High-rate reactive magnetron sputter deposition and characterization of metal oxide films:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Abschlussarbeit Buch |
| Sprache: | English |
| Veröffentlicht: |
Uppsala
Univ. Library
2000
|
| Schriftenreihe: | Acta Universitatis Upsaliensis : Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology
520 |
| Schlagworte: | |
| Beschreibung: | 78 S. Ill., graph. Darst. |
| ISBN: | 9155446833 |
Internformat
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV026404097 | ||
| 003 | DE-604 | ||
| 005 | 20110228 | ||
| 007 | t | ||
| 008 | 110326s2000 ad|| m||| 00||| eng d | ||
| 020 | |a 9155446833 |9 91-554-4683-3 | ||
| 035 | |a (OCoLC)918299472 | ||
| 035 | |a (DE-599)BVBBV026404097 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-188 | ||
| 100 | 1 | |a Kharrazi Olsson, Maryam |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a High-rate reactive magnetron sputter deposition and characterization of metal oxide films |c by Maryam Kharrazi Olsson |
| 264 | 1 | |a Uppsala |b Univ. Library |c 2000 | |
| 300 | |a 78 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Acta Universitatis Upsaliensis : Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology |v 520 | |
| 502 | |a Vollst. zugl.: Uppsala, Univ., Diss., 2000 | ||
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 810 | 2 | |a Uppsala Universitet |t Acta Universitatis Upsaliensis |p Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology |v 520 |w (DE-604)BV012713281 |9 520 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-021979234 | ||
Datensatz im Suchindex
| _version_ | 1804144924163047424 |
|---|---|
| any_adam_object | |
| author | Kharrazi Olsson, Maryam |
| author_facet | Kharrazi Olsson, Maryam |
| author_role | aut |
| author_sort | Kharrazi Olsson, Maryam |
| author_variant | o m k om omk |
| building | Verbundindex |
| bvnumber | BV026404097 |
| ctrlnum | (OCoLC)918299472 (DE-599)BVBBV026404097 |
| format | Thesis Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01241nam a2200301 cb4500</leader><controlfield tag="001">BV026404097</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20110228 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">110326s2000 ad|| m||| 00||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9155446833</subfield><subfield code="9">91-554-4683-3</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)918299472</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV026404097</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-188</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Kharrazi Olsson, Maryam</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">High-rate reactive magnetron sputter deposition and characterization of metal oxide films</subfield><subfield code="c">by Maryam Kharrazi Olsson</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Uppsala</subfield><subfield code="b">Univ. Library</subfield><subfield code="c">2000</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">78 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Acta Universitatis Upsaliensis : Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology</subfield><subfield code="v">520</subfield></datafield><datafield tag="502" ind1=" " ind2=" "><subfield code="a">Vollst. zugl.: Uppsala, Univ., Diss., 2000</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4113937-9</subfield><subfield code="a">Hochschulschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="810" ind1="2" ind2=" "><subfield code="a">Uppsala Universitet</subfield><subfield code="t">Acta Universitatis Upsaliensis </subfield><subfield code="p">Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology</subfield><subfield code="v">520</subfield><subfield code="w">(DE-604)BV012713281</subfield><subfield code="9">520</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-021979234</subfield></datafield></record></collection> |
| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV026404097 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T23:11:17Z |
| institution | BVB |
| isbn | 9155446833 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-021979234 |
| oclc_num | 918299472 |
| open_access_boolean | |
| owner | DE-188 |
| owner_facet | DE-188 |
| physical | 78 S. Ill., graph. Darst. |
| publishDate | 2000 |
| publishDateSearch | 2000 |
| publishDateSort | 2000 |
| publisher | Univ. Library |
| record_format | marc |
| series2 | Acta Universitatis Upsaliensis : Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology |
| spelling | Kharrazi Olsson, Maryam Verfasser aut High-rate reactive magnetron sputter deposition and characterization of metal oxide films by Maryam Kharrazi Olsson Uppsala Univ. Library 2000 78 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Acta Universitatis Upsaliensis : Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology 520 Vollst. zugl.: Uppsala, Univ., Diss., 2000 (DE-588)4113937-9 Hochschulschrift gnd-content Uppsala Universitet Acta Universitatis Upsaliensis Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology 520 (DE-604)BV012713281 520 |
| spellingShingle | Kharrazi Olsson, Maryam High-rate reactive magnetron sputter deposition and characterization of metal oxide films |
| subject_GND | (DE-588)4113937-9 |
| title | High-rate reactive magnetron sputter deposition and characterization of metal oxide films |
| title_auth | High-rate reactive magnetron sputter deposition and characterization of metal oxide films |
| title_exact_search | High-rate reactive magnetron sputter deposition and characterization of metal oxide films |
| title_full | High-rate reactive magnetron sputter deposition and characterization of metal oxide films by Maryam Kharrazi Olsson |
| title_fullStr | High-rate reactive magnetron sputter deposition and characterization of metal oxide films by Maryam Kharrazi Olsson |
| title_full_unstemmed | High-rate reactive magnetron sputter deposition and characterization of metal oxide films by Maryam Kharrazi Olsson |
| title_short | High-rate reactive magnetron sputter deposition and characterization of metal oxide films |
| title_sort | high rate reactive magnetron sputter deposition and characterization of metal oxide films |
| topic_facet | Hochschulschrift |
| volume_link | (DE-604)BV012713281 |
| work_keys_str_mv | AT kharraziolssonmaryam highratereactivemagnetronsputterdepositionandcharacterizationofmetaloxidefilms |