Sputtering by particle bombardment:
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
Berlin [u.a.]
Springer
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| Schriftenreihe: | Topics in applied physics
... |
| Schlagworte: |
Internformat
MARC
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Datensatz im Suchindex
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| series | Topics in applied physics |
| series2 | Topics in applied physics |
| spelling | Sputtering by particle bombardment ed. by R. Behrisch Berlin [u.a.] Springer txt rdacontent n rdamedia nc rdacarrier Topics in applied physics ... Sputtern (DE-588)4182614-0 gnd rswk-swf Zerstäubung (DE-588)4067687-0 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Sputtern (DE-588)4182614-0 s DE-604 Zerstäubung (DE-588)4067687-0 s Behrisch, Rainer edt Topics in applied physics ... (DE-604)BV008007504 |
| spellingShingle | Sputtering by particle bombardment Topics in applied physics Sputtern (DE-588)4182614-0 gnd Zerstäubung (DE-588)4067687-0 gnd |
| subject_GND | (DE-588)4182614-0 (DE-588)4067687-0 (DE-588)4143413-4 |
| title | Sputtering by particle bombardment |
| title_auth | Sputtering by particle bombardment |
| title_exact_search | Sputtering by particle bombardment |
| title_full | Sputtering by particle bombardment ed. by R. Behrisch |
| title_fullStr | Sputtering by particle bombardment ed. by R. Behrisch |
| title_full_unstemmed | Sputtering by particle bombardment ed. by R. Behrisch |
| title_short | Sputtering by particle bombardment |
| title_sort | sputtering by particle bombardment |
| topic | Sputtern (DE-588)4182614-0 gnd Zerstäubung (DE-588)4067687-0 gnd |
| topic_facet | Sputtern Zerstäubung Aufsatzsammlung |
| volume_link | (DE-604)BV008007504 |
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