Sputtering by particle bombardment: physical sputtering of single-element solids 3 Characteristics of sputtered particles, technical applications
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Berlin [u.a.]
Springer
1991
|
| Schriftenreihe: | Topics in applied physics
64 |
| Schlagworte: | |
| Beschreibung: | XIII, 410 S. Ill. |
| ISBN: | 3540534288 0387534288 |
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Datensatz im Suchindex
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| author2 | Behrisch, R. |
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| illustrated | Illustrated |
| indexdate | 2024-07-09T22:15:24Z |
| institution | BVB |
| isbn | 3540534288 0387534288 |
| language | English |
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| physical | XIII, 410 S. Ill. |
| publishDate | 1991 |
| publishDateSearch | 1991 |
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| series | Topics in applied physics |
| series2 | Topics in applied physics |
| spelling | Sputtering by particle bombardment physical sputtering of single-element solids 3 Characteristics of sputtered particles, technical applications ed. by R. Behrisch ... Berlin [u.a.] Springer 1991 XIII, 410 S. Ill. txt rdacontent n rdamedia nc rdacarrier Topics in applied physics 64 Topics in applied physics ... Sputtern (DE-588)4182614-0 gnd rswk-swf Zerstäubung (DE-588)4067687-0 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Sputtern (DE-588)4182614-0 s DE-604 Zerstäubung (DE-588)4067687-0 s Behrisch, R. edt (DE-604)BV025886718 3 Topics in applied physics 64 (DE-604)BV008007504 64 |
| spellingShingle | Sputtering by particle bombardment physical sputtering of single-element solids Topics in applied physics Sputtern (DE-588)4182614-0 gnd Zerstäubung (DE-588)4067687-0 gnd |
| subject_GND | (DE-588)4182614-0 (DE-588)4067687-0 (DE-588)4143413-4 |
| title | Sputtering by particle bombardment physical sputtering of single-element solids |
| title_auth | Sputtering by particle bombardment physical sputtering of single-element solids |
| title_exact_search | Sputtering by particle bombardment physical sputtering of single-element solids |
| title_full | Sputtering by particle bombardment physical sputtering of single-element solids 3 Characteristics of sputtered particles, technical applications ed. by R. Behrisch ... |
| title_fullStr | Sputtering by particle bombardment physical sputtering of single-element solids 3 Characteristics of sputtered particles, technical applications ed. by R. Behrisch ... |
| title_full_unstemmed | Sputtering by particle bombardment physical sputtering of single-element solids 3 Characteristics of sputtered particles, technical applications ed. by R. Behrisch ... |
| title_short | Sputtering by particle bombardment |
| title_sort | sputtering by particle bombardment physical sputtering of single element solids characteristics of sputtered particles technical applications |
| title_sub | physical sputtering of single-element solids |
| topic | Sputtern (DE-588)4182614-0 gnd Zerstäubung (DE-588)4067687-0 gnd |
| topic_facet | Sputtern Zerstäubung Aufsatzsammlung |
| volume_link | (DE-604)BV025886718 (DE-604)BV008007504 |
| work_keys_str_mv | AT behrischr sputteringbyparticlebombardmentphysicalsputteringofsingleelementsolids3 |