Numerical simulation of single species dopant diffusion in silicon under extrinsic conditions:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Berlin
ZIB
1997
|
| Schriftenreihe: | Preprint / Konrad-Zuse-Zentrum für Informationstechnik Berlin
SC 97,47 |
| Beschreibung: | 26 S. graph. Darst. |
Internformat
MARC
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| 100 | 1 | |a Lang, Jens |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Numerical simulation of single species dopant diffusion in silicon under extrinsic conditions |c J. Lang and W. Merz |
| 264 | 1 | |a Berlin |b ZIB |c 1997 | |
| 300 | |a 26 S. |b graph. Darst. | ||
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| 337 | |b n |2 rdamedia | ||
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| 490 | 1 | |a Preprint / Konrad-Zuse-Zentrum für Informationstechnik Berlin |v SC 97,47 | |
| 700 | 1 | |a Merz, Wilhelm |e Sonstige |0 (DE-588)1134912099 |4 oth | |
| 810 | 2 | |a Konrad-Zuse-Zentrum für Informationstechnik Berlin |t Preprint |v SC 97,47 |w (DE-604)BV023815874 |9 97,47 | |
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Datensatz im Suchindex
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| any_adam_object | |
| author | Lang, Jens |
| author_GND | (DE-588)1134912099 |
| author_facet | Lang, Jens |
| author_role | aut |
| author_sort | Lang, Jens |
| author_variant | j l jl |
| building | Verbundindex |
| bvnumber | BV026175465 |
| ctrlnum | (OCoLC)75874074 (DE-599)BVBBV026175465 |
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| id | DE-604.BV026175465 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T23:06:36Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-021760501 |
| oclc_num | 75874074 |
| open_access_boolean | |
| owner | DE-188 |
| owner_facet | DE-188 |
| physical | 26 S. graph. Darst. |
| publishDate | 1997 |
| publishDateSearch | 1997 |
| publishDateSort | 1997 |
| publisher | ZIB |
| record_format | marc |
| series2 | Preprint / Konrad-Zuse-Zentrum für Informationstechnik Berlin |
| spelling | Lang, Jens Verfasser aut Numerical simulation of single species dopant diffusion in silicon under extrinsic conditions J. Lang and W. Merz Berlin ZIB 1997 26 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Preprint / Konrad-Zuse-Zentrum für Informationstechnik Berlin SC 97,47 Merz, Wilhelm Sonstige (DE-588)1134912099 oth Konrad-Zuse-Zentrum für Informationstechnik Berlin Preprint SC 97,47 (DE-604)BV023815874 97,47 |
| spellingShingle | Lang, Jens Numerical simulation of single species dopant diffusion in silicon under extrinsic conditions |
| title | Numerical simulation of single species dopant diffusion in silicon under extrinsic conditions |
| title_auth | Numerical simulation of single species dopant diffusion in silicon under extrinsic conditions |
| title_exact_search | Numerical simulation of single species dopant diffusion in silicon under extrinsic conditions |
| title_full | Numerical simulation of single species dopant diffusion in silicon under extrinsic conditions J. Lang and W. Merz |
| title_fullStr | Numerical simulation of single species dopant diffusion in silicon under extrinsic conditions J. Lang and W. Merz |
| title_full_unstemmed | Numerical simulation of single species dopant diffusion in silicon under extrinsic conditions J. Lang and W. Merz |
| title_short | Numerical simulation of single species dopant diffusion in silicon under extrinsic conditions |
| title_sort | numerical simulation of single species dopant diffusion in silicon under extrinsic conditions |
| volume_link | (DE-604)BV023815874 |
| work_keys_str_mv | AT langjens numericalsimulationofsinglespeciesdopantdiffusioninsiliconunderextrinsicconditions AT merzwilhelm numericalsimulationofsinglespeciesdopantdiffusioninsiliconunderextrinsicconditions |