Silicon micromachining: methodological aspects and applications in biomedical pressure sensors
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Abschlussarbeit Buch |
| Sprache: | English |
| Veröffentlicht: |
Uppsala
Univ.
1992
|
| Schriftenreihe: | Acta Universitatis Upsaliensis : Comprehensive summaries of Uppsala dissertations from the Faculty of Science
404 |
| Schlagworte: | |
| Beschreibung: | 40 S. Ill., graph. Darst. |
| ISBN: | 9155429882 |
Internformat
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| id | DE-604.BV026734728 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T23:18:02Z |
| institution | BVB |
| isbn | 9155429882 |
| language | English |
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| physical | 40 S. Ill., graph. Darst. |
| publishDate | 1992 |
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| series2 | Acta Universitatis Upsaliensis : Comprehensive summaries of Uppsala dissertations from the Faculty of Science |
| spelling | Bäcklund, Ylva Verfasser (DE-588)131937510 aut Silicon micromachining methodological aspects and applications in biomedical pressure sensors by Ylva Bäcklund Uppsala Univ. 1992 40 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Acta Universitatis Upsaliensis : Comprehensive summaries of Uppsala dissertations from the Faculty of Science 404 Vollst. zugl.: Uppsala, Univ., Diss., 1992 (DE-588)4113937-9 Hochschulschrift gnd-content Uppsala Universitet Acta Universitatis Upsaliensis Comprehensive summaries of Uppsala dissertations from the Faculty of Science 404 (DE-604)BV000019556 404 |
| spellingShingle | Bäcklund, Ylva Silicon micromachining methodological aspects and applications in biomedical pressure sensors |
| subject_GND | (DE-588)4113937-9 |
| title | Silicon micromachining methodological aspects and applications in biomedical pressure sensors |
| title_auth | Silicon micromachining methodological aspects and applications in biomedical pressure sensors |
| title_exact_search | Silicon micromachining methodological aspects and applications in biomedical pressure sensors |
| title_full | Silicon micromachining methodological aspects and applications in biomedical pressure sensors by Ylva Bäcklund |
| title_fullStr | Silicon micromachining methodological aspects and applications in biomedical pressure sensors by Ylva Bäcklund |
| title_full_unstemmed | Silicon micromachining methodological aspects and applications in biomedical pressure sensors by Ylva Bäcklund |
| title_short | Silicon micromachining |
| title_sort | silicon micromachining methodological aspects and applications in biomedical pressure sensors |
| title_sub | methodological aspects and applications in biomedical pressure sensors |
| topic_facet | Hochschulschrift |
| volume_link | (DE-604)BV000019556 |
| work_keys_str_mv | AT backlundylva siliconmicromachiningmethodologicalaspectsandapplicationsinbiomedicalpressuresensors |