APA (7th ed.) Citation

Behrisch, R. Sputtering by particle bombardment. Springer.

Chicago Style (17th ed.) Citation

Behrisch, Rainer. Sputtering by Particle Bombardment. Berlin [u.a.]: Springer.

MLA (9th ed.) Citation

Behrisch, Rainer. Sputtering by Particle Bombardment. Springer.

Warning: These citations may not always be 100% accurate.