Silicon micromachining: methodological aspects and applications in biomedical pressure sensors
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | English |
| Published: |
Uppsala
Univ.
1992
|
| Series: | Acta Universitatis Upsaliensis : Comprehensive summaries of Uppsala dissertations from the Faculty of Science
404 |
| Subjects: | |
| Physical Description: | 40 S. Ill., graph. Darst. |
| ISBN: | 9155429882 |
Staff View
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV026734728 | ||
| 003 | DE-604 | ||
| 005 | 20110228 | ||
| 007 | t | ||
| 008 | 110326s1992 ad|| m||| 00||| eng d | ||
| 020 | |a 9155429882 |9 91-554-2988-2 | ||
| 035 | |a (OCoLC)636332529 | ||
| 035 | |a (DE-599)BVBBV026734728 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-188 | ||
| 100 | 1 | |a Bäcklund, Ylva |e Verfasser |0 (DE-588)131937510 |4 aut | |
| 245 | 1 | 0 | |a Silicon micromachining |b methodological aspects and applications in biomedical pressure sensors |c by Ylva Bäcklund |
| 264 | 1 | |a Uppsala |b Univ. |c 1992 | |
| 300 | |a 40 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Acta Universitatis Upsaliensis : Comprehensive summaries of Uppsala dissertations from the Faculty of Science |v 404 | |
| 502 | |a Vollst. zugl.: Uppsala, Univ., Diss., 1992 | ||
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 810 | 2 | |a Uppsala Universitet |t Acta Universitatis Upsaliensis |p Comprehensive summaries of Uppsala dissertations from the Faculty of Science |v 404 |w (DE-604)BV000019556 |9 404 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-022274257 | ||
Record in the Search Index
| _version_ | 1804145349469667328 |
|---|---|
| any_adam_object | |
| author | Bäcklund, Ylva |
| author_GND | (DE-588)131937510 |
| author_facet | Bäcklund, Ylva |
| author_role | aut |
| author_sort | Bäcklund, Ylva |
| author_variant | y b yb |
| building | Verbundindex |
| bvnumber | BV026734728 |
| ctrlnum | (OCoLC)636332529 (DE-599)BVBBV026734728 |
| format | Thesis Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01211nam a2200301 cb4500</leader><controlfield tag="001">BV026734728</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20110228 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">110326s1992 ad|| m||| 00||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9155429882</subfield><subfield code="9">91-554-2988-2</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)636332529</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV026734728</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-188</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Bäcklund, Ylva</subfield><subfield code="e">Verfasser</subfield><subfield code="0">(DE-588)131937510</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Silicon micromachining</subfield><subfield code="b">methodological aspects and applications in biomedical pressure sensors</subfield><subfield code="c">by Ylva Bäcklund</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Uppsala</subfield><subfield code="b">Univ.</subfield><subfield code="c">1992</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">40 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Acta Universitatis Upsaliensis : Comprehensive summaries of Uppsala dissertations from the Faculty of Science</subfield><subfield code="v">404</subfield></datafield><datafield tag="502" ind1=" " ind2=" "><subfield code="a">Vollst. zugl.: Uppsala, Univ., Diss., 1992</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4113937-9</subfield><subfield code="a">Hochschulschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="810" ind1="2" ind2=" "><subfield code="a">Uppsala Universitet</subfield><subfield code="t">Acta Universitatis Upsaliensis </subfield><subfield code="p">Comprehensive summaries of Uppsala dissertations from the Faculty of Science</subfield><subfield code="v">404</subfield><subfield code="w">(DE-604)BV000019556</subfield><subfield code="9">404</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-022274257</subfield></datafield></record></collection> |
| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV026734728 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T23:18:02Z |
| institution | BVB |
| isbn | 9155429882 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-022274257 |
| oclc_num | 636332529 |
| open_access_boolean | |
| owner | DE-188 |
| owner_facet | DE-188 |
| physical | 40 S. Ill., graph. Darst. |
| publishDate | 1992 |
| publishDateSearch | 1992 |
| publishDateSort | 1992 |
| publisher | Univ. |
| record_format | marc |
| series2 | Acta Universitatis Upsaliensis : Comprehensive summaries of Uppsala dissertations from the Faculty of Science |
| spelling | Bäcklund, Ylva Verfasser (DE-588)131937510 aut Silicon micromachining methodological aspects and applications in biomedical pressure sensors by Ylva Bäcklund Uppsala Univ. 1992 40 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Acta Universitatis Upsaliensis : Comprehensive summaries of Uppsala dissertations from the Faculty of Science 404 Vollst. zugl.: Uppsala, Univ., Diss., 1992 (DE-588)4113937-9 Hochschulschrift gnd-content Uppsala Universitet Acta Universitatis Upsaliensis Comprehensive summaries of Uppsala dissertations from the Faculty of Science 404 (DE-604)BV000019556 404 |
| spellingShingle | Bäcklund, Ylva Silicon micromachining methodological aspects and applications in biomedical pressure sensors |
| subject_GND | (DE-588)4113937-9 |
| title | Silicon micromachining methodological aspects and applications in biomedical pressure sensors |
| title_auth | Silicon micromachining methodological aspects and applications in biomedical pressure sensors |
| title_exact_search | Silicon micromachining methodological aspects and applications in biomedical pressure sensors |
| title_full | Silicon micromachining methodological aspects and applications in biomedical pressure sensors by Ylva Bäcklund |
| title_fullStr | Silicon micromachining methodological aspects and applications in biomedical pressure sensors by Ylva Bäcklund |
| title_full_unstemmed | Silicon micromachining methodological aspects and applications in biomedical pressure sensors by Ylva Bäcklund |
| title_short | Silicon micromachining |
| title_sort | silicon micromachining methodological aspects and applications in biomedical pressure sensors |
| title_sub | methodological aspects and applications in biomedical pressure sensors |
| topic_facet | Hochschulschrift |
| volume_link | (DE-604)BV000019556 |
| work_keys_str_mv | AT backlundylva siliconmicromachiningmethodologicalaspectsandapplicationsinbiomedicalpressuresensors |