Ion implantation in semiconductors:
Saved in:
| Main Authors: | , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Brookfield [u.a.]
Trans Tech Publ.
1988
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| Subjects: | |
| Item Description: | Previously publ. in: Diffusion and defect data: Part B: Solid state phenomena |
| Physical Description: | V, 473 S. Ill., graph. Darst. |
| ISBN: | 0878495754 |
Staff View
MARC
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| 300 | |a V, 473 S. |b Ill., graph. Darst. | ||
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Record in the Search Index
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| author | Stievenard, D. Bourgoin, J. C. |
| author_facet | Stievenard, D. Bourgoin, J. C. |
| author_role | aut aut |
| author_sort | Stievenard, D. |
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| building | Verbundindex |
| bvnumber | BV025886502 |
| classification_rvk | UP 3000 UP 9350 ZN 4180 |
| ctrlnum | (OCoLC)877904004 (DE-599)BVBBV025886502 |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| genre | (DE-588)4143413-4 Aufsatzsammlung gnd-content |
| genre_facet | Aufsatzsammlung |
| id | DE-604.BV025886502 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T22:14:24Z |
| institution | BVB |
| isbn | 0878495754 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-019133185 |
| oclc_num | 877904004 |
| open_access_boolean | |
| owner | DE-11 DE-703 DE-83 |
| owner_facet | DE-11 DE-703 DE-83 |
| physical | V, 473 S. Ill., graph. Darst. |
| publishDate | 1988 |
| publishDateSearch | 1988 |
| publishDateSort | 1988 |
| publisher | Trans Tech Publ. |
| record_format | marc |
| spelling | Stievenard, D. Verfasser aut Ion implantation in semiconductors D. Stievenard ; J. C. Bourgoin Brookfield [u.a.] Trans Tech Publ. 1988 V, 473 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Previously publ. in: Diffusion and defect data: Part B: Solid state phenomena Halbleiterphysik (DE-588)4113829-6 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf Ionenimplantation (DE-588)4027606-5 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Halbleiter (DE-588)4022993-2 s Ionenimplantation (DE-588)4027606-5 s DE-604 Halbleiterphysik (DE-588)4113829-6 s Bourgoin, J. C. Verfasser aut |
| spellingShingle | Stievenard, D. Bourgoin, J. C. Ion implantation in semiconductors Halbleiterphysik (DE-588)4113829-6 gnd Halbleiter (DE-588)4022993-2 gnd Ionenimplantation (DE-588)4027606-5 gnd |
| subject_GND | (DE-588)4113829-6 (DE-588)4022993-2 (DE-588)4027606-5 (DE-588)4143413-4 |
| title | Ion implantation in semiconductors |
| title_auth | Ion implantation in semiconductors |
| title_exact_search | Ion implantation in semiconductors |
| title_full | Ion implantation in semiconductors D. Stievenard ; J. C. Bourgoin |
| title_fullStr | Ion implantation in semiconductors D. Stievenard ; J. C. Bourgoin |
| title_full_unstemmed | Ion implantation in semiconductors D. Stievenard ; J. C. Bourgoin |
| title_short | Ion implantation in semiconductors |
| title_sort | ion implantation in semiconductors |
| topic | Halbleiterphysik (DE-588)4113829-6 gnd Halbleiter (DE-588)4022993-2 gnd Ionenimplantation (DE-588)4027606-5 gnd |
| topic_facet | Halbleiterphysik Halbleiter Ionenimplantation Aufsatzsammlung |
| work_keys_str_mv | AT stievenardd ionimplantationinsemiconductors AT bourgoinjc ionimplantationinsemiconductors |