Plasma models for silicon deposition: = Plasma modellen voor silicium depositie
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Abschlussarbeit Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
1998
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| Schlagworte: | |
| Beschreibung: | 128 S. graph. Darst. |
| ISBN: | 9039318689 |
Internformat
MARC
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| 100 | 1 | |a Nienhuis, Gert Jan |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Plasma models for silicon deposition |b = Plasma modellen voor silicium depositie |c door Gert Jan Nienhuis |
| 246 | 1 | 1 | |a Plasma modellen voor silicium depositie |
| 264 | 1 | |c 1998 | |
| 300 | |a 128 S. |b graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 502 | |a Utrecht, Univ., Diss., 1998 | ||
| 650 | 0 | 7 | |a Abscheidung |0 (DE-588)4141100-6 |2 gnd |9 rswk-swf |
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Datensatz im Suchindex
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| author | Nienhuis, Gert Jan |
| author_facet | Nienhuis, Gert Jan |
| author_role | aut |
| author_sort | Nienhuis, Gert Jan |
| author_variant | g j n gj gjn |
| building | Verbundindex |
| bvnumber | BV026195757 |
| classification_rvk | UP 7550 UP 7570 |
| ctrlnum | (OCoLC)917577164 (DE-599)BVBBV026195757 |
| discipline | Physik |
| format | Thesis Book |
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| genre_facet | Hochschulschrift |
| id | DE-604.BV026195757 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T23:07:02Z |
| institution | BVB |
| isbn | 9039318689 |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-021778947 |
| oclc_num | 917577164 |
| open_access_boolean | |
| owner | DE-188 |
| owner_facet | DE-188 |
| physical | 128 S. graph. Darst. |
| publishDate | 1998 |
| publishDateSearch | 1998 |
| publishDateSort | 1998 |
| record_format | marc |
| spelling | Nienhuis, Gert Jan Verfasser aut Plasma models for silicon deposition = Plasma modellen voor silicium depositie door Gert Jan Nienhuis Plasma modellen voor silicium depositie 1998 128 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Utrecht, Univ., Diss., 1998 Abscheidung (DE-588)4141100-6 gnd rswk-swf Silicium (DE-588)4077445-4 gnd rswk-swf Numerisches Modell (DE-588)4338132-7 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Silicium (DE-588)4077445-4 s Dünne Schicht (DE-588)4136925-7 s Abscheidung (DE-588)4141100-6 s Numerisches Modell (DE-588)4338132-7 s DE-604 |
| spellingShingle | Nienhuis, Gert Jan Plasma models for silicon deposition = Plasma modellen voor silicium depositie Abscheidung (DE-588)4141100-6 gnd Silicium (DE-588)4077445-4 gnd Numerisches Modell (DE-588)4338132-7 gnd Dünne Schicht (DE-588)4136925-7 gnd |
| subject_GND | (DE-588)4141100-6 (DE-588)4077445-4 (DE-588)4338132-7 (DE-588)4136925-7 (DE-588)4113937-9 |
| title | Plasma models for silicon deposition = Plasma modellen voor silicium depositie |
| title_alt | Plasma modellen voor silicium depositie |
| title_auth | Plasma models for silicon deposition = Plasma modellen voor silicium depositie |
| title_exact_search | Plasma models for silicon deposition = Plasma modellen voor silicium depositie |
| title_full | Plasma models for silicon deposition = Plasma modellen voor silicium depositie door Gert Jan Nienhuis |
| title_fullStr | Plasma models for silicon deposition = Plasma modellen voor silicium depositie door Gert Jan Nienhuis |
| title_full_unstemmed | Plasma models for silicon deposition = Plasma modellen voor silicium depositie door Gert Jan Nienhuis |
| title_short | Plasma models for silicon deposition |
| title_sort | plasma models for silicon deposition plasma modellen voor silicium depositie |
| title_sub | = Plasma modellen voor silicium depositie |
| topic | Abscheidung (DE-588)4141100-6 gnd Silicium (DE-588)4077445-4 gnd Numerisches Modell (DE-588)4338132-7 gnd Dünne Schicht (DE-588)4136925-7 gnd |
| topic_facet | Abscheidung Silicium Numerisches Modell Dünne Schicht Hochschulschrift |
| work_keys_str_mv | AT nienhuisgertjan plasmamodelsforsilicondepositionplasmamodellenvoorsiliciumdepositie AT nienhuisgertjan plasmamodellenvoorsiliciumdepositie |