/enhancements/fy0739/2006030740-b.html http://www.loc.gov/catdir/enhancements/fy0739/2006030740-d.html http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=016717114&sequence=000003&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT baklanovmikhail dielectricfilmsforadvancedmicroelectronics |