Numerical simulation of single species dopant diffusion in silicon under extrinsic conditions:
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Berlin
ZIB
1997
|
| Series: | Preprint / Konrad-Zuse-Zentrum für Informationstechnik Berlin
SC 97,47 |
| Physical Description: | 26 S. graph. Darst. |
Staff View
MARC
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Record in the Search Index
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| id | DE-604.BV026175465 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T23:06:36Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-021760501 |
| oclc_num | 75874074 |
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| physical | 26 S. graph. Darst. |
| publishDate | 1997 |
| publishDateSearch | 1997 |
| publishDateSort | 1997 |
| publisher | ZIB |
| record_format | marc |
| series2 | Preprint / Konrad-Zuse-Zentrum für Informationstechnik Berlin |
| spelling | Lang, Jens Verfasser aut Numerical simulation of single species dopant diffusion in silicon under extrinsic conditions J. Lang and W. Merz Berlin ZIB 1997 26 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Preprint / Konrad-Zuse-Zentrum für Informationstechnik Berlin SC 97,47 Merz, Wilhelm Sonstige (DE-588)1134912099 oth Konrad-Zuse-Zentrum für Informationstechnik Berlin Preprint SC 97,47 (DE-604)BV023815874 97,47 |
| spellingShingle | Lang, Jens Numerical simulation of single species dopant diffusion in silicon under extrinsic conditions |
| title | Numerical simulation of single species dopant diffusion in silicon under extrinsic conditions |
| title_auth | Numerical simulation of single species dopant diffusion in silicon under extrinsic conditions |
| title_exact_search | Numerical simulation of single species dopant diffusion in silicon under extrinsic conditions |
| title_full | Numerical simulation of single species dopant diffusion in silicon under extrinsic conditions J. Lang and W. Merz |
| title_fullStr | Numerical simulation of single species dopant diffusion in silicon under extrinsic conditions J. Lang and W. Merz |
| title_full_unstemmed | Numerical simulation of single species dopant diffusion in silicon under extrinsic conditions J. Lang and W. Merz |
| title_short | Numerical simulation of single species dopant diffusion in silicon under extrinsic conditions |
| title_sort | numerical simulation of single species dopant diffusion in silicon under extrinsic conditions |
| volume_link | (DE-604)BV023815874 |
| work_keys_str_mv | AT langjens numericalsimulationofsinglespeciesdopantdiffusioninsiliconunderextrinsicconditions AT merzwilhelm numericalsimulationofsinglespeciesdopantdiffusioninsiliconunderextrinsicconditions |