Behrisch, R. (1991). Sputtering by particle bombardment: Physical sputtering of single-element solids. Springer.
Chicago Style (17th ed.) CitationBehrisch, R. Sputtering by Particle Bombardment: Physical Sputtering of Single-element Solids. Berlin [u.a.]: Springer, 1991.
MLA (9th ed.) CitationBehrisch, R. Sputtering by Particle Bombardment: Physical Sputtering of Single-element Solids. Springer, 1991.
Warning: These citations may not always be 100% accurate.