Ion implantation: science and technology
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
Orlando [u.a.]
Acad. Press
1984
|
| Schlagworte: | |
| Beschreibung: | XI, 635 S. Ill. |
| ISBN: | 0127806202 |
Internformat
MARC
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| 245 | 1 | 0 | |a Ion implantation |b science and technology |c ed. by J. F. Ziegler |
| 264 | 1 | |a Orlando [u.a.] |b Acad. Press |c 1984 | |
| 300 | |a XI, 635 S. |b Ill. | ||
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Datensatz im Suchindex
| _version_ | 1804141400400330752 |
|---|---|
| any_adam_object | |
| author2 | Ziegler, James F. |
| author2_role | edt |
| author2_variant | j f z jf jfz |
| author_facet | Ziegler, James F. |
| building | Verbundindex |
| bvnumber | BV025938094 |
| classification_rvk | UP 9350 |
| ctrlnum | (OCoLC)251691478 (DE-599)BVBBV025938094 |
| discipline | Physik |
| format | Book |
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| id | DE-604.BV025938094 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T22:15:16Z |
| institution | BVB |
| isbn | 0127806202 |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-019182247 |
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| physical | XI, 635 S. Ill. |
| publishDate | 1984 |
| publishDateSearch | 1984 |
| publishDateSort | 1984 |
| publisher | Acad. Press |
| record_format | marc |
| spelling | Ion implantation science and technology ed. by J. F. Ziegler Orlando [u.a.] Acad. Press 1984 XI, 635 S. Ill. txt rdacontent n rdamedia nc rdacarrier Silicium (DE-588)4077445-4 gnd rswk-swf Festkörper (DE-588)4016918-2 gnd rswk-swf Dotant (DE-588)4150490-2 gnd rswk-swf Metallurgie (DE-588)4074756-6 gnd rswk-swf Technologie (DE-588)4059276-5 gnd rswk-swf Ionenimplantation (DE-588)4027606-5 gnd rswk-swf Messung (DE-588)4038852-9 gnd rswk-swf 1\p (DE-588)4143413-4 Aufsatzsammlung gnd-content Ionenimplantation (DE-588)4027606-5 s DE-604 Festkörper (DE-588)4016918-2 s Silicium (DE-588)4077445-4 s Dotant (DE-588)4150490-2 s Metallurgie (DE-588)4074756-6 s Technologie (DE-588)4059276-5 s Messung (DE-588)4038852-9 s Ziegler, James F. edt 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Ion implantation science and technology Silicium (DE-588)4077445-4 gnd Festkörper (DE-588)4016918-2 gnd Dotant (DE-588)4150490-2 gnd Metallurgie (DE-588)4074756-6 gnd Technologie (DE-588)4059276-5 gnd Ionenimplantation (DE-588)4027606-5 gnd Messung (DE-588)4038852-9 gnd |
| subject_GND | (DE-588)4077445-4 (DE-588)4016918-2 (DE-588)4150490-2 (DE-588)4074756-6 (DE-588)4059276-5 (DE-588)4027606-5 (DE-588)4038852-9 (DE-588)4143413-4 |
| title | Ion implantation science and technology |
| title_auth | Ion implantation science and technology |
| title_exact_search | Ion implantation science and technology |
| title_full | Ion implantation science and technology ed. by J. F. Ziegler |
| title_fullStr | Ion implantation science and technology ed. by J. F. Ziegler |
| title_full_unstemmed | Ion implantation science and technology ed. by J. F. Ziegler |
| title_short | Ion implantation |
| title_sort | ion implantation science and technology |
| title_sub | science and technology |
| topic | Silicium (DE-588)4077445-4 gnd Festkörper (DE-588)4016918-2 gnd Dotant (DE-588)4150490-2 gnd Metallurgie (DE-588)4074756-6 gnd Technologie (DE-588)4059276-5 gnd Ionenimplantation (DE-588)4027606-5 gnd Messung (DE-588)4038852-9 gnd |
| topic_facet | Silicium Festkörper Dotant Metallurgie Technologie Ionenimplantation Messung Aufsatzsammlung |
| work_keys_str_mv | AT zieglerjamesf ionimplantationscienceandtechnology |